Digital micro-mirror device having improved contrast and method for the same
First Claim
1. A digital micro-mirror device having improved contrast, comprising:
- a plurality of current-carrying conductors on an upper surface of a substrate, each current-carrying conductor having an upper surface;
a low-reflectivity metal selected from the group consisting of titanium, tungsten, vanadium, and tantalum disposed upon the upper surfaces of the current-carrying conductors;
first and second micro-mirrors forming an aperture above the substrate; and
wherein the low-reflectivity metal disposed upon on the upper surfaces of the current-carrying conductors reduces reflection of light received through the aperture by the current-carrying conductors.
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Abstract
According to one embodiment of the present invention, a digital micro-mirror device having improved contrast and a method for the same are provided. The digital micro-mirror device includes a plurality of current-carrying conductors on an upper surface of a substrate, each current-carrying conductor having an upper surface; a low-reflectivity metal disposed upon the upper surfaces of the current-carrying conductors; first and second micro-mirrors forming an aperture above the substrate; and wherein the low-reflectivity metal disposed upon on the upper surfaces of the current-carrying conductors reduces reflection of light received through the aperture by the current-carrying conductors.
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Citations
29 Claims
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1. A digital micro-mirror device having improved contrast, comprising:
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a plurality of current-carrying conductors on an upper surface of a substrate, each current-carrying conductor having an upper surface; a low-reflectivity metal selected from the group consisting of titanium, tungsten, vanadium, and tantalum disposed upon the upper surfaces of the current-carrying conductors; first and second micro-mirrors forming an aperture above the substrate; and wherein the low-reflectivity metal disposed upon on the upper surfaces of the current-carrying conductors reduces reflection of light received through the aperture by the current-carrying conductors. - View Dependent Claims (2)
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3. A digital micro-mirror device having improved contrast, comprising:
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a plurality of current-carrying conductors on an upper surface of a substrate, each current-carrying conductor having an upper surface; a low-reflectivity metal disposed upon the upper surfaces of the current-carrying conductors; first and second micro-mirrors forming an aperture above the substrate; and wherein the low-reflectivity metal disposed upon on the upper surfaces of the current-carrying conductors reduces reflection of light received through the aperture by the current-carrying conductors. - View Dependent Claims (4, 5, 6, 7, 8, 9, 10, 11)
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12. A method for improving the contrast of a digital micro-mirror device, comprising:
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receiving light through an aperture formed by a first micro-mirror and a second micro-mirror positioned above a substrate of a digital micro-mirror device, the substrate having a plurality of current-carrying conductors on an upper surface of the substrate, each current-carrying conductor having a low-reflectivity metal disposed upon an upper surface of the current-carrying conductor; allowing light received through the aperture to contact the low-reflectivity metal; and at least partially reducing the reflection of the light received through the aperture by the low-reflectivity metal. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20)
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21. A method of forming a digital micro-mirror device structure, comprising the steps of:
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forming circuitry elements at a substrate; forming a conductive layer at selected locations of a surface of the substrate, the conductive layer comprising electrodes coupled to circuitry elements; depositing a first layer of low-reflectivity metal over a surface of the conductive layer; and forming a tiltable mirror structure disposed over the conductive layer and first layer of low-reflectivity metal. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29)
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Specification