Mover device and semiconductor manufacturing apparatus and method
First Claim
1. A mover device comprising:
- a fixed base;
a movable base that is movable in a linear direction with respect to the fixed base;
a processing base that is movable in a linear direction with respect to the movable base, the linear direction being in parallel with the linear moving direction of the movable base;
a moving force generating unit that is provided between the processing base and the movable base, and forms a main moving unit in cooperation with the processing base and the movable base;
a P-F measuring unit that is provided between the processing base and the fixed base, and an M-F measuring unit that is provided between the movable base and the fixed base,the moving force generating unit being designed to generate a moving force to move the processing base with respect to the movable base, and, as a result, to move the processing base with respect to the fixed base,the movable base forming an inertial force processing unit that is moved on the fixed base in the opposite direction to the moving direction of the processing base by virtue of a reaction force caused by the moving force generated from the moving force generating unit to move the processing base, andthe moving force generating unit being controlled so as to control the moving velocity of the processing base with respect to the fixed base, using signals generated from the P-F measuring unit and the M-F measuring unit.
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Accused Products
Abstract
A mover device and an ion implanter apparatus having a processing base that reciprocates at a high speed without undesirable noise and vibration are provided. The mover device includes: a fixed base; a movable base that is linearly movable with respect to the fixed base; a processing base that is linearly movable with respect to the movable base; a main linear motor that generates a moving force to move the processing base with respect to the movable base, thereby moving the processing base with respect to the fixed base; and a velocity control unit that controls the moving velocity of the processing base with respect to the fixed base. In this mover device, the movable base is moved by virtue of a reaction force caused by the moving force to move the processing base.
22 Citations
48 Claims
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1. A mover device comprising:
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a fixed base; a movable base that is movable in a linear direction with respect to the fixed base; a processing base that is movable in a linear direction with respect to the movable base, the linear direction being in parallel with the linear moving direction of the movable base; a moving force generating unit that is provided between the processing base and the movable base, and forms a main moving unit in cooperation with the processing base and the movable base; a P-F measuring unit that is provided between the processing base and the fixed base, and an M-F measuring unit that is provided between the movable base and the fixed base, the moving force generating unit being designed to generate a moving force to move the processing base with respect to the movable base, and, as a result, to move the processing base with respect to the fixed base, the movable base forming an inertial force processing unit that is moved on the fixed base in the opposite direction to the moving direction of the processing base by virtue of a reaction force caused by the moving force generated from the moving force generating unit to move the processing base, and the moving force generating unit being controlled so as to control the moving velocity of the processing base with respect to the fixed base, using signals generated from the P-F measuring unit and the M-F measuring unit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41)
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42. A mover device comprising:
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a fixed base; a movable base that is movable in a linear direction with respect to the fixed base; a processing base that is movable in a linear direction with respect to the movable base, the linear direction being in parallel with the linear moving direction of the movable base; a moving force generating unit that is provided between the processing base and the movable base, and forms a main moving unit in cooperation with the processing base and the movable base; and a P-M measuring unit that is provided between the processing base and the movable base and an M-F measuring unit that is provided between the movable base and the fixed base, the moving force generating unit being designed to generate a moving force to move the processing base with respect to the movable base, and, as a result, to move the processing base with respect to the fixed base, the movable base forming an inertial force processing unit that is moved on the fixed base in the opposite direction to the moving direction of the processing base by virtue of a reaction force caused by the moving force generated from the moving force generating unit to move the processing base, and the moving force generating unit being controlled so as to control the moving velocity of the processing base with respect to the fixed base, using signals generated from the P-M measuring unit and the M-F measuring unit.
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43. A mover device comprising:
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a fixed base; a movable base that is movable in a linear direction with respect to the fixed base; a processing base that is movable in a linear direction with respect to the movable base, the linear direction being in parallel with the linear moving direction of the movable base; a moving force generating unit that is provided between the processing base and the movable base, and forms a main moving unit in cooperation with the processing base and the movable base; and a P-F measuring unit that is provided between the processing base and the fixed base, and a P-M measuring unit that is provided between the processing base and the movable base, the moving force generating unit being designed to generate a moving force to move the processing base with respect to the movable base, and, as a result, to move the processing base with respect to the fixed base, the movable base forming an inertial force processing unit that is moved on the fixed base in the opposite direction to the moving direction of the processing base by virtue of a reaction force caused by the moving force generated from the moving force generating unit to move the processing base, and the moving force generating unit being controlled so as to control the moving velocity of the processing base with respect to the fixed base, using signals generated from the P-F measuring unit and the P-M measuring unit.
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44. A semiconductor manufacturing apparatus comprising:
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a mover device; and a processing unit that performs processing on a processing object attached to a processing base of the mover device, the mover device including; a fixed base; a movable base that is movable in a linear direction with respect to the fixed base; the processing base that is movable in a linear direction with respect to the movable base, the linear direction being in parallel with the linear moving direction of the movable base; a moving force generating unit that is provided between the processing base and the movable base, and forms a main moving unit in cooperation with the processing base and the movable base; a velocity controlling unit that controls the moving velocity of the processing base with respect to the fixed base; a P-F measuring unit that is provided between the processing base and the fixed base, and an M-F measuring unit that is provided between the movable base and the fixed base, the movable base forming an inertial force processing unit, the moving force generating unit being controlled so as to control the moving velocity of the processing base with respect to the fixed base, using signals generated from the P-F measuring unit and the M-F measuring unit, the moving force generating unit being designed to generate a moving force to move the processing base with respect to the movable base, and, as a result, to move the processing base with respect to the fixed base, and the movable base on the fixed base being moved in the opposite direction to the moving direction of the processing base by virtue of a reaction force caused by the moving force generated from the moving force generating unit to move the processing base. - View Dependent Claims (45, 46, 47)
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48. A semiconductor manufacturing apparatus of a vacuum processing type, comprising:
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a mover device; and a processing unit that performs processing on a processing object attached to a processing base of the mover device in a vacuum, the mover device including; a fixed base; a movable base that is movable in a linear direction with respect to the fixed base; the processing base that is movable in a linear direction with respect to the movable base, the linear direction being in parallel with the linear moving direction of the movable base; a moving force generating unit that is provided between the processing base and the movable base, and forms a main moving unit in cooperation with the processing base and the movable base; a velocity controlling unit that controls the moving velocity of the processing base with respect to the fixed base; a P-F measuring unit that is provided between the processing base and the fixed base, and an M-F measuring unit that is provided between the movable base and the fixed base, the movable base forming an inertial force processing unit, the moving force generating unit being controlled so as to control the moving velocity of the Processing base with respect to the fixed base, using signals generated from the P-F measuring unit and the M-F measuring unit, the moving force generating unit being designed to generate a moving force to move the processing base with respect to the movable base, and, as a result, to move the processing base with respect to the fixed base, and the movable base on the fixed base being moved in the opposite direction to the moving direction of the processing base by virtue of a reaction force caused by the moving force generated from the moving force generating unit to move the processing base.
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Specification