Method and system for packaging a MEMS device

• US 7,184,202 B2
• Filed: 01/28/2005
• Issued: 02/27/2007
• Est. Priority Date: 09/27/2004
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: IDC, LLC
• Inventors: Palmateer, Lauren, Miles, Mark W., Floyd, Philip D., Sampsell, Jeffrey B., Arbuckle, Brian W.
• Primary Examiner(s): Thompson; Timothy
• Assistant Examiner(s): FANG, JERRY C
• Application Number:
  US11/045,800
• Publication Number:
  US 20060077533A1
• Time in Patent Office: 760 Days
• Field of Search: 359/290, 359/291, 359/223, 359/224, 359/295
• US Class Current: 359/321
• CPC Class Codes: B81C 1/0023 Packaging together an electronic processing unit die and a micromechanical structure die MEMS packages B81B7/0032; MEMS packaging processes B81C1/00261
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: Y10T 29/49002 Electrical device making

Abstract

A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate can contain electronic circuitry for controlling the array of interferometric modulators. The backplate can provide physical support for device components, such as electronic components which can be used to control the state of the display. The backplate can also be utilized as a primary structural support for the device.

Claims

1. A display, comprising:

a transparent substrate;

an array of interferometric modulators configured to reflect light through said transparent substrate;

a backplate sealed to said transparent substrate and providing a cavity for said interferometric modulators; and

electronic circuitry located on said backplate and in electrical connection with the array of interferometric modulators.

2. The display of claim 1, wherein the electronic circuitry is located outside of the cavity formed from the backplate and the transparent substrate.

3. The display of claim 1, wherein the electronic circuitry is located inside of the cavity formed from the backplate and the transparent substrate.

4. The display of claim 1, wherein said interferometric modulator comprises a plurality of internal connectors, and wherein said internal connectors are configured to provide said electrical connection to said electronic circuitry.

5. The display of claim 4, wherein the internal connectors comprise metal bumps.

6. The display of claim 4, wherein the internal connectors comprise conductive posts.

7. The display of claim 1, wherein said backplate comprises a printed circuit board.

8. A device having a display, comprising:

a transparent substrate;

an array of interferometric modulators configured to reflect light through said transparent substrate; and

a backplate sealed to said transparent substrate and providing a cavity for said interferometric modulators, wherein said backplate comprises electronic circuitry configured to control said interferometric modulators.

9. The display of claim 8, wherein said electronic circuitry is a display driver circuitry.

10. The device of claim 8, wherein said transparent substrate comprises glass.

11. The device of claim 8, wherein said array of interferometric modulators are configured to reflect multiple colors of light.

12. The device of claim 8, wherein said backplate comprises a printed circuit board.

13. The device of claim 12, wherein said printed circuit board comprises a vapor barrier.

14. The device of claim 8, wherein said backplate is sealed to said transparent substrate by a seal ring.

15. The device of claim 8, wherein the surface area of said backplate is greater than the surface area of said transparent substrate.

16. The device of claim 15, wherein said backplate is configured to function as a primary structural component of the device.

17. The device of claim 16, additionally comprising additional electronic circuitry configured to control the device, wherein said backplate provides physical support for at least some of said additional electronic circuitry.

18. The device of claim 14, wherein said seal ring provides a hermetic seal.

19. The device of claim 8, wherein said device is a cellular telephone.

20. A method of manufacturing a display device, comprising:

providing a transparent substrate comprising an array of interferometric modulators;

providing a backplate comprising electronic circuitry configured to control said array of interferometric modulators;

sealing said transparent substrate to said backplate so that a cavity is formed above said array of interferometric modulators, and wherein said electronic circuitry is placed in electrical communication with said array of interferometric modulators.

21. The method of claim 20, wherein said transparent substrate is glass.

22. The method of claim 20, wherein said transparent substrate is a polymeric material.

23. The method of claim 20, wherein said backplate comprises a driver circuit for controlling said array of interferometric modulators.

24. The method of claim 20, wherein said backplate comprises a printed circuit board.

25. The method of claim 20, wherein sealing said transparent substrate to said backplate comprises placing a sealant material between said transparent substrate and said backplate.

26. A display, the process of manufacturing said display comprising:

providing a transparent substrate comprising an array of interferometric modulators;

providing a backplate comprising electronic circuitry configured to control said array of interferometric modulators;

sealing said transparent substrate to said backplate so that a cavity is formed above said array of interferometric modulators, and wherein said electronic circuitry is placed in electrical communication with said array of interferometric modulators.

27. A display, comprising:

means for modulating light and reflecting it towards a viewer;

means for supporting said modulating means;

electronic circuitry configured to control the state of said modulating means;

means for protecting said modulating means and providing a cavity for said modulating means, wherein said protecting means supports said electronic circuitry.

28. The display of claim 27, further comprising means for connecting said electronic circuitry to said modulating means.

29. The display of claim 28, further comprising means for sealing said supporting means to said protecting means.