Micro-mechanical capacitive inductive sensor for detection of relative or absolute pressure

• US 7,188,530 B2
• Filed: 12/13/2004
• Issued: 03/13/2007
• Est. Priority Date: 06/18/2002
• Status: Active Grant

• Current Assignee: Corporation for National Research Initiatives
• Original Assignee: Corporation for National Research Initiatives
• Inventors: Pedersen, Michael, Huff, Michael A., Ozgur, Mehmet
• Primary Examiner(s): Lefkowitz; Edward
• Assistant Examiner(s): ALLEN, ANDRE J
• Application Number:
  US11/009,706
• Publication Number:
  US 20050103112A1
• Time in Patent Office: 820 Days
• Field of Search: 737/00, 737/18, 737/24, 438/87, 438/70
• US Class Current: 73/718
• CPC Class Codes: G01L 9/0073 using a semiconductive diaphragm

Abstract

A micro-mechanical pressure transducer is disclosed in which a capacitive transducer structure is integrated with an inductor coil to form a LC tank circuit, resonance frequency of which may be detected remotely by imposing an electromagnetic field on the transducer. The capacitive transducer structure comprises a conductive movable diaphragm, a fixed counter electrode, and a predetermined air gap between said diaphragm and electrode. The diaphragm deflects in response to an applied pressure differential, leading to a change of capacitance in the structure and hence a shift of resonance frequency of the LC tank circuit. The resonance frequency of the LC circuit can be remotely detected by measuring and determining the corresponding peak in electromagnetic impedance of the transducer.

Claims

1. A micro-mechanical pressure transducer comprising:

a capacitive transducer structure comprising;

a pressure sensitive diaphragm formed from a first substrate,

a conductive layer formed on the diaphragm, and

an electrode formed on a second substrate,

an inductor coil formed within a plurality of layers forming the second substrate,

the first substrate being bonded to the second substrate whereby a pre-determined air gap is formed between the diaphragm and the electrode and the capacitive transducer structure is integrated with the inductor coil to form a LC tank circuit,

wherein deflections of the diaphragm in response to pressure differentials between the sealed cavity and the exterior atmosphere result in changes of capacitance between the electrode and the conductive layer on the diaphragm.

2. The micro-mechanical pressure sensor of claim 1, wherein the conductive layer is formed using at least one metal selected from the group consisting of aluminum, silver, tin, lead, copper, gold, platinum, palladium, nickel, chromium, titanium and alloys thereof.

3. The micro-mechanical pressure sensor of claim 1, wherein the electrode is formed using at least one metal selected from the group consisting of aluminum, silver, tin, lead, copper, gold, platinum, palladium, nickel, chromium, titanium and alloys thereof.

4. The micro-mechanical pressure sensor of claim 1, wherein the first substrate is single crystal silicon.

5. The micro-mechanical pressure transducer of claim 1, wherein the first substrate is silicon on insulator (SOI).

6. The micro-mechanical pressure sensor of claim 1, wherein the second substrate is a low-temperature co-fired ceramic (LTCC), and wherein the first substrate is hermetically bonded to the second substrate.

7. The micro-mechanical pressure sensor of claim 1, wherein the second substrate is a high-temperature co-fired ceramic (HTCC), and wherein the first substrate is hermetically bonded to the second substrate.

8. The micro-mechanical pressure sensor of claim 1, wherein the second substrate is sequentially-build-up (SBU) multi-layer printed circuit boards.

9. The micro-mechanical pressure sensor recited in claim 1 wherein the inductor coil is formed within a plurality of layers forming the second substrate and under the electrode formed on the second substrate, whereby the inductance of the coil is scaleable according to the number of layers used to form the coil.

10. The micro-mechanical pressure sensor recited in claim 1 wherein the inductor coil is implemented in several layers in the second substrate, directly under the fixed counter electrode and the diaphragm to reduce the overall size of the device and increase the inductance of the coil.

