Miniature magnetic field sensor

• US 7,180,146 B2
• Filed: 08/23/2005
• Issued: 02/20/2007
• Est. Priority Date: 02/24/2003
• Status: Expired due to Fees

• Current Assignee: Commissariat a L'Energie Atomique (AES Corporation)
• Original Assignee: Commissariat a L'Energie Atomique (AES Corporation)
• Inventors: Joisten, Hee, Cuchet, Robert
• Primary Examiner(s): Potter; Roy Karl
• Application Number:
  US11/210,137
• Publication Number:
  US 20060033490A1
• Time in Patent Office: 546 Days
• Field of Search: 438/48, 257/421
• US Class Current: 257/421
• CPC Class Codes: G01R 33/05 in thin-film element

Abstract

A miniature magnetic field sensor including a magnetic core which co-operates with at least one excitation coil and a detection coil. In the magnetic field sensor, the core is open and includes at least one bar having tapered ends. A method of fabricating the sensor is provided using microtechnology techniques.

Claims

1. A miniature magnetic field sensor comprising a magnetic core cooperating with at least one excitation coil and a detection coil, wherein the core is open and includes at least one bar having tapered ends.

2. The sensor according to claim 1, wherein the core includes at least one second bar having tapered ends.

3. The sensor according to claim 2, wherein the core is formed of two bars symmetrical to each other with respect to a line separating them.

4. The sensor according to claim 2, wherein at least one of the tapered ends of the at least one second bar are symmetrical with respect to a longitudinal median line of the at least one second bar.

5. The sensor according to claim 1, wherein the tapered ends of the at least one bar are symmetrical to each other.

6. The sensor according to claim 1, wherein at least one of the tapered ends of the at least one bar are symmetrical with respect to a longitudinal median line the at least one bar.

7. The sensor according to claim 1, wherein at least one of the ends of the at least one bar is non-symmetrical with respect to a longitudinal median line of the at least one bar.

8. The sensor according to any one of claim 1, wherein at least one of the tapered ends is delimited by rectilinear edges that converge toward each other.

9. The sensor according to claim 1, wherein at least one of the tapered ends terminates in a sharp point.

10. The sensor according to claim 9, wherein the sharp point forms an angle less than 45°

.

11. The sensor according to claim 1, wherein at least one of the tapered ends terminates in a rounded point.

12. The sensor according to claim 1, wherein at least one of the tapered ends has a length greater than the width of the at least one bar.

13. The sensor according to any one of claim 1, wherein the tapered ends are situated outside the excitation and detection coils.

14. The sensor according to any one of claim 1 comprising two excitation coils disposed one on each side of the detection coil.

15. The sensor according to claim 1, wherein the second comprises a stack of layers.

16. A method for producing a miniature magnetic field sensor comprising a magnetic core cooperating with at least one excitation coil and a detection coil, the method comprising the steps of:

providing a substrate;

forming lower tracks of a conductive material between upper and lower layers of insulative material on the substrate;

forming a core including a layer of a magnetic material of defined geometry on the upper layer of insulating material, the defined geometry of the layer of magnetic material being such that the core is open and includes at least one bar having tapered ends;

covering the layer of magnetic material with a third insulative layer so that the layer of magnetic material is surrounded by insulative material;

forming connections to the lower tracks by excavating trenches down to the lower tracks and depositing a conductive material in the trenches;

forming a conductive material so as to form turns conjointly with the lower tracks and the connections; and

depositing a layer of insulative material overlying the conductive material.