Resonant sensor and sensing system

• US 7,178,378 B2
• Filed: 08/28/2003
• Issued: 02/20/2007
• Est. Priority Date: 08/29/2002
• Status: Expired due to Fees

• Current Assignee: ProterixBio, Inc.
• Original Assignee: BioScale, Inc.
• Inventors: Miller, Michael, Schmidt, Martin, Lundstrom, Mark, Srivastava, Alok, Crawley, Ed, Masters, Brett
• Primary Examiner(s): Williams; Hezron
• Assistant Examiner(s): West; Paul M.
• Application Number:
  US10/651,338
• Publication Number:
  US 20050005676A1
• Time in Patent Office: 1,272 Days
• Field of Search: 73/240.1, 73/240.6, 73/645.3
• US Class Current: 73/24.06
• CPC Class Codes: B81B 2201/0214 Biosensors; Chemical sensors
• CPC Class Codes: B81B 3/0089 Chemical or biological characteristics, e.g. layer which makes a surface chemically active
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: G01L 1/10 by measuring variations of frequency of stressed vibrating elements, e.g. of stressed strings using resistance strain gauges G01L1/22
• CPC Class Codes: G01N 2291/0257 with a layer containing at least one organic compound
• CPC Class Codes: G01N 2291/0427 Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
• CPC Class Codes: G01N 29/036 by measuring frequency or resonance of acoustic waves

Abstract

The disclosed sensor chip includes a substrate and a moving member coupled to the substrate and disposed for movement relative to the substrate. The moving member moves relative to the substrate in a first direction and in a second direction in response to movement of the substrate. The first direction is different than the second direction. The moving member includes a plurality of receptors. The receptors are configured for selectively binding to a first measurand.

Claims

1. A sensor chip including a substrate, a plurality of anchors, a plurality of tethers, and a moving member coupled to the substrate and disposed for movement relative to the substrate, wherein the anchors are fixed relative to the substrate and the tethers are connected to the anchors and the moving member, the moving member having an oscillatory motion in a first direction and an oscillatory motion in a second direction in response to movement of the substrate, the first direction being different than the second direction, the moving member including a plurality of receptors, the receptors being configured for selectively binding to a first measurand.

2. A sensor chip according to claim 1, the sensor chip including a plurality of moving members, each of the moving members being coupled to the substrate for movement relative to the substrate, each of the moving members including a plurality of receptors, the receptors of each moving member being configured for selectively binding to a measurand.

3. A sensor chip according to claim 2, the receptors of a first moving member being configured for selectively binding to a first measurand and the receptors of a second moving member being configured for selectively binding to a second measurand, the first measurand being different than the second measurand.

4. A sensor chip according to claim 2, the receptors of a first moving member being configured for selectively binding to a first measurand and the receptors of a second moving member being configured for selectively binding to a second measurand, the receptors of the first moving member being different than the receptors of the second moving member, the first measurand being the same as the second measurand.

5. A sensor chip according to claim 1, the moving member, the tethers, and the anchors comprising silicon.

6. A sensor chip according to claim 1, the moving member comprising metal.

7. A sensor chip according to claim 6, the metal being a member of the group consisting of nickel, iron, gold, and copper.

8. A sensor chip according to claim 1, the moving member defining a first plane, the substrate defining a second plane, the first plane being substantially parallel to the second plane.

9. A sensor chip according to claim 8, the first direction and the second direction being substantially parallel to the first plane, the first direction being substantially perpendicular to the second direction.

10. A sensor chip according to claim 9, the moving member also oscillating relative to the substrate about an axis substantially perpendicular to the first plane in response to movement of the substrate.

11. A sensor chip according to claim 1, further including an optical grating disposed on the moving member and an optical grating disposed on the substrate, the optical gratings permitting measurement of the position of the moving member relative to the substrate in the first and second directions.

12. A sensor chip according to claim 1, the first direction being substantially perpendicular to the second direction.

13. A sensor chip according to claim 1, the first direction being substantially linear, the second direction being rotational.

14. A method of determining a property of a sample, comprising:

A. providing a sensing chip, the sensing chip including a substrate, a plurality of anchors, a plurality of tethers, and a resonant sensor, the resonant sensor including a moving member disposed for movement relative to the substrate, wherein the anchors are fixed reletive to the substrate and the tethers are connected to the anchors and the moving member;

B. exposing the sensing chip to a sample;

C. moving the substrate;

D. monitoring an oscillatory movement, relative to the substrate, of the moving member in a first direction; and

E. monitoring an oscillatory movement, relative to the substrate, of the moving member in a second direction, the second direction being different than the first direction.

15. A method according to claim 14, the property of the sample being whether the sample includes a particular measurand.

16. A method according to claim 15, the measurand being an analyte.

17. A method according to claim 14, further including comparing monitored movements of the moving member in the first and second direction with predetermined functions.

18. A method according to claim 17, the predetermined functions representing previously monitored movements of the moving member relative to the substrate.

19. A method according to claim 14, further including comparing monitored movements of the moving member in the first and second directions with previously monitored movements of the moving member in the first and second directions.

20. A method according to claim 14, further including monitoring a magnitude and phase of a frequency response of the moving member.

21. A method according to claim 20, further including comparing the monitored magnitude and phase of the frequency response with predetermined functions.

