Method for constructing a membrane probe using a depression
First Claim
Patent Images
1. A method of constructing a membrane probe comprising:
- (a) providing a substrate that includes a depression therein;
(b) locating conductive material within said depression, a conductive trace electrically connected to said conductive material, and membrane supporting said conductive material, at least a portion of said membrane interposed between said conductive trace and said substrate; and
(c) removing said substrate from said conductive material.
4 Assignments
0 Petitions
Accused Products
Abstract
A method for constructing a membrane probe that includes providing a substrate, and creating a depression within the substrate. Conductive material is located within the depression and a conductive trace is connected to the conductive material. A membrane is applied to support the conductive material and the substrate is removed from the conductive material.
462 Citations
32 Claims
-
1. A method of constructing a membrane probe comprising:
-
(a) providing a substrate that includes a depression therein; (b) locating conductive material within said depression, a conductive trace electrically connected to said conductive material, and membrane supporting said conductive material, at least a portion of said membrane interposed between said conductive trace and said substrate; and (c) removing said substrate from said conductive material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
-
-
29. A method of creating a probe comprising
(a) providing a substrate with a pattern thereon defining a plurality of openings; -
(b) creating a set of depressions within said openings; (c) locating conductive material within said depressions, a conductive trace electrically connected to said conductive material, and membrane supporting said conductive material, at least a portion of said membrane interposed between said conductive trace and said substrate; and (d) removing said substrate from said conductive material. - View Dependent Claims (30, 31, 32)
-
Specification