Apparatus and method for minimizing the generation of particles in ultrapure liquids

• US 7,188,644 B2
• Filed: 05/03/2002
• Issued: 03/13/2007
• Est. Priority Date: 05/03/2002
• Status: Expired due to Term

• Current Assignee: Advanced Technology Materials, Inc. (Entegris Incorporated)
• Original Assignee: Advanced Technology Materials, Inc. (Entegris Incorporated)
• Inventors: Chilcote, Dennis, Kelly, Wayne
• Primary Examiner(s): Huynh; Khoa D.
• Application Number:
  US10/139,185
• Publication Number:
  US 20030205285A1
• Time in Patent Office: 1,775 Days
• Field of Search: 141/2, 141/3, 141/4, 141/20, 141/24, 141/374, 141/351
• US Class Current: 141/20
• CPC Class Codes: B65B 3/04 Methods of, or means for, filling the material into the containers or receptacles
• CPC Class Codes: B65B 3/22 Defoaming liquids in connection with filling
• CPC Class Codes: B65B 31/044 the nozzles being combined with a filling device B65B31/043 takes precedence
• CPC Class Codes: B67D 7/0261 specially adapted for transferring liquids of high purity

Abstract

A system and method of reducing particle generation in packaging containers used to transport ultra pure liquids. Particle generation in the containers is reduced by reducing the air-liquid interface present during filling, transport, and dispensing of the liquid.

Claims

1. A method of minimizing particle generation during handling of ultra pure liquids, the method comprising:

introducing a liquid into a container; and

controlling an air-liquid interface to minimize an amount of particles generated in the liquid.

2. The method of claim 1, wherein controlling the air liquid interface to minimize the amount of particles generated in the liquid comprises controlling the air liquid interface to achieve a particle concentration of less than about 2 particles per milliliter for particles having a size of about 0.2 microns.

3. The method of claim 2, wherein controlling the air-liquid interface to minimize the amount of particles generated in the liquid comprises:

providing a liner inside a rigid container;

collapsing the liner to remove any air in the liner; and

filling the collapsed liner with the ultra pure liquid.

4. The method of claim 3, wherein collapsing the liner comprises:

pressurizing an intermediate area between the liner and the rigid container to collapse the liner; and

venting the liner to allow air inside the liner to exit as the liner is collapsed.

5. The method of claim 4 further comprising sealing the liner after collapsing it.

6. The method of claim 1, wherein controlling the air-liquid interface to minimize the amount of particles generated in the liquid comprises:

providing a liner inside a rigid container;

filling the liner with liquid to less than a maximum capacity so that there is a remaining head space in the liner; and

reducing the head space by pressurizing an area between the liner and the rigid container and venting the head space air.

7. The method of claim 1, wherein controlling the air-liquid interface to minimize the amount of particles generated in the container comprises:

filling the liner with liquid to less than a maximum capacity so that there is a remaining head space in the liner; and

reducing the head space by inserting an inert bladder into the head space.

8. The method of claim 1, wherein introducing the liquid into the container comprises allowing the liquid to overspill a weir into a sump and wherein controlling the air-liquid interface to minimize the amount of particles generated in the liquid comprises reducing an overspill distance between the weir and a water level in the sump.

9. The method of claim 1, wherein controlling the air-liquid interface to minimize the amount of particles generated in the liquid comprises:

utilizing a dip tube to introduce the liquid into the container; and

submerging a tip of the dip tube in the liquid as the liquid is introduced into the container.

10. The method of claim 1, wherein controlling the air-liquid interface to minimize the amount of particles generated in the liquid comprises:

utilizing a nozzle to introduce liquid into the container; and

submerging the nozzle in the liquid as the liquid is introduced into the container.

11. The method of claim 1, wherein said container is a first container, wherein introducing liquid into the container comprises siphoning the liquid from a second container into the first container, and wherein controlling the air-liquid interface to minimize the amount of particles generated in the liquid comprises controlling the siphon to prevent it from breaking its siphoning action.

12. The method of claim 1, wherein the ultra pure liquid is selected from the group consisting of acids, bases, organic solvents, photolithography chemicals, CMP slurries and LCD market chemicals.

13. A method of minimizing particle generation during handling of ultra pure liquids, the method comprising:

introducing a liquid into a container; and

controlling an air-liquid interface to minimize an amount of particles generated in the liquid;

wherein controlling the air-liquid interface to minimize the amount of particles generated in the liquid comprises;

controlling the air liquid interface to achieve a particle concentration of less than about 2 particles per milliliter for particles having a size of about 0.2 microns;

providing a liner inside a rigid container;

collapsing the liner to remove any air in the liner; and

filling the collapsed liner with the ultra pure liquid;

wherein collapsing the liner comprises;

pressurizing an intermediate area between the liner and the rigid container to collapse the liner; and

venting the liner to allow air inside the liner to exit as the liner is collapsed;

wherein filling the collapsed liner comprises;

supplying the liner with liquid; and

venting the intermediate area as the liner fills with liquid.

14. A method of minimizing particle generation in ultra pure liquids during handling of the liquid, the method comprising:

transferring a liquid having an initial particle concentration, from a first location to a second location; and

controlling an air-liquid interface during transfer so that a final particle concentration of the liquid when the liquid is in the second location is not substantially greater than the initial particle concentration.

15. The method of claim 14, wherein transferring the liquid from a first location to a second location comprises filling a container from a liquid source using a dip tube.

