Method and apparatus for scanning in scanning probe microscopy and presenting results

• US 7,178,387 B1
• Filed: 06/10/2004
• Issued: 02/20/2007
• Est. Priority Date: 03/08/2001
• Status: Expired due to Fees

• Current Assignee: Terraspan LLC
• Original Assignee: General Nanotechnology LLC
• Inventors: Kley, Victor B.
• Primary Examiner(s): RAEVIS, ROBERT R
• Application Number:
  US10/866,642
• Time in Patent Office: 985 Days
• Field of Search: 731/05, 250/306, 250/307, 324/200, 324/226, 324/227, 324/457, 374/100, 374/137
• US Class Current: 73/105
• CPC Class Codes: G01Q 10/06 Circuits or algorithms therefor
• CPC Class Codes: Y10S 977/851 Particular movement or positioning of scanning tip
• CPC Class Codes: Y10S 977/852 for detection of specific nanostructure sample or nanostructure-related property

Abstract

Information is collected from a region of interest using a scanning probe microscope having a tip by moving the tip along at least one predefined path extending from a center location to a peripheral location in the region of interest and collecting information using the tip at a plurality of sample points along the at least one predefined path. The predefined path may be based on a radial line defined between the center location and the peripheral location, and may follow a zig-zag, sinusoidal, constant-curve, rectangular trajectory generally tracking the radial line.

Claims

1. A method for collecting information from a region of interest using a scanning probe microscope (SPM) having a tip, the method comprising:

moving said tip along at least three predefined paths spanning said region of interest, the at least three predefined paths being distributed around a center location with respect to said region of interest such that each one of the at least three predefined paths extends from the center location to a peripheral location with respect to said region of interest without returning to the center location, each one of the at least three predefined paths crossing a radial line at least three times at non-zero angles, each radial line extending from the center location to a peripheral location with respect to said region of interest, each radial line having a different angle with respect to said region of interest; and

collecting information using said tip at a plurality of sample points along said at least three predefined paths.

2. The method of claim 1, wherein each of said predefined paths follows a zig-zag trajectory.

3. The method of claim 2, wherein said zig-zag trajectory comprises a plurality of contiguously connected linear segments, each of said continuously connected linear segments crossing said radial line.

4. The method of claim 3, wherein said linear segments are variably sized as a function of distance from said center location such that said linear segments are longer as distance from said center location increases.

5. The method of claim 3, wherein at least one pair of said contiguously connected linear segments forms a turn angle between the pair of contiguously connected linear segments to define a turn in at least one of said predefined paths.

6. The method of claim 5, wherein density with which said sample points cover said region of interest is increased by decreasing said turn angle.

7. The method of claim 5, wherein density with which said sample points cover said region of interest is increased by shortening at least one of said contiguously connected linear segments.

8. The method of claim 5, wherein density with which said sample points cover said region of interest is increased by orienting at least one of contiguously connected linear segments to be more perpendicular to said radial line.

9. The method of claim 1, wherein said at least three predefined paths are distributed evenly around said center location in said region of interest.

10. The method of claim 1, wherein said information relates to a characteristic selected from the group consisting of surface height, sidewall location, temperature, light intensity, tunnel current, electrical field strength, and magnetic field strength.