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Chuck with integrated wafer support

  • US 7,187,188 B2
  • Filed: 08/26/2004
  • Issued: 03/06/2007
  • Est. Priority Date: 12/24/2003
  • Status: Expired due to Fees
First Claim
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1. A probe station comprising:

  • (a) a chamber that at least partially encloses a chuck assembly therein;

    (b) said chuck assembly having an upper surface thereon suitable to support a wafer thereon;

    (c) a plurality of members located within a periphery of said chuck assembly suitable to support said wafer on said plurality of members while said wafer is not simultaneously supported by said upper surface;

    (d) said members and said upper surface capable of relative vertical movement with respect to one another such that said wafer may be moved between a position where said wafer is supported by said plurality of members while not simultaneously supported by said upper surface, and a position where said wafer is supported by said upper surface;

    (e) said chuck assembly movable from a location completely within said chamber to a location at least partially outside said chamber.

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