Mars optical modulators
First Claim
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1. An electrooptic device comprising:
- a. an electrically conductive substrate having a surface S1,b. a movable membrane having a top surface and a bottom surface s2, the movable membrane comprising a single crystal silicon layer with a thickness in the range 1000–
5000 Angstroms,c. a laser for directing light onto the movable membrane, the light having a wavelength λ
,d. a support for positioning the movable membrane at a first position spaced from said substrate by an air gap d1 between surface s1 and s2, ande. bias means for applying an electrical bias across the air gap to move the movable membrane from the first position to a second position spaced from said substrate by an air gap d2 between surface s1 and s2, where d2–
d1 is in the approximate range 1500 to 5000 angstroms and where the change from the first to the second position causes a change in the amount of light from said laser that is reflected from the movable membrane.
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Abstract
The specification describes an improved Moving Anti-Reflection Switch (MARS) device structure that largely eliminates charge build up on the movable membrane, and reduces stresses that cause curling of the membrane. The improved device uses a movable membrane made of single crystal silicon.
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Citations
7 Claims
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1. An electrooptic device comprising:
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a. an electrically conductive substrate having a surface S1, b. a movable membrane having a top surface and a bottom surface s2, the movable membrane comprising a single crystal silicon layer with a thickness in the range 1000–
5000 Angstroms,c. a laser for directing light onto the movable membrane, the light having a wavelength λ
,d. a support for positioning the movable membrane at a first position spaced from said substrate by an air gap d1 between surface s1 and s2, and e. bias means for applying an electrical bias across the air gap to move the movable membrane from the first position to a second position spaced from said substrate by an air gap d2 between surface s1 and s2, where d2–
d1 is in the approximate range 1500 to 5000 angstroms and where the change from the first to the second position causes a change in the amount of light from said laser that is reflected from the movable membrane. - View Dependent Claims (2, 3, 4)
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5. A method for switching light comprising:
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a. directing a beam of laser light with a wavelength λ
on a substrate,the substrate supporting a movable membrane spaced from said substrate, the movable membrane consisting of single crystal silicon with a thickness in the range 1000–
5000 Angstroms and having,a support for positioning said membrane at a first position spaced from said substrate by an air gap mλ
/4, where m is an even number, and a second position d1 spaced from said substrate by an air gap nλ
/4 and n is an odd number, andb. applying an electrical bias across said air gap to move said membrane from said first position to said second position d2 where d2–
d1 is in the approximate range 1500 to 5000 angstroms and where the change from the first to the second position changes the light that is reflected from the movable membrane from anti-reflecting to reflecting. - View Dependent Claims (6, 7)
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Specification