Optical waveguide microcantilever with differential output and associated methods of cantilever sensing

• US 7,189,362 B2
• Filed: 03/05/2004
• Issued: 03/13/2007
• Est. Priority Date: 03/05/2004
• Status: Expired due to Fees

• Current Assignee: Board of Trustees of The University of Illinois, University of Alabama (University of Alabama System)
• Original Assignee: University of Alabama (University of Alabama System)
• Inventors: Nordin, Gregory, Cardenas Gonzalez, Jaime, George, Michael A.
• Primary Examiner(s): SINES, BRIAN J
• Application Number:
  US10/793,983
• Publication Number:
  US 20050195407A1
• Time in Patent Office: 1,103 Days
• Field of Search: 422/50, 422/55, 422/56, 422/57, 422/58, 422/68.1, 422/82.05, 422/82.09, 422/82.11, 436/43, 436/63, 436/164, 436/169, 436/172
• US Class Current: 422/82.11
• CPC Class Codes: G01N 21/7703 using reagent-clad optical fibres or optical waveguides using measurement of total internal reflection or attenuated total reflection G01N21/552; optical fibres or waveguides per se G02B
• CPC Class Codes: Y10T 436/11 Automated chemical analysis

Abstract

A microcantilever sensing system includes a waveguide cantilever that permits an optical signal to propagate through an endface of the cantilever. The propagated signal is received by a receiver waveguide across a gap from the cantilever. The receiver waveguide provides the optical signal to a differential beamsplitter. The signal is differentially split according to the position of the optical signal incident upon the receiving waveguide. A method of determining a deflection waveguide microcantilever is also disclosed. An optical signal is transmitted from the endface of a waveguide microcantilever and received by the receiver waveguide. The optical signal is differentially split and then each split signal is compared to determine beam deflection. A method of fabricating a microcantilever sensor provides a differential beamsplitter in optical communication with a waveguide cantilever.

Claims

1. A microcantilever sensing system having at least one microcantilever sensor, said microcantilever sensor comprising:

a waveguide cantilever permitting an optical signal to propagate through an endface of the cantilever; and

a receiver waveguide in optical communication with the waveguide cantilever endface such that the optical signal is communicated between the waveguide cantilever and the receiver waveguide; and

a differential beamsplitter for splitting the optical signal based on a deflection of the waveguide cantilever.

2. The microcantilever sensing system according to claim 1, wherein the differential beamsplitter comprises an asymmetrical strip load disposed on the receiver waveguide and a y-beamsplitter comprising two waveguide branches for receiving portions of the optical signal, the strip load being asymmetrical with respect to the waveguide branches.

3. The microcantilever sensing system according to claim 2, wherein the strip load comprises a material having a refractive index different from a refractive index of the receiver waveguide.

4. The microcantilever sensing system according to claim 1, wherein a gap is defined between the waveguide cantilever endface and the receiver waveguide.

5. The microcantilever sensing system according to claim 4, wherein the gap has a length between the receiver waveguide and the cantilever lever endface defined by a width permitting destructive interference of the optical signals reflected across the gap.

6. The microcantilever sensing system according to claim 1, further comprising two waveguide branches connecting outputs of the differential beam splitter.

7. The microcantilever sensing system according to claim 6, further comprising a grating coupler disposed on at least one of the two waveguide branches.

8. The microcantilever sensing system according to claim 6, further comprising a waveguide bend mirror disposed in a path of the optical signal of at least one of the two waveguide branches, the waveguide bend mirror reflecting the optical signal in a direction different than a direction of the waveguide branch.

9. The microcantilever sensing system according to claim 8, wherein the waveguide bend mirror has at least one trench.

10. The microcantilever sensing system according to claim 7, further comprising an optical fiber in optical communication with the grating coupler for receiving the optical signal from the grating coupler.

11. The microcantilever sensing system according to claim 1, further comprising a grating coupler in optical communication with the waveguide microcantilever for providing the optical signal to the waveguide microcantilever.

12. The microcantilever sensing system according to claim 11, further comprising an optical fiber in optical communication with the grating coupler for providing the optical signal to the grating coupler.

13. The microcantilever sensing system according to claim 1, further comprising an analyte carrier disposed on the waveguide microcantilever.

14. The microcantilever sensing system according to claim 13, wherein the analyte carrier comprises gold.

15. A microcantilever sensing system, comprising:

an optical signal source for providing an optical signal;

a plurality of beamsplitters for splitting the optical signal into portions;

a plurality of waveguide branches for receiving a portion of the split optical signal; and

a plurality of waveguide microcantilever sensors, each microcantilever sensor receiving the respective portion of the optical signal from at least one of the plurality of beamsplitters, each microcantilever sensor comprising,

a waveguide cantilever permitting the portion of the optical signal to propagate through an endface of the cantilever;

a receiver waveguide in optical communication with the waveguide cantilever endface such that the portion of the optical signal is communicated between the waveguide cantilever and the receiver waveguide; and

a differential beamsplitter for splitting the optical signal based on a deflection of the waveguide cantilever.