22. A method of determining a property of a sample, comprising:

A. providing a first sensing chip, the first sensing chip including a first substrate, a pluarlity of anchors, a plurality of tethers, and a first resonant sensor, the first resonant sensor including a first moving member disposed for movement relative to the first substrate, wherein the anchors are fixed relative to the substrate and the tethers are connected to the anchors and the moving member;

B. measuring a response of the first moving member to a first environment, including the steps of;

1. exposing the first sensing chip to a first environment;

2. moving the first substrate;

3. monitoring an oscillatory movement of the first moving member in a first direction; and

;

4. monitoring an oscillatory movement of the first moving member in a second direction, the second direction being different than the first direction;

C. providing a second sensing chip, the second sensing chip including a second substrate, a plurality of anchors, a plurality of tethers, and a second resonant sensor, the second resonant sensor including a second moving member disposed for movement relative to the second substrate, wherein the anchors are fixed relative to the substrate and the tethers are connected to the anchors and the moving member;

D. measuring a response of the second moving member to a second environment, the second environment being different than the first environment, including the steps of;

1. exposing the second sensing chip to a second environment;

2. moving the second substrate;

3. monitoring an oscillatory movement of the second moving member in the first direction; and

;

4. monitoring an oscillatory movement of the moving member in the second direction;

E. comparing the measured responses of the first and second moving members.

23. A method according to claim 22, wherein exposing the second sensing chip to a second environment comprises exposing the second resonant sensor to a sample.

24. A method of determining a property of a sample, comprising:

A. providing a sensing chip, the sensing chip including a substrate, a plurality of anchors, a plurality of tethers, and a resonant sensor, the resonant sensor including a moving member disposed for movement relative to the substrate, wherein the anchors are fixed relative to the substrate and the tethers are connected to the anchors and the moving member;

B. measuring a response of the moving member to a first environment, including the steps of;

1. exposing the sensing chip to a first environment;

2. moving the substrate;

3. monitoring an oscillatory movement of the moving member in a first direction; and

;

4. monitoring an oscillatory movement of the moving member in a second direction, the second direction being different than the first direction;

C. measuring a response of the moving member to a second environment, the second environment being different than the first environment, including the steps of;

1. exposing the sensing chip to a second environment;

2. moving the substrate;

3. monitoring an oscillatory movement of the moving member in the first direction; and

;

4. monitoring an oscillatory movement of the moving member in the second direction;

D. comparing the measured responses of the moving member in response to the first and second environments.

25. A sensing system comprising:

A. a sensor chip, the sensor chip including a substrate and a moving member coupled to the substrate and disposed for movement relative to the substrate, the moving member moving in an oscillatory manner relative to the substrate in a first direction and in an oscillatory manner in a second direction in response to movement of the substrate, the first direction being different than the second direction;

B. an optical system, the optical system generating an output signal representative of movement of the moving member in the first direction and of movement of the moving member in the second direction.

26. A system according to claim 25, the first direction being substantially perpendicular to the second direction.

27. A system according to claim 25, the first direction being substantially linear, the second direction being rotational.

28. A system according to claim 25, the moving member defining an optical grating, the substrate defining an optical grating, the optical system monitoring light diffracted from the optical gratings.

29. A system according to claim 25, the sensor chip including a plurality of moving members, each of the moving members being disposed for movement relative to the substrate in a first direction and a second direction.

30. A system according to claim 29, further including a cover for isolating one or more of the moving members from an ambient environment.

31. A system according to claim 29, a first one of the moving members including a first receptor area, a second one of the moving members including a second receptor area.

32. A system according to claim 31, the first receptor area and the second receptor area being configured for selectively binding to a first measurand.

33. A system according to claim 31, the first receptor area being configured for selectively binding to a first measurand, the second receptor area being configured for selectively binding to a second measurand.

34. A system according to claim 33, the first measurand being different than the second measurand.

35. A system according to claim 33, the receptors of the first receptor area being different than the receptors of the second receptor area, the first measurand being the same as the second measurand.

36. A system according to claim 25, the moving member including a plurality of receptors, the receptors being configured for selectively binding to a first measurand.

37. A sensing system comprising:

A. a sensing chip, the sensing chip including a substrate and a resonant sensor, the resonant sensor including a moving member and a connector, the connector coupling the moving member to the substrate, the moving member being disposed for movement relative to the substrate, the moving member oscillating, relative to the substrate, in a first direction and oscillating, relative to the substrate, in a second direction in response to movement of the substrate;

B. an optical system, the optical system generating an output signal representative of a frequency of oscillation of the moving member in the first direction and of a frequency of oscillation of the moving member in the second direction.

38. A sensing system comprising:

A. a sensing chip, the sensing chip including a substrate and a plurality of resonant sensors, each of the resonant sensors including a moving member disposed for movement relative to the substrate, the moving member of each of the sensors oscillating, relative to the substrate, in a first direction and oscillating, relative to the substrate, in a second direction in response to movement of the substrate;

B. an optical system, the optical system generating an output signal representative of a frequency of oscillation of each of the moving members in the first direction and of a frequency of oscillation of each of the moving members in the second direction.

39. A sensor chip including a substrate and a moving member coupled to the substrate and disposed for movement relative to the substrate, the moving member having an oscillatory motion in a first direction and an oscillatory motion in a second direction in response to movement of the substrate, the first direction being different than the second direction, the moving member including a plurality of receptors, the receptors being configured for selectively binding to a first measurand, wherein the sensor chip also includes an optical grating disposed on the moving member and an optical grating disposed on the substrate, the optical gratings permitting measurement of the position of the moving member relative to the substrate in the first and second directions.

40. A method of determining a property of a sample, comprising:

A. providing a sensing chip, the sensing chip including a substrate and a resonant sensor, the resonant sensor including a moving member disposed for movement relative to the substrate, wherein the sensing chip also includes an optical grating disposed on the moving member and an optical grating disposed on the substrate;

B. exposing the sensing chip to a sample;

C. moving the substrate;

D. monitoring an oscillatory movement with the optical gratings, relative to the substrate, of the moving member in a first direction; and

E. monitoring an oscillatory movement with the optical gratings, relative to the substrate, of the moving member in a second direction, the second direction being different than the first direction.