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Tuning fork vibratory MEMS gyroscope

  • US 7,191,653 B2
  • Filed: 03/03/2005
  • Issued: 03/20/2007
  • Est. Priority Date: 12/03/2004
  • Status: Active Grant
First Claim
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1. A tuning fork vibratory MEMS gyroscope comprising:

  • an external fixed support portion formed on a substrate having a flat structure in a horizontal direction by the X-axis and the Y-axis, which meet at a right angle, wherein the external fixed support portion includes;

    first and second Y-axis frame bars separated from each other and aligned in parallel in the direction of the Y-axis, andfirst and second X-axis frame bars connected to both ends of the first and second Y-axis frame bars, separated from each other, and aligned in parallel in the direction of the X-axis;

    a plurality of external elastic members connected to inner sides of the external fixed support portion, and having elasticity in the direction of the Y-axis, wherein the plurality of external elastic members include;

    first and second external elastic members respectively made of elastic bars having a designated length in the direction of the X-axis, ends of which are connected to the inner sides of the external fixed support portion and other ends of which are connected to a first external frame,third and fourth external elastic members respectively made of elastic bars having a designated length in the direction of the X-axis, ends of which are connected to the inner sides of the external fixed support portion and other ends connected to a second external frame,a fifth external elastic member made of an elastic body having a right-laid wine glass shape, both ends of a left side of which are connected to a central part of an inner surface of the first Y-axis frame bar of the external fixed support portion and both ends of a right side of which are respectively connected to the first and second external frames of the external fixed support portion, anda sixth external elastic member made of an elastic body having a left-laid wine glass shape, both ends of a right side of which are connected to a central part of an inner surface of the second Y-axis frame bar of the external fixed support portion and both ends of a left side of which are respectively connected to the first and second external frames of the external fixed support portion;

    wherein the first and second external frames are separated from the substrate by a designated interval, are elastically supported by the plurality of external elastic members, are disposed on the Y-axis such that the first and second external frames are separated from each other, and respectively include driving combs having a designated length in the direction of the Y-axis, at a part of an inner surface of the respective first and second external frames;

    first and second driving electrodes fixed to the substrate, respectively disposed inside the first and second external frames such that the first and second driving electrodes are separated from the inner sides of the first and second external frames, and respectively including comb drivers separated from the corresponding driving combs and engaged with the corresponding driving combs;

    first and second internal elastic members respectively connected to the inner sides of the first and second external frames, and having elasticity in the direction of the X-axis;

    first and second internal frames separated from the substrate by a designated interval, respectively disposed inside the first and second external frames such that the first and second internal frames are separated from the inner sides of the first and second external frames, elastically supported by the first and second internal elastic members, and respectively including sensing combs having a designated length in the direction of the Y-axis, at a part of inner sides of the first and second internal frames, respectively; and

    first and second sensing electrodes fixed to the substrate, respectively disposed inside the first and second internal frames such that the first and second sensing electrodes are separated from inner sides of the first and second internal frames, and respectively including comb sensors separated from the corresponding sensing combs by a designated interval and engaged with the corresponding sensing combs.

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