16. The method of claim 15, wherein controlling the air-liquid interface during filling of the container comprises submerging a tip of the dip tube in the liquid in the container.

17. The method of claim 14, wherein transferring the liquid from a first location to a second location comprises introducing a liquid into a container via a nozzle.

18. The method of claim 17, wherein controlling the air-liquid interface comprises submerging the nozzle in the liquid in the container.

19. The method of claim 14, wherein transferring the liquid from a first location to a second location comprises allowing liquid to overspill a weir from a bath into a sump.

20. The method of claim 19, wherein controlling the air-liquid interface during transfer comprises minimizing an overspill distance between the weir and a surface of liquid located in the sump.

21. The method of claim 14, wherein transferring the liquid from a first location to a second location comprises siphoning liquid from a first container into a second container.

22. The method of claim 21, wherein controlling the air-liquid interface during transfer comprises controlling the siphon to prevent the siphon from breaking its siphoning action.

23. The method of claim 22, wherein controlling the siphon comprises controlling a level of liquid in the first container to prevent the siphon from breaking its siphoning action.

24. The method of claim 14, wherein transferring the liquid from a first location to a second location comprises filling a first container from a liquid source, wherein the first container comprises a liner disposed within a rigid container.

25. The method of claim 24, wherein the liquid in the first container after filling thereof has a particle concentration of less than about 2 particles per milliliter for particles at 0.2 micron size.

26. The method of claim 24, wherein controlling the air-liquid interface comprises:

filling the liner with liquid to less than a maximum capacity so that there is a remaining head space in the liner; and

reducing the head space by pressurizing an area between the liner and the rigid container to vent the head space air.

27. The method of claim 14, wherein controlling the air-liquid interface comprises:

filling the container with liquid to less than a maximum capacity so that there is a remaining head space in the container; and

reducing the head space by inserting an inert bladder into the head space.

28. The system of claim 27, wherein the means for controlling the air-liquid interface comprises a dip tube having a submerged tip.

29. The system of claim 27, wherein the means for controlling the air-liquid interface comprises a submerged nozzle.

30. The system of claim 27, wherein the means for transferring a liquid comprises a recirculation bath separated from a sump by a weir.

31. The system of claim 30, wherein the means for controlling the air-liquid interface comprises means for reducing a distance between the weir and a level of liquid in the sump.

32. The system of claim 27, wherein the means for controlling the air liquid interface comprises a smart siphon system for controlling the siphon to prevent the siphon from breaking its siphoning action due to entrained air.

33. The system of claim 27, wherein the final particle concentration is less than about 2 particles per milliliter for particles at 0.2 micron size.

34. The system of claim 33, wherein the means for controlling an air-liquid interface comprises:

a container having a rigid outer container and a collapsible inner liner;

means for collapsing the liner to remove any air in the liner;

a liquid source connected to the liner for filling the collapsed liner; and

means for venting an intermediate area located between the liner and the rigid outer container as the liner fills with liquid.

35. The system of claim 34, wherein the means for collapsing the liner comprises:

an air source connected to the container to pressurize the intermediate area; and

a vent for venting the liner to allow air in the liner to exit as the liner is collapsed.

36. The system of claim 34, further comprising means for dispensing the liquid from the container by pressurizing the intermediate area between the liner and the rigid outer container.

37. The system of claim 27, wherein the means for controlling the air-liquid interface comprises means for reducing head-space in the container after it is filled with liquid.

38. The system of claim 37, wherein the means for reducing head-space comprises an inert bladder.

39. The method of claim 38, wherein the inert bladder is located in the head space.

40. The method of claim 38 wherein the inert bladder is located between the liner and the rigid container.

41. A method of minimizing particle generation in ultra pure liquids during handling of the liquid, the method comprising:

transferring a liquid having an initial particle concentration, from a first location to a second location; and

controlling an air-liquid interface during transfer so that a final particle concentration of the liquid when the liquid is in the second location is not substantially greater than the initial particle concentration;

wherein transferring the liquid from a first location to a second location comprises filling a first container from a liquid source, wherein the first container comprises a liner disposed within a rigid container;

wherein the liquid in the first container after filling thereof has a particle concentration of less than about 2 particles per milliliter for particles at 0.2 micron size;

wherein controlling the air-liquid interface comprises;

collapsing the liner to remove air in the liner; and

filling the collapsed liner with liquid by supplying the liner with liquid from the liquid source and venting an intermediate area located between the liner and the rigid container as the liner fills with liquid.

42. The method of claim 41, further comprising dispensing the liquid from the first container by pressurizing the intermediate area to dispense the liquid from the liner.

43. The method of claim 42 and wherein dispensing the liquid from the first container further comprises transferring the liquid from the first container to a second container;

wherein the second container comprises a liner disposed within a rigid container.

44. The method of claim 43, further comprising:

connecting the liner of the first container to the liner of the second container;

collapsing the liner in the second container to remove air in the liner;

pressurizing the intermediate area of the first container to cause the liquid to move from the liner of the first container to the liner of the second container; and

venting an intermediate area located in the second container between the liner and the rigid container, as the liner of the second container is filled with the liquid from the liner of the first container.

45. A method of minimizing particle generation in ultra pure liquids during handling thereof, the method comprising:

providing a liquid;

introducing the liquid to a predetermined location; and

controlling an air-liquid interface to control particle level in the liquid.