16. The microcantilever sensing system according to claim 15, wherein the differential beamsplitter comprises an asymmetrical strip load disposed on the receiver waveguide and a y-beamsplitter comprising at least two waveguide branches for receiving portions of the optical signal, the strip load being asymmetrical with respect to the waveguide branches.

17. The microcantilever sensing system according to claim 16, wherein the strip load comprises a material having a refractive index different from a refractive index of the receiver waveguide.

18. The microcantilever sensing according to claim 15, wherein a gap is defined between the waveguide cantilever endface and the receiver waveguide.

19. The microcantilever sensing system according to claim 18, wherein the gap has a length between the receiver waveguide and the cantilever endface defined by a width permitting destructive interference of the optical signals reflected across the gap.

20. The microcantilever sensing system according to claim 15, further comprising two waveguide branches connecting outputs of the differential beam splitter.

21. The microcantilever sensing system according to claim 20, further comprising a waveguide bend mirror disposed in a path of the optical signal of at least one of the two waveguide branches, the waveguide bend mirror reflecting the optical signal in a direction different than a direction of the waveguide branch.

22. The microcantilever sensing system according to claim 15, further comprising an analyte carrier disposed on the waveguide microcantilever.

23. A method of determining a deflection of a waveguide microcantilever, comprising:

transmitting an optical signal from an endface of a waveguide microcantilever;

receiving the transmitted optical signal;

differentially splitting the transmitted optical signal;

comparing the power of each of the differentially split signals; and

determining microcantilever beam deflection based upon the comparison of power.

24. The method according to claim 23, further comprising detecting each of the differentially split signals with a photodetector to convert the power output to current representative of the power output.

25. The method according to claim 23, wherein the step of comparison comprises determining the contrast of the differentially split signals.

26. The method according to claim 25, wherein the step of determining the contrast comprises calculating a normalized ratio of power outputs.

27. The method according to claim 23, wherein the step of differentially splitting the transmitted optical signal comprises proportionally splitting the signal by changing the optical signal mode profile in relation to branches of a beamsplitter.

28. The method according to claim 27, wherein the step of proportionally splitting the signal by changing the optical signal mode profile with strip loading asymmetrically disposed on the beamsplitter input relative to each branch of the beamsplitter.

29. A method of determining analyte adsorption, the analyte being disposed upon the waveguide microcantilever, comprising:

transmitting an optical signal from an endface of a waveguide microcantilever;

receiving the transmitted optical signal;

differentially splitting the transmitted optical signal;

comparing the power of each of the differentially split signals; and

determining analyte adsorption based upon the comparison of power.

30. The method according to claim 29, further comprising detecting each of the differentially split signals with a photodetector to convert the power output to current representative of the power output.

31. The method according to claim 29, wherein the step of comparison comprises determining the contrast of the differentially split signals.

32. The method according to claim 31, wherein the step of determining the contrast comprises calculating a normalized ratio of power outputs.

33. The method according to claim 29, wherein the step of differentially splitting the transmitted optical signal comprises proportionally splitting the signal by changing the optical signal mode profile in relation to branches of a beamsplitter.

34. The method according to claim 33, wherein the step of splitting the signal by changing the optical signal mode profile with strip loading asymmetrically disposed on the beamsplitter input relative to each branch of the beamsplitter.

35. The method according to claim 29, further comprising sensing a change in the analyte adsorption based on the determining.

36. A microcantilever sensing system having at least one microcantilever sensor, said microcantilever sensor comprising:

a cantilever having a first waveguide;

a second waveguide positioned to optically communicate with the first waveguide; and

a differential beamsplitter positioned within a path of an optical signal communicated between the first waveguide and the second waveguide such that the differential beamsplitter receives and differentially splits the optical signal after communication of the optical signal between the first and second waveguides.

37. The microcantilever system according to claim 36, wherein a gap is defined between the first and second waveguides.

38. A method for use in a microcantilever sensor, comprising:

communicating an optical signal between a first waveguide and a second waveguide, the first waveguide on a cantilever of the sensor;

differentially splitting the optical signal into at least a first split signal and second spilt signal; and

determining a deflection of the cantilever based on the first and second split signals.

39. The method according to claim 38, wherein the determining comprises comparing a power of the first split signal and a power of the second split signal.

40. The method according to claim 38, wherein a gap separates an endface of the first waveguide and an endface of the second waveguide.