Angular velocity sensor
First Claim
1. An angular velocity sensor comprising:
- a frame;
an oscillator; and
a first torsion bar that connects the oscillator to the frame;
wherein the frame, the oscillator and the torsion bar are formed integral with each other by etching a material substrate in a thickness direction of the substrate;
wherein the oscillator has an H-like form made up of a support, a pair of first arms and a pair of second arms, the first arms extending from the support in a first arm-extending direction perpendicular to the thickness direction of the substrate to provide a first crotch between the first arms, the second arms extending from the support in a second arm-extending direction opposite to the first direction to provide a second crotch between the second arms;
wherein the oscillator includes a mounting surface that is provided with a piezoelectric driver for generating in-plane oscillation of the oscillator, and with a piezoelectric detector for detecting out-of-plane oscillation of the oscillator to determine an angular velocity;
wherein the piezoelectric driver extends on the substrate continuously from one of the first arms onto the support beyond the first crotch and from the support to the other of the first arms beyond the first crotch; and
wherein the piezoelectric detector extends on the substrate continuously from one of the second arms onto the support beyond the second crotch.
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Accused Products
Abstract
An angular velocity sensor is provided that includes a frame, an oscillator and torsion bars that connect the oscillator to the frame. The frame, the oscillator and the torsion bar are formed integral with each other by etching a material substrate in the thickness direction of the substrate. The oscillator, configured in the form of an H, includes a support, two first arms and two second arms. These arms extend from the support in an arm-extending direction perpendicular to the thickness direction of the substrate. The oscillator includes a mounting surface that is provided with a piezoelectric driver for generating in-plane oscillation of the oscillator, and with a piezoelectric detector for detecting out-of-plane oscillation of the oscillator.
19 Citations
15 Claims
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1. An angular velocity sensor comprising:
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a frame; an oscillator; and a first torsion bar that connects the oscillator to the frame; wherein the frame, the oscillator and the torsion bar are formed integral with each other by etching a material substrate in a thickness direction of the substrate; wherein the oscillator has an H-like form made up of a support, a pair of first arms and a pair of second arms, the first arms extending from the support in a first arm-extending direction perpendicular to the thickness direction of the substrate to provide a first crotch between the first arms, the second arms extending from the support in a second arm-extending direction opposite to the first direction to provide a second crotch between the second arms; wherein the oscillator includes a mounting surface that is provided with a piezoelectric driver for generating in-plane oscillation of the oscillator, and with a piezoelectric detector for detecting out-of-plane oscillation of the oscillator to determine an angular velocity; wherein the piezoelectric driver extends on the substrate continuously from one of the first arms onto the support beyond the first crotch and from the support to the other of the first arms beyond the first crotch; and wherein the piezoelectric detector extends on the substrate continuously from one of the second arms onto the support beyond the second crotch. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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Specification