Stress wave sensor
First Claim
Patent Images
1. A stress wave sensor comprising:
- a support containing one or more mounts;
a semiconductor element mounted to the support between the mounts and containing a plurality of piezoresistors, each of the plurality of piezoresistors having input and output terminals, the plurality of piezoresistors including sensing piezoresistors and reference piezoresistors, each of the sensing piezoresistors having a non-strained impedance that is different than a non-strained impedance of each of the reference piezoresistors; and
a circuit configured to be coupled to the input and output terminals of the plurality of piezoresistors and capable of sensing the impedance of the plurality of piezoresistors.
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Abstract
Method and device for sensing stress waves. One embodiment is a method that includes providing a bendable support with one or more mounts each located at an end of the support; attaching a semiconductor element containing a plurality of piezoresistors, each having impedance, to the support; connecting the support to the component by the mounts of the support; and sensing the impedance of the plurality of piezoresistors.
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Citations
24 Claims
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1. A stress wave sensor comprising:
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a support containing one or more mounts; a semiconductor element mounted to the support between the mounts and containing a plurality of piezoresistors, each of the plurality of piezoresistors having input and output terminals, the plurality of piezoresistors including sensing piezoresistors and reference piezoresistors, each of the sensing piezoresistors having a non-strained impedance that is different than a non-strained impedance of each of the reference piezoresistors; and a circuit configured to be coupled to the input and output terminals of the plurality of piezoresistors and capable of sensing the impedance of the plurality of piezoresistors. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method of sensing stress waves within a component, the method comprising:
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providing a bendable support with one or more mounts; attaching a semiconductor element containing a plurality of piezoresistors, to the support, the plurality of piezoresistors including sensing piezoresistors and reference piezoresistors, each of the sensing piezoresistors having a non-strained impedance that is different than a non-strained impedance of each of the reference piezoresistors; connecting the support to the component with the mounts of the support; and sensing the impedance of the plurality of piezoresistors. - View Dependent Claims (10, 11, 12)
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13. A system of sensing stress waves in a component, the system comprising:
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a support with one or more mounts and configured to be attached to the component; a plurality of piezoresistors each with input and output terminals, the plurality of piezoresistors including sensing piezoresistors and reference piezoresistors, each of the sensing piezoresistors having a non-strained impedance that is different than a non-strained impedance of each of the reference piezoresistors; a semiconductor element containing the plurality of piezoresistors and configured to be attached to the support between the mounts of the support; and a circuit capable of being coupled to input and output terminals of the plurality of piezoresistors and capable of sensing the impedance of the plurality of piezoresistors. - View Dependent Claims (14, 15, 16, 17, 18)
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19. A sensor for sensing stress waves in a component, the sensor comprising:
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a flexible support having a first end and a second end, a longitudinal axis, a first support located proximate the first end, and a second support located proximate the second end; a semiconductor element containing a plurality of piezoresistors and mounted to the flexible support between the first and second supports;
the plurality of piezoresistors including a first pair of sensing piezoresistors and a second pair of reference piezoresistors, each of the first pair of sensing piezoresistors having a non-strained impedance that is different than a non-strained impedance of each of the second pair of reference piezoresistors and a length that is greater than a length of each of the second pair of reference piezoresistors;
the first pair of sensing piezoresistors located along and substantially parallel to the longitudinal axis of the flexible support; anda connector coupled to the semiconductor element so as to be able to receive a first signal derived from a second signal delivered to at least one of the plurality of piezoresistors.
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20. A system of sensing stress waves in a component, the system comprising:
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a plurality of piezoresistors each with input and output terminals, the plurality of piezoresistors including sensing piezoresistors and references piezoresistors, each of the sensing piezoresistors having a non-strained impedance that is different than a non-strained impedance of each of the reference piezoresistors; a semiconductor support containing the plurality of the piezoresistors and one or more mounts and configured to be attached to the component; a circuit capable of being coupled to input and output terminals of the plurality of piezoresistors and capable of sensing the impedance of the plurality of piezoresistors. - View Dependent Claims (21, 22, 23, 24)
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Specification