Complex microdevices and apparatus and methods for fabricating such devices

• US 7,185,542 B2
• Filed: 12/06/2002
• Issued: 03/06/2007
• Est. Priority Date: 12/06/2001
• Status: Expired due to Term

• Current Assignee: Memgen Corporation (Technoprobe S.P.A.)
• Original Assignee: Microfabrica Incorporated (Technoprobe S.P.A.)
• Inventors: Cohen, Adam L., Lockard, Michael S., Bang, Christopher A., Evans, John D.
• Primary Examiner(s): KWOK, HELEN C
• Application Number:
  US10/313,795
• Publication Number:
  US 20030183008A1
• Time in Patent Office: 1,551 Days
• Field of Search: 735/142.9, 735/141.6, 735/143.2, 735/141.7, 735/141.8, 735/142.4
• US Class Current: 73/514.29
• CPC Class Codes: B33Y 10/00 Processes of additive manufacturing
• CPC Class Codes: B81C 1/0019 Flexible or deformable structures not provided for in groups B81C1/00142 - B81C1/00182

Abstract

Various embodiments of the invention are directed to various microdevices including sensors, actuators, valves, scanning mirrors, accelerometers, switches, and the like. In some embodiments the devices are formed via electrochemical fabrication (EFAB™)

Claims

1. A microdevice, comprising:

a plurality of layers of successively deposited materials, wherein formation of each layer comprises;

a. selective deposition of at least a first material; and

b. deposition of at least a second material, which is different from the first material;

c. removal of any first and second material that extend beyond a desired boundary level of the layer;

wherein each successively formed layer is simultaneously deposited and adhered to a previously formed layer;

wherein at least a portion of one of the first or second materials from a plurality of the layers is removed via an etching operation after formation of the plurality of layers wherein the etching operation removes the one of the first or second materials without substantially removing the other of the first or second material; and

wherein a structure resulting from the formation and the removal provides at least one structure that can function as an accelerometer.

2. The microdevice of claim 1 wherein the accelerometer comprises:

a proof mass formed of a conductive material; and

a plurality of spring-like structures for supporting the proof mass relative to a dielectric substrate;

where a portion of the plurality of spring-like structures attach to the proof mass below a center of mass of the proof mass and a plurality of spring-like structures attach to the proof mass above the center of mass of the proof mass.

3. The microdevice of claim 1 wherein the accelerometer comprises:

a proof mass formed of a conductive material; and

a plurality of spring-like structures for supporting the proof mass relative to a dielectric substrate;

where at least a portion of the plurality of spring-like structures attach to the proof mass in a common plane, and where a a direction of movement allowed by the spring-like structures is perpendicular to the common plane.

4. The microdevice of claim 2 wherein the proof mass acts as a first capacitor plate, additionally comprising:

a conductive element that functions as a second capacitor plate separated from the proof mass and supported relative to the dielectric substrate, wherein the second capacitor plate is suspended above the dielectric substrate.

5. The microdevice of claim 4 wherein a parasitic capacitance of a circuit, comprising the first and second capacitor plates and the substrate, is reduced from what the parasitic capacitance would have been if the second capacitor plate was located on the substrate.

6. The microdevice of claim 2 wherein at least one motion limiting structure is located between the proof mass and the second capacitor plate so as to inhibit the proof mass and second capacitor plate from contacting one another, wherein the at least one limiting structure is either a dielectric or a structure that is electrically isolated from at least one of the proof mass or the second capacitor plate.

7. The microdevice of claim 6 wherein the limiting structure comprises a plurality of structures each with a cross-sectional dimension substantially smaller than that of either the second capacitor plate or the proof mass.

8. The microdevice of claim 6 wherein the motion limiting structure inhibits the proof mass and second capacitor plate from shorting together during maximum deflection of the proof mass relative to and toward the second capacitor plate.

9. The microdevice of claim 1 wherein the accelerometer comprises:

a proof mass; and

a plurality of spring-like structures for supporting the proof mass relative to a support structure, and

wherein the proof mass comprises at least two layers formed of a metal which are adjacent and adhered to one another.

10. The microdevice of claim 9 wherein the deposition of at least one of the first or second materials during the formation of each of the two layers comprises an electrodeposition of the first material or the second material.

11. The microdevice of claim 2 wherein the microdevice comprises a structure of overall dimension less than 1 centimeter with at least some design features having dimensions smaller than 100 microns.

12. The microdevice of claim 2 wherein the microdevice comprises a structure of overall dimension less than 1 centimeter with at least some design features having dimensions smaller than 25 microns.

13. The microdevice of claim 1 wherein the accelerometer comprises:

a proof mass;

a plurality of first spring-like structures for supporting the first proof mass relative to a first frame element where the first spring-like structures allow movement of the proof mass in a first direction and are substantially inflexible in a second direction which is different from the first direction; and

a plurality of second spring-like structures for supporting the proof mass, where the second spring-like structures allow movement in the second direction and are substantially inflexible in the first direction and in a third direction which is different from the first and second directions,

whereby the proof mass is able to move in both the first and second directions.

14. The microdevice of claim 13 wherein the accelerometer additionally comprises:

a proof mass electrode for electrically interacting with the proof mass; and

a first electrode for electrically interacting with the first frame element.

15. The microdevice of claim 14 wherein the electrically interacting comprises capacitive interacting.

16. The microdevice of claim 1 wherein the accelerometer comprises:

a proof mass;

a plurality of first spring-like structures for supporting the proof mass relative to a first frame element where the first spring-like structures allow movement of the proof mass in a first direction and are substantially inflexible in a second direction which is different from the first direction;

a plurality of second spring-like structures for supporting the proof mass relative to a second frame element, where the second spring-like structures allow movement in the second direction but not in the first direction or in a third direction which is different from the second direction and from the first direction; and

a plurality of third spring-like structures for supporting the proof mass relative to a third frame element, where the third spring-like structures allow movement in the third direction but are substantially inflexible in the first and second directions,

whereby the proof mass is able to move in the first, second, and third directions.

17. The microdevice of claim 16 wherein the accelerometer additionally comprises a proof mass electrode, first frame element electrode, and a second frame element electrode for, respectively, electrically interacting with the proof mass, the first frame element, and the second frame element.

18. The microdevice of claim 17 wherein the electrically interacting comprises capacitive interacting.

19. The microdevice of claim 1 wherein the accelerometer comprises:

a proof mass; and

a plurality of spring-like structures for supporting the proof mass relative to a support structure, and

wherein the formation of selected layers of the plurality of layers comprises a planarization operation that removes a portion of at least one of the first or second materials deposited during formation of a current layer.

20. The microdevice of claim 1 wherein the accelerometer comprises:

a proof mass; and

a plurality of spring-like structures for supporting the proof mass relative to a support structure, and

wherein the proof mass and the plurality of spring-like structures are formed from deposition operations that electrodeposit at least one of the first or second materials.