Method and structure of patterning landing pad structures for spatial light modulators

• US 7,190,508 B2
• Filed: 06/15/2005
• Issued: 03/13/2007
• Est. Priority Date: 06/15/2005
• Status: Expired due to Fees

• Current Assignee: Miradia Inc. (Walsin Lihwa Corporation)
• Original Assignee: Miradia Inc. (Walsin Lihwa Corporation)
• Inventors: Yang, Xiao
• Primary Examiner(s): THOMPSON, TIMOTHY J
• Application Number:
  US11/154,847
• Publication Number:
  US 20060285192A1
• Time in Patent Office: 636 Days
• Field of Search: 359/290, 359/291, 359/223, 359/224, 359/238, 359/292, 345/207, 345/108
• US Class Current: 359/291
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

A spatial light modulator. The spatial light modulator includes a first substrate and a standoff structure coupled to the first substrate. The spatial light modulator also includes a mirror structure coupled to the standoff structure. The mirror structure includes a mirror body comprising at least one edge region and at least one end region, a reflective layer coupled to the mirror body, and a flexible member coplanar with the mirror body. According to an embodiment of the present invention, the mirror structure rotates about the flexible member to an activated position. In the activated position, the at least one edge region of the mirror body makes contact with the standoff structure while maintaining the at least one end region free from contact with the first substrate.

Claims

1. A spatial light modulator comprising:

a first substrate;

a standoff structure coupled to the first substrate;

a mirror structure coupled to the standoff structure, the mirror structure comprising;

a mirror body comprising at least one edge region and at least one end region;

a reflective layer coupled to the mirror body; and

a flexible member coplanar with the mirror body, wherein the mirror structure rotates about the flexible member to an activated position, the at least one edge region of the mirror body making contact with the standoff structure in the activated position while maintaining the at least one end region free from contact with the first substrate.

2. The spatial light modulator of claim 1 wherein the first substrate is an electrode substrate including a plurality of electrodes adapted to receive an electrical activation signal.

3. The spatial light modulator of claim 1 wherein the standoff structure comprises a first portion coupled to the first substrate and a second portion coupled to the mirror structure.

4. The spatial light modulator of claim 3 wherein the first portion is fabricated from a dielectric layer.

5. The spatial light modulator of claim 3 wherein the second portion and the mirror structure are fabricated from a single piece of material.

6. The spatial light modulator of claim 5 wherein the single piece of material is a silicon substrate.

7. The spatial light modulator of claim 1 wherein the standoff structure comprises a contact structure coupled to the first substrate.

8. The spatial light modulator of claim 7 wherein the contact structure is fabricated from a dielectric layer.

9. The spatial light modulator of claim 8 wherein the dielectric layer is fabricated from a layer of silicon oxide.

10. The spatial light modulator of claim 1 wherein the mirror body makes contact with the contact structure at a plurality of contact points, each of the contact points an equal distance from the at least one end region of the mirror body.

11. The spatial light modulator of claim 1 wherein the mirror body makes contact with the contact structure at at least one contact point, a minimum distance from the flexible member to the at least one contact point being less than one half a diagonal distance across the mirror structure measured perpendicular to the flexible member.

12. The spatial light modulator of claim 1 wherein the standoff structure comprises a contact edge that is tapered to provide a contact point at which the mirror body makes physical contact with the contact structure.

13. The spatial light modulator of claim 1 wherein the contact structure comprises a contact edge that is tapered along a line substantially perpendicular to a diagonal of the mirror structure.

14. An array of spatial light modulators, the array comprising:

an electrode substrate;

a standoff structure with integrated contact pads coupled to the electrode substrate, the standoff structure including a plurality of annular recesses;

a first set of electrodes disposed within a first annular recess of the standoff structure;

a first micro-mirror associated with the first set of electrodes, coupled to the standoff structure, and adapted to rotate about a first hinge to an activated position, the first micro-mirror comprising at least one first edge region and at least one first end region, wherein the at least one first edge region makes contact with at least a first contact pad in the activated position while maintaining the at least one first end region free from contact with the electrode substrate;

a second set of electrodes disposed within a second annular recess of the standoff structure; and

a second micro-mirror associated with the second set of electrodes, coupled to the standoff structure, and adapted to rotate about a second hinge to an activated position, the second micro-mirror comprising at least one second edge region and at least one second end region, wherein the at least one second edge region makes contact with at least a second contact pad in the activated position while maintaining the at least one second end region free from contact with the electrode substrate.

15. The array of claim 14 wherein:

the first micro-mirror further comprises a third edge region, wherein the third edge region makes contact with a third contact pad in the activated position while maintaining the at least one first end region free from contact with the electrode substrate, and

wherein the second micro-mirror further comprises a fourth edge region, wherein the fourth edge region makes contact with a fourth contact pad in the activated position while maintaining the at least one second end region free from contact with the electrode substrate.