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Actuator

  • US 7,183,697 B2
  • Filed: 10/26/2004
  • Issued: 02/27/2007
  • Est. Priority Date: 10/27/2003
  • Status: Expired due to Fees
First Claim
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1. An actuator, comprising:

  • at least one beam including an oscillating part;

    a case including at least one space in which the beam is housed and at least one holding part to fix one end of the beam in the case;

    at least one feeding terminal to supply an exciting power to the beam;

    a limiting structure formed on at least one inner surface of the case which defines the space and is configured to contact the oscillating part of the beam and prevent excess deflection of the oscillating part; and

    wherein the inner surface is curved or tapered so that the space formed by the curved or tapered inner surface gradually increases with distance from the holding part of the beam in a longitudinal direction of the beam.

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