11. A micro-mechanical pressure sensor comprising:

a first substrate including a diaphragm,

a conductive layer formed on the diaphragm,

a second substrate including a plurality of layers,

an inductor formed within the plurality of layers,

an electrode formed on the second substrate,

the first and second substrates being bonded together to form a sealed cavity between the electrode and the conductive layer formed on the diaphragm,

a first via connecting the electrical inductor to the fixed electrode, and

a second via connecting the electrical inductor to the conductive layer on the diaphragm,

wherein deflections of the diaphragm in response to pressure differentials between the sealed cavity and the exterior atmosphere result in changes of capacitance between the electrode and the conductive layer on the diaphragm.

12. The micro-mechanical pressure sensor of claim 11, wherein the second hybrid substrate is formed using low-temperature co-fired ceramics (LTCC), in which a plurality of conductive layers are formed.

13. The micro-mechanical pressure sensor of claim 11, wherein the hybrid substrate is comprised of a first plurality of layers with spiraling conductors and a second plurality of insulating layers.

14. The micro-mechanical pressure sensor of claim 11, wherein a plurality of first and second vias are placed in each insulating layer to connect the spiral conductors.

15. The micro-mechanical pressure sensor of claim 11, wherein the conductive layer is formed from at least one metal selected from the group consisting of aluminum, silver, tin, lead, copper, gold, platinum, palladium, nickel, chromium, titanium and alloys thereof.

16. The micro-mechanical pressure sensor of claim 11, wherein the first substrate is a single crystal silicon.

17. The micro-mechanical pressure transducer of claim 11, wherein the first substrate is silicon on insulator (SOI).

18. The micro-mechanical pressure sensor of claim 11, wherein the second substrate is a low-temperature co-fired ceramic (LTCC), and wherein the first substrate is hermetically bonded to the second substrate.

19. The micro-mechanical pressure sensor of claim 11, wherein the second substrate is a high-temperature co-fired ceramic (HTCC), and wherein the first substrate is hermetically bonded to the second substrate.

20. The micro-mechanical pressure sensor of claim 11, wherein the second substrate is sequentially-build-up (SBU) multi-layer printed circuit boards.

21. A micro-mechanical pressure sensor comprising:

a first substrate including a pressure sensitive diaphragm,

a conductive layer formed on the diaphragm,

a second hybrid substrate including a plurality of layers,

an electrical inductor formed within the plurality of layers,

a fixed counter electrode formed on top of the second substrate,

the first and second substrates being bonded together and hermetically sealed to form a cavity between the fixed counter electrode and the conductive layer formed on the diaphragm, whereby the counter electrode and the conductive layer formed on the diaphragm form a capacitive structure,

at least one first via connecting the electrical inductor to the fixed electrode, and

at least one second via connecting the electrical inductor to the conductive layer on the diaphragm,

wherein deflections of the diaphragm in response to a pressure differential between the sealed cavity and the exterior atmosphere results in a change of capacitance between the fixed counter electrode and the conductive layer on the diaphragm, and

wherein the capacitive structure and the electrical inductor form an LC circuit.

22. The micro-mechanical pressure sensor of claim 21, wherein the second hybrid substrate is formed using low-temperature co-fired ceramics (LTCC), in which a plurality of conductive layers are formed.

23. The micro-mechanical pressure sensor of claim 22, wherein at least twenty conductive layers are formed in the LTCC second substrate.

24. The micro-mechanical pressure sensor of claim 21, wherein the inductor has a large inductance value and a large quality factor (Q).

25. The micro-mechanical pressure sensor of claim 21, wherein the hybrid substrate is comprised of a plurality of layers with spiraling conductors and a plurality of insulating layers.

26. The micro-mechanical pressure sensor of claim 21, wherein a plurality of first and second vias are placed in each insulating layer to connect the spiral conductors.

27. The micro-mechanical pressure sensor of claim 21, wherein the conductive layer is selected from the group consisting of aluminum, silver, tin, lead, copper, gold, platinum, palladium, nickel, chromium, titanium and alloys thereof.

28. The micro-mechanical pressure sensor of claim 21, wherein the first substrate is single crystal silicon.

29. The micro-mechanical pressure sensor of claim 21, wherein the second substrate is a low-temperature co-fired ceramic (LTCC).

30. The micro-mechanical pressure sensor of claim 21, wherein the first and second substrates are bonded together using thermo-compression bonding.

31. The micro-mechanical pressure sensor of claim 21, wherein the first and second substrates are bonded together using eutectic bonding.