Flash evaporation-plasma coating deposition method
First Claim
1. A method for the formation of an organic coating on a substrate comprising:
- providing, in a vacuum, a chilled substrate, flash evaporator, and cathode and anode for generating a jet plasma from the cathode toward the substrate;
vaporizing at least one organic liquid to form vaporized organic material capable of condensing in a vacuum of less than about 130 Pa;
generating the jet plasma;
directing the vaporized organic material and the plasma toward the substrate; and
condensing and polymerizing the vaporized organic material on the substrate in the presence of the plasma to form a polymeric coating.
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Abstract
The present invention provides a method for the formation of an organic coating on a substrate. The method includes: providing a substrate in a vacuum; providing at least one vaporized organic material comprising at least one component from at least one source, wherein the vaporized organic material is capable of condensing in a vacuum of less than about 130 Pa; providing a plasma from at least one source other than the source of the vaporized organic material; directing the vaporized organic material and the plasma toward the substrate; and causing the vaporized organic material to condense and polymerize on the substrate in the presence of the plasma to form an organic coating.
106 Citations
39 Claims
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1. A method for the formation of an organic coating on a substrate comprising:
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providing, in a vacuum, a chilled substrate, flash evaporator, and cathode and anode for generating a jet plasma from the cathode toward the substrate; vaporizing at least one organic liquid to form vaporized organic material capable of condensing in a vacuum of less than about 130 Pa; generating the jet plasma; directing the vaporized organic material and the plasma toward the substrate; and condensing and polymerizing the vaporized organic material on the substrate in the presence of the plasma to form a polymeric coating. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39)
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Specification