Coplanar proofmasses employable to sense acceleration along three axes
First Claim
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1. An apparatus, comprising:
- a first proofmass employable to sense a first acceleration along a first input axis;
a second proofmass employable to sense a second acceleration along a second input axis; and
a third proofmass employable to sense a third acceleration along a third input axis;
wherein the first input axis, the second input axis, and the third input axis are substantially orthogonal; and
wherein the first proofmass, the second proofmass, and the third proofmass are substantially coplanar; and
wherein each of the first proofmass, the second proofmass, and the third proofmass comprise one or more voids, a center of geometry, and a center of mass; and
wherein the one or more voids serve to position the center of mass below the center of geometry; and
wherein the one or more voids are positioned in the first proofmass, the second proofmass, and the third proofmass to orient the first input axis, the second input axis, and the third input axis into three substantially orthogonal directions; and
wherein the first proofmass, the second proofmass, and the third proofmass lie substantially in a plane; and
wherein the one or more voids in the first and second proofmasses orient the first and second input axes in an in-plane direction; and
wherein the first proofmass is positioned relative to the second proofmass in the plane to orient the first input axis to be orthogonal to the second input axis; and
wherein the one or more voids in the third proofmass serve to position the center of mass of the third proofmass below the center of geometry and to a side of an axis of rotation of the third proofmass to orient the third input axis into an out-of-plane direction orthogonal to the first and second input axes.
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Abstract
An apparatus in one example comprises a first proofmass employable to sense a first acceleration along a first input axis; a second proofmass employable to sense a second acceleration along a second input axis; and a third proofmass employable to sense a third acceleration along a third input axis. The first input axis, the second input axis, and the third input axis are substantially orthogonal. The first proofmass, the second proofmass, and the third proofmass are substantially coplanar.
18 Citations
21 Claims
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1. An apparatus, comprising:
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a first proofmass employable to sense a first acceleration along a first input axis; a second proofmass employable to sense a second acceleration along a second input axis; and a third proofmass employable to sense a third acceleration along a third input axis; wherein the first input axis, the second input axis, and the third input axis are substantially orthogonal; and wherein the first proofmass, the second proofmass, and the third proofmass are substantially coplanar; and wherein each of the first proofmass, the second proofmass, and the third proofmass comprise one or more voids, a center of geometry, and a center of mass; and wherein the one or more voids serve to position the center of mass below the center of geometry; and wherein the one or more voids are positioned in the first proofmass, the second proofmass, and the third proofmass to orient the first input axis, the second input axis, and the third input axis into three substantially orthogonal directions; and wherein the first proofmass, the second proofmass, and the third proofmass lie substantially in a plane; and wherein the one or more voids in the first and second proofmasses orient the first and second input axes in an in-plane direction; and wherein the first proofmass is positioned relative to the second proofmass in the plane to orient the first input axis to be orthogonal to the second input axis; and wherein the one or more voids in the third proofmass serve to position the center of mass of the third proofmass below the center of geometry and to a side of an axis of rotation of the third proofmass to orient the third input axis into an out-of-plane direction orthogonal to the first and second input axes. - View Dependent Claims (4, 5, 6, 7, 8)
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2. An apparatus, comprising:
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a first proofmass employable to sense a first acceleration along a first input axis; a second proofmass employable to sense a second acceleration along a second input axis; and a third proofmass employable to sense a third acceleration along a third input axis; wherein the first input axis, the second input axis, and the third input axis are substantially orthogonal; and wherein the first proofmass, the second proofmass, and the third proofmass are substantially coplanar; and wherein the first proofmass comprises a cross-leaf flexure that couples the first proofmass with a frame; and wherein the cross-leaf flexure comprises a first flexure beam and a second flexure beam; and wherein the first, second, and third proofmasses lie substantially in a plane, wherein the first flexure beam is substantially parallel with the plane, and wherein the second flexure beam is substantially orthogonal to the plane. - View Dependent Claims (3, 17, 18, 19, 20, 21)
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9. A process, comprising the steps of:
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etching three coplanar proofmasses into a substrate, wherein the three coplanar proofmasses are employable to sense acceleration along three respective input axes; etching one or more voids into the three coplanar proofmasses to orient the three respective input axes into three orthogonal acceleration sensing directions; and forming one or more flexure components to support the three coplanar proofmasses, wherein the one or more flexure components comprise a first beam substantially parallel with a plane of the three proofmasses and a second beam substantially orthogonal to the plane to promote a reduction in compliancy of the one or more flexure components in a direction out of the plane. - View Dependent Claims (10, 11)
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12. An apparatus, comprising:
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a first proofmass employable to sense a first acceleration along a first input axis; a second proofmass employable to sense a second acceleration along a second input axis; and a third proofmass employable to sense a third acceleration along a third input axis; wherein the first proofmass, the second proofmass, and the third proofmass are substantially coplanar; and wherein the first input axis, the second input axis, and the third input axis intersect at a common point and are substantially orthogonal; and wherein the first proofmass comprises a cross-leaf flexure that couples the first proofmass with a frame; and wherein the cross-leaf flexure comprises a first flexure component and a second flexure component; and wherein the first flexure component comprises a first flexure portion that is substantially parallel with the first input axis, wherein the second flexure component comprises a second flexure portion that is substantially orthogonal to the first flexure portion. - View Dependent Claims (13, 14, 15)
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16. An apparatus, comprising:
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a first proofmass employable to sense a first acceleration along a first input axis; a second proofmass employable to sense a second acceleration along a second input axis; a third proofmass employable to sense a third acceleration along a third input axis; and a plurality of cross-leaf flexures that couple the first proofmass, the second proofmass, and the third proofmass with a frame; wherein the first proofmass, the second proofmass, and the third proofmass are substantially coplanar.
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Specification