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Digital micro-mirror device having improved contrast and method for the same

  • US 7,184,201 B2
  • Filed: 11/02/2004
  • Issued: 02/27/2007
  • Est. Priority Date: 11/02/2004
  • Status: Active Grant
First Claim
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1. A digital micro-mirror device having improved contrast, comprising:

  • a plurality of current-carrying conductors on an upper surface of a substrate, each current-carrying conductor having an upper surface;

    a low-reflectivity metal selected from the group consisting of titanium, tungsten, vanadium, and tantalum disposed upon the upper surfaces of the current-carrying conductors;

    first and second micro-mirrors forming an aperture above the substrate; and

    wherein the low-reflectivity metal disposed upon on the upper surfaces of the current-carrying conductors reduces reflection of light received through the aperture by the current-carrying conductors.

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