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Lithographic optical system

  • US 7,184,123 B2
  • Filed: 03/24/2004
  • Issued: 02/27/2007
  • Est. Priority Date: 03/24/2004
  • Status: Expired due to Fees
First Claim
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1. A lithographic optical system, comprising:

  • a first housing including a first chamber, a first optically transmissive window, a second optically transmissive window, at least one moveable lens positioned inside said first chamber, a linear electric motor and at least one gas bearing within the first chamber, the linear electric motor and the at least one gas bearing being configured to contactlessly move the moveable lens;

    at least one gas exchange opening in communication with said first chamber; and

    at least one additional optical element positioned outside said first housing,wherein an optical path is defined by said first optically transmissive window, said second optically transmissive window, said at least one moveable lens, and said at least one additional optical element.

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