Apparatus and methods for the inspection of objects
First Claim
Patent Images
1. A system for inspecting electrical circuits comprising:
- a boundary identifier operative to generate a representation of boundaries of elements in an image of an electrical circuit which is under inspection;
an element matching defect identifier operative to receive said representation of boundaries of elements and a reference representation including reference boundaries for said electrical circuit and to compare boundaries in said representation of boundaries to said reference boundaries to identify element matching defects, said element matching defects including at least one of;
elements in said reference representation but missing from said representation of boundaries, excess elements in said representation of boundaries that are missing from said reference representation, and elements in said representation of boundaries defining a different type of element than a corresponding element in said reference representation; and
a boundary defect identifier operative to receive said boundaries of elements in said electrical circuit under inspection and to compare a plurality of coordinates along at least a portion of some boundaries with reference to a corresponding region of acceptable coordinates for said portion of some boundaries to detect boundary defects.
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Abstract
A method for inspecting electrical circuits, and a system for carrying out the method, generating a representation of boundaries of elements in an image of an electrical circuit which is under inspection, and analyzing at least some locations of at least some boundaries in the representation of boundaries of elements to identify defects in the electrical circuit.
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Citations
22 Claims
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1. A system for inspecting electrical circuits comprising:
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a boundary identifier operative to generate a representation of boundaries of elements in an image of an electrical circuit which is under inspection; an element matching defect identifier operative to receive said representation of boundaries of elements and a reference representation including reference boundaries for said electrical circuit and to compare boundaries in said representation of boundaries to said reference boundaries to identify element matching defects, said element matching defects including at least one of;
elements in said reference representation but missing from said representation of boundaries, excess elements in said representation of boundaries that are missing from said reference representation, and elements in said representation of boundaries defining a different type of element than a corresponding element in said reference representation; anda boundary defect identifier operative to receive said boundaries of elements in said electrical circuit under inspection and to compare a plurality of coordinates along at least a portion of some boundaries with reference to a corresponding region of acceptable coordinates for said portion of some boundaries to detect boundary defects. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method for inspecting electrical circuits comprising:
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generating a representation of boundaries of elements in an image of an electrical circuit; detecting element matching defects by comparing said boundaries in said representation of boundaries to reference boundaries in a reference representation of boundaries for said electrical circuit, said element matching defects including at least one of;
elements in said reference representation but missing from said representation of boundaries, excess elements in said representation of boundaries that are missing from said reference representation, and elements in said representation of boundaries defining a different type of element than a corresponding element in said reference representation; andand comparing a plurality of coordinates along at least a portion of said boundaries in said representation of boundaries of elements with reference to a corresponding region of acceptable coordinates for said portion of said boundaries to detect boundary defects in said electrical circuit. - View Dependent Claims (13, 14, 15, 16, 17)
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18. A method of manufacturing an electrical circuit comprising:
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acquiring an image of at least a portion of an electrical circuit and inspecting said image for defects in said electrical circuit, said inspecting including;
generating a representation of boundaries of elements in the image;detecting element matching defects by comparing said boundaries in said representation of boundaries to reference boundaries in a reference representation of boundaries for said electrical circuit, said element matching defects including at least one of;
elements in said reference representation but missing from said representation of boundaries, excess elements in said representation of boundaries that are missing from said reference representation, and elements in said representation of boundaries defining a different type of element than a corresponding element in said reference representation; andcomparing a plurality of coordinates along at least a portion of said boundaries in said representation of boundaries of elements with reference to a corresponding region of acceptable coordinates for said portion of said boundaries to detect boundary defects in said electrical circuit portion. - View Dependent Claims (19, 20, 21, 22)
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Specification