Electro-optical device and electronic apparatus
First Claim
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1. An electro-optical device, comprising:
- a substrate;
a data line extending in a first direction;
a scanning line extending in a second direction and intersecting the data line;
a pixel electrode and a thin film transistor disposed so as to correspond to an intersection region of the data line and the scanning line, the pixel electrode being formed above the substrate;
a shielding layer disposed above the data line and below the pixel electrode,a first storage capacitor electrode electrically connected to the thin film transistor and the pixel electrode;
a second storage capacitor electrode electrically connected to the shielding layer and overlapping the first storage capacitor in plan view, the second storage capacitor electrode being electrically isolated from the data line and being formed in the same layer and from the same material as the data line;
a first titanium nitride film being included in the shielding layer and being formed along the data line and wider than the data line; and
a second titanium nitride film included in the data line and the second storage capacitor electrode.
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Abstract
An electro-optical device includes, above a substrate: data lines extending in a first direction; scanning lines extending in a second direction and intersecting the data lines; pixel electrodes and thin film transistors disposed so as to correspond to intersection regions of the data lines and the scanning lines; storage capacitors electrically connected to the thin film transistors and the pixel electrodes; and shielding layers disposed between the data lines and the pixel electrodes. Further, nitride films are included in the shielding layers and are formed along the data lines and are wider than the data lines.
33 Citations
10 Claims
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1. An electro-optical device, comprising:
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a substrate; a data line extending in a first direction; a scanning line extending in a second direction and intersecting the data line; a pixel electrode and a thin film transistor disposed so as to correspond to an intersection region of the data line and the scanning line, the pixel electrode being formed above the substrate; a shielding layer disposed above the data line and below the pixel electrode, a first storage capacitor electrode electrically connected to the thin film transistor and the pixel electrode; a second storage capacitor electrode electrically connected to the shielding layer and overlapping the first storage capacitor in plan view, the second storage capacitor electrode being electrically isolated from the data line and being formed in the same layer and from the same material as the data line; a first titanium nitride film being included in the shielding layer and being formed along the data line and wider than the data line; and a second titanium nitride film included in the data line and the second storage capacitor electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification