Printhead chip incorporating laterally displaceable ink flow control mechanisms

• US 7,182,435 B2
• Filed: 01/03/2005
• Issued: 02/27/2007
• Est. Priority Date: 07/15/1997
• Status: Expired due to Fees

• Current Assignee: Zamtec Limited (Memjet Limited)
• Original Assignee: Silverbrook Research Pty Limited
• Inventors: Silverbrook, Kia
• Primary Examiner(s): Do; An H.
• Application Number:
  US11/026,126
• Publication Number:
  US 20050110847A1
• Time in Patent Office: 785 Days
• Field of Search: 347/54, 347/56, 347/65, 347/55
• US Class Current: 347/54
• CPC Class Codes: B41J 2/14427 Structure of ink jet print heads with thermal bend detached actuators
• CPC Class Codes: B41J 2/1623 bonding and adhesion
• CPC Class Codes: B41J 2/1626 etching
• CPC Class Codes: B41J 2/1628 dry etching
• CPC Class Codes: B41J 2/1629 wet etching
• CPC Class Codes: B41J 2/1631 photolithography
• CPC Class Codes: B41J 2/1632 machining
• CPC Class Codes: B41J 2/1635 dividing the wafer into individual chips
• CPC Class Codes: B41J 2/1637 molding
• CPC Class Codes: B41J 2/1639 sacrificial molding
• CPC Class Codes: B41J 2/1642 thin film formation by CVD [chemical vapor deposition]
• CPC Class Codes: B41J 2/1643 thin film formation by plating
• CPC Class Codes: B41J 2/1645 thin film formation by spincoating
• CPC Class Codes: B41J 2/1646 thin film formation by sputtering
• CPC Class Codes: B41J 2/1648 Production of print heads with thermal bend detached actuators
• CPC Class Codes: B41J 2/16585 for paper-width or non-reciprocating print heads
• CPC Class Codes: B41J 2/17503 Ink cartridges
• CPC Class Codes: B41J 2/17513 Inner structure
• CPC Class Codes: B41J 2/17596 Ink pumps, ink valves
• CPC Class Codes: B41J 2002/041 Electromagnetic transducer
• CPC Class Codes: B41J 2202/21 : Line printing
• CPC Class Codes: B41J 3/445 : Printers integrated in other types of apparatus, e.g. printers integrated in cameras
• CPC Class Codes: B82Y 30/00 : Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: G06F 21/79 : in semiconductor storage media, e.g. directly-addressable memories
• CPC Class Codes: G06F 21/86 : Secure or tamper-resistant housings
• CPC Class Codes: G06F 2221/2129 : Authenticate client device independently of the user
• CPC Class Codes: G06K 1/121 : by printing code marks applying code marks to labels B65C9/46; marking or coding completed packages B65B61/26
• CPC Class Codes: G06K 19/06037 : multi-dimensional coding
• CPC Class Codes: G06K 19/073 : Special arrangements for circuits, e.g. for protecting identification code in memory protection against unauthorised use of computer memory G06F12/14
• CPC Class Codes: G06K 7/14 : using light without selection of wavelength, e.g. sensing reflected white light G06K7/10831 - G06K7/1097 take precedence
• CPC Class Codes: G06K 7/1417 : 2D bar codes
• CPC Class Codes: G11C 11/56 : using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency
• CPC Class Codes: H04N 1/2112 : using still video cameras
• CPC Class Codes: H04N 1/2154 : the still video camera incorporating a hardcopy reproducing device, e.g. a printer
• CPC Class Codes: H04N 2101/00 : Still video cameras
• CPC Class Codes: H04N 23/00 : Cameras or camera modules comprising electronic image sensors; Control thereof
• CPC Class Codes: H04N 5/2628 : Alteration of picture size, shape, position or orientation, e.g. zooming, rotation, rolling, perspective, translation

Abstract

A printhead chip includes a substrate that incorporates drive circuitry and that defines nozzle chambers and nozzle chamber inlets on an inlet side of the substrate. A structural layer on an ink ejection side at the substrate defines ink ejection ports in fluid communication with respective nozzle chambers. Closure members on the ink inlet side are displaceable in a plane substantially parallel to the inlet side between open positions in which ink can enter the nozzle chambers and closed positions in which the inlets are closed. Micro-electromechanical drive mechanisms are connected to the drive circuitry and engaged with the closure members to displace the closure members between the open and closed positions on receipt of an electrical signal from the drive circuitry.

Claims

1. A printhead chip which comprises

a substrate that incorporates drive circuitry and that defines nozzle chambers and nozzle chamber inlets on an inlet side of the substrate;

a structural layer on an ink ejection side of the substrate that defines ink ejection ports in fluid communication with respective nozzle chambers;

closure members slidably mounted on the inlet side displaceable in a plane substantially parallel to the inlet side between open positions in which ink can enter the nozzle chambers and closed positions in which the inlets are closed; and

micro-electromechanical drive mechanisms connected to the drive circuitry and engaged with mechanical engagement formations of the closure members to displace the closure members between the open and closed positions on receipt of an electrical signal from the drive circuitry, the drive mechanisms including gear trains and actuators to drive the gear trains, the mechanical engagement formations being toothed formations engaged with the gear trains.

2. A printhead chip as claimed in claim 1, in which the nozzle chambers are the product of an etching process carried out in the substrate and the structural layer is an etch stop layer.

3. A printhead chip as claimed in claim 2, in which the etch stop layer is an epitaxial layer of boron doped silicon.

4. A printhead chip as claimed in claim 1, in which the gear trains include series of gears interposed between the respective actuators and shutter members, the series of gears being configured so that the gear trains are reduction gear trains.

5. A printhead chip as claimed in claim 1, in which the closure members and drive mechanisms are in fluid contact with an ink reservoir.