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Method of fabricating an ink jet printhead chip having actuator mechanisms located about ejection ports

  • US 7,179,395 B2
  • Filed: 12/08/2003
  • Issued: 02/20/2007
  • Est. Priority Date: 06/09/1998
  • Status: Expired due to Fees
First Claim
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1. A method of fabricating an inkjet printhead chip, the method comprising the steps of:

  • etching a drive circuitry layer that is positioned on a substrate to define regions for roof structures;

    depositing a first layer of a thermally expandable material on the drive circuitry layer to cover said regions;

    etching the first layer of thermally expandable material and the drive circuitry layer to define a deposition zone for heating circuit material at each region and contact vias for the heating circuit material;

    forming at least one heating circuit at each region in electrical contact with the drive circuitry layer by means of the contact vias;

    depositing a second layer of a thermally expandable material on the heating circuit material;

    etching both layers of thermally expandable material to define a roof structure at each region such that each roof structure includes at least one actuator at each region and defines an ink ejection port, and such that each heating circuit is embedded in each respective actuator in a position such that heating of the expandable material by the heating circuit results in differential thermal expansion of the actuator and resultant displacement of each actuator; and

    etching the substrate to define a plurality of nozzle chambers and corresponding ink inlet channels, such that each nozzle chamber and its associated ink inlet channel are positioned beneath each roof structure.

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