Basic cell, edge cell, wiring shape, wiring method, and shield wiring structure

• US 7,194,719 B2
• Filed: 08/10/2004
• Issued: 03/20/2007
• Est. Priority Date: 08/28/2003
• Status: Active Grant

• Current Assignee: Panasonic Semiconductor Solutions Co., Ltd. (Winbond Electronics Corporation)
• Original Assignee: Matsushita Electric Industrial Company Limited (Panasonic Holdings Corporation)
• Inventors: Matsuno, Noriaki, Wada, Hirofumi, Tsunoda, Masato
• Primary Examiner(s): Lin; Sun James
• Application Number:
  US10/914,334
• Publication Number:
  US 20050050507A1
• Time in Patent Office: 952 Days
• Field of Search: 716/17, 716/14, 716/13, 716/12, 716/8
• US Class Current: 257/659
• CPC Class Codes: G06F 30/394 Routing G06F30/396 takes precedence
• CPC Class Codes: G06K 19/07372 by detecting tampering with the circuit
• CPC Class Codes: H01L 23/522 including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
• CPC Class Codes: H01L 23/576 using active circuits
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

A basic cell of the present invention comprises a plurality of wires which constitute a wiring route of 90°, one ends of the plurality of wires being on one of opposite sides, and the other ends of the plurality of wires being on the other one of the opposite sides, wherein: each of the one ends of the plurality of wires is point-symmetric to any of the other ends of the plurality of wires with respect to the center of the area of the basic cell; and routes of the plurality of wires do not cross one another.

Claims

1. A basic cell, comprising a plurality of wires which constitute a wiring route of 90°

, one ends of the plurality of wires being on one of opposite sides, and the other ends of the plurality of wires being on the other one of the opposite sides, wherein;

each of the one ends of the plurality of wires is point-symmetric to any of the other ends of the plurality of wires with respect to the center of the area of the basic cell; and

routes of the plurality of wires do not cross one another.

2. A wiring method, comprising the steps of:

preparing a plurality of basic cells of claim 1, the basic cells having different wiring routes; and

arranging the prepared basic cells such that one ends or the other ends of a plurality of wires included in one of the prepared basic cells abut one ends or the other ends of a plurality of wires included in another one of the prepared basic cells, thereby forming a wiring.

3. The wiring method of claim 2, wherein the wiring pattern of every other one of a plurality of basic cells arranged in a row direction is inverted with respect to the Y-axis including the origin point of the basic cell.

4. The wiring method of claim 2, wherein:

one ends and the other ends of a plurality of wires are placed at symmetrical positions on one and the other of opposite sides; and

the wiring pattern of any of the arranged basic cells is inverted with respect to the Y-axis including the origin point of the basic cell.

5. The wiring method of claim 2, wherein:

if there are two or more rows of arranged basic cells, a turn-around connection is formed at a wiring route edge portion by using an edge cell;

the edge cell functions as a pattern for turn-around connection at a wiring route edge portion, the edge cell including terminals arranged on only one side of the edge cell at positions corresponding to terminal positions of basic cells which are arranged side by side and connected to the edge cell;

the arranged terminals are brought into correspondence with one another from both ends toward the center on a one-to-one basis; and

a wire is provided in the form of a route of 90°

between the corresponding terminals.

6. An edge cell functioning as a pattern for turn-around connection at a wiring route edge portion, comprising terminals arranged on only one side of the edge cell at positions corresponding to terminal positions of basic cells which are arranged side by side and connected to the edge cell, wherein:

the arranged terminals are brought into correspondence with one another from both ends toward the center on a one-to-one basis; and

a wire is provided in a form of a route of 90°

between the corresponding terminals.

7. A basic cell, comprising a plurality of wires which constitute wiring routes of 45°

and 90°

, wherein;

each of one ends of the wires is point-symmetric to any of the other ends of the wires with respect to the center of the area of the basic cell; and

routes of the plurality of wires do not cross one another.

8. A wiring method, comprising the steps of:

preparing a plurality of basic cells of claim 7, the basic cells having different wiring routes; and

arranging the prepared plurality of basic cells such that one ends or the other ends of a plurality of wires included in one of the prepared plurality of basic cells abut one ends or the other ends of a plurality of wires included in another one of the prepared plurality of basic cells, thereby forming a wiring.

9. The wiring method of claim 8, wherein the wiring pattern of every other one of the plurality of basic cells arranged in a row direction is inverted with respect to the