Scanning charged-particle microscope

• US 7,186,975 B2
• Filed: 08/30/2001
• Issued: 03/06/2007
• Est. Priority Date: 10/12/2000
• Status: Expired due to Term

• Current Assignee: Hitachi, Ltd.
• Original Assignee: Hitachi, Ltd.
• Inventors: Ishitani, Tohru, Sato, Mitsugu, Todokoro, Hideo
• Primary Examiner(s): Shah; Manish S.
• Assistant Examiner(s): Nguyen; Lam S.
• Application Number:
  US09/943,262
• Publication Number:
  US 20020079448A1
• Time in Patent Office: 2,014 Days
• Field of Search: 250/310, 250/311, 250/309, 250/315.5, 250/307
• US Class Current: 250/310
• CPC Class Codes: H01J 37/09 Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
• CPC Class Codes: H01J 37/28 with scanning beams H01J37/268, H01J37/292, H01J37/2955 take precedence

Abstract

In orer to supply a scanning charged-particle microscope that can achieve both the improvement of resolution and that of focal depth at the same time, a scanning charged-particle microscope is supplied which is characterized in that a passage aperture for limiting the passage of the charged-particle optical beam is located between the charged-particle source and the scanning deflector, and in that a member for limiting the passage of the charged-particle optical beam is provided at least in the center of the passage aperture.

Claims

1. A scanning charged-particle microscope having

a charged-particle source,

a lens for focusing a charged-particle beam emitted from said charged-particle source, and

a scanning deflector for scanning said charged-particle beam in two-dimensional form on a sample,

wherein said scanning charged-particle microscope includes a passage aperture for limiting the passage of the charged-particle beam is located between the charged-particle source and said scanning deflector, and a member for limiting the passage of the charged-particle beam is provided at least in the center of said passage aperture,

said lens focusing the charged particle beam such that a plurality of differential parts of the charged particle beam passing through the passage aperture converges one point on the sample simultaneously,

said scanning deflector scanning the converged charged particle beam, and

an image of said sample is obtained by scanning said charged-particle beam having passed through said passage aperture on said sample using said scanning deflector.

2. A scanning charged-particle microscope as set forth in claim 1 above, wherein the scanning charged-particle microscope has the half-opening angle of said aperture for said charged-particle beam focused on a sample by said focusing lens has a band with respect to specific values of α

_a and α

_b.

3. A scanning charged-particle microscope as set forth in claim 1 above, wherein the scanning charged-particle has said passage aperture is formed in a plate-like body, and in that said plate-like body is formed movably with respect to said charged-particle beam.

4. A scanning charged-particle microscope as set forth in claim 3 above, wherein the scanning charged-particle microscope has said plate-like body is provided with a circular aperture in addition to said passage aperture.

5. A scanning charged-particle microscope having a charged-particle source,

a lens for focusing a charged-particle beam emitted from said charged-particle source on a sample with a half-opening angle which defines an irradiation angle of the charged particle beam against an optical axis of the charged particle beam,

a scanning deflector for scanning said charged-particle beam in two-dimensional form on a sample,

wherein said scanning charged-particle microscope includes a member located between the charged-particle source and said scanning deflector, the member having a limiting part which limits the charged particle beam having the half-opening angle being from zero degrees to α

_b degrees and allows the charged-particle beam having the half opening angle being from α

_b to α

_a degrees (α

_a>

α

_b) to pass the member

said lens focusing the charged particle beam such that a plurality of differential parts of the charged particle beam having the half opening angle being from α

_b degrees to α

_a degrees converges one point on the sample, simultaneously,

said scanning deflector scanning the converged charged particle beam, and

an image of said sample is obtained by scanning said charged-particle beam which is cut off, the half opening angle being from α

_b degrees to α

_a degrees.

6. A scanning charged-particle microscope as set forth in claim 5 above, wherein the scanning charged-particle microscope has a plate-like aperture body in which an annular aperture is formed is provided between said charged-particle source and said scanning deflector.

7. A scanning charged-particle microscope as set forth in claim 6 above, wherein the scanning charged-particle microscope has in addition to said annular aperture, a circular aperture is provided in said plate-like aperture body, and in that there is provided a movement feature for positioning said annular aperture and said circular aperture on the orbit of said charged-particle beam.