Piezoelectric element and touch screen utilizing the same
First Claim
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1. A touch screen comprising:
- a substrate including a detection region and a marginal region surrounding the detection region;
a wave generator arranged in the marginal region for generating a surface acoustic wave in the substrate; and
a wave receiver arranged in the marginal region for receiving the surface acoustic wave;
each of the wave generator and the wave receiver comprising;
a piezoelectric layer having a first surface facing the substrate and a second surface opposite to the first surface, the piezoelectric layer having a thickness h;
a first electrode arranged between the substrate and the first surface of the piezoelectric layer; and
a second electrode held in contact with the second surface of the piezoelectric layer;
wherein one of the first electrode and the second electrode includes a common base and a plurality of parallel branches extending from the base, the branches being spaced from each other by a pitch λ
, the other of the first electrode and the second electrode including a portion that faces the branches via the piezoelectric layer,wherein the thickness h and the pitch λ
are determined to satisfy an inequality 0.005≦
h/λ
≦
0.1,wherein the first electrode has a hillock occurrence rate which is no greater than 0.1%.
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Abstract
A piezoelectric element includes a substrate, a lower electrode on the substrate, a piezoelectric layer on the lower electrode, and an upper electrode on the piezoelectric layer. The upper electrode includes a common base and a plurality of parallel branches extending from the base. The branches are arranged at a regular interval or pitch λ1. The lower electrode faces the branches of the upper electrode via the piezoelectric layer. The thickness h of the piezoelectric layer and the branch pitch λ1 are determined to satisfy an inequality 0.005≦h/λ1≦0.1. The lower electrode has a hillock occurrence rate which is no greater than 0.1%.
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Citations
8 Claims
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1. A touch screen comprising:
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a substrate including a detection region and a marginal region surrounding the detection region; a wave generator arranged in the marginal region for generating a surface acoustic wave in the substrate; and a wave receiver arranged in the marginal region for receiving the surface acoustic wave; each of the wave generator and the wave receiver comprising; a piezoelectric layer having a first surface facing the substrate and a second surface opposite to the first surface, the piezoelectric layer having a thickness h; a first electrode arranged between the substrate and the first surface of the piezoelectric layer; and a second electrode held in contact with the second surface of the piezoelectric layer; wherein one of the first electrode and the second electrode includes a common base and a plurality of parallel branches extending from the base, the branches being spaced from each other by a pitch λ
, the other of the first electrode and the second electrode including a portion that faces the branches via the piezoelectric layer,wherein the thickness h and the pitch λ
are determined to satisfy an inequality 0.005≦
h/λ
≦
0.1,wherein the first electrode has a hillock occurrence rate which is no greater than 0.1%. - View Dependent Claims (2, 3, 4, 6, 7, 8)
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5. A piezoelectric element comprising:
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a substrate; a piezoelectric layer having a first surface and a second surface opposite to the first surface, the first surface facing the substrate, the piezoelectric layer having a thickness h; a first electrode arranged between the substrate and the first surface of the piezoelectric layer; and a second electrode held in contact with the second surface of the piezoelectric layer; wherein one of the first electrode and the second electrode includes a common base and a plurality of parallel branches extending from the base, the branches being spaced from each other by a pitch λ
, the other of the first electrode and the second electrode including a portion that faces the branches via the piezoelectric layer,wherein the thickness h and the pitch λ
are determined to satisfy an inequality 0.005≦
h/λ
≦
0.1,wherein the first electrode has a hillock occurrence rate which is no greater than 0.1%.
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Specification