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Method for plasma formation for extreme ultraviolet lithography-theta pinch

  • US 7,180,082 B1
  • Filed: 02/22/2005
  • Issued: 02/20/2007
  • Est. Priority Date: 02/19/2004
  • Status: Expired due to Fees
First Claim
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1. A device for generating/producing an extremely short-wave ultraviolet electromagnetic wave without electrodes, comprising:

  • an axially aligned open-ended pinch chamber defining a plasma zone adapted to contain a plasma generating gas within the plasma zone;

    means for generating a magnetic field radially outward of the open-ended pinch chamber compressing the plasma to produce a discharge plasma from the plasma generating gas, thereby producing a electromagnetic wave in the extreme ultraviolet range;

    collecting means in optical communication with the pinch chamber to collect the electromagnetic radiation;

    and focusing means in optical communication with the collecting means to concentrate the electromagnetic radiation.

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