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Ultraviolet sensor and method for manufacturing the same

  • US 7,193,241 B2
  • Filed: 02/15/2005
  • Issued: 03/20/2007
  • Est. Priority Date: 02/16/2004
  • Status: Expired due to Fees
First Claim
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1. An ultraviolet sensor comprising:

  • a substrate;

    a diamond layer, placed on the substrate, functioning as a detector; and

    at least one pair of surface electrodes arranged on the diamond layer,wherein the diamond layer has a detecting region present at the surface thereof, the detecting region has at least one sub-region exposed from the surface electrodes, and the sub-region has a covering layer, made of oxide or fluoride, lying thereon, the oxide being at least one selected from the group consisting of alumina, silica, titania, and zirconia, the fluoride being at least one of calcium fluoride and magnesium fluoride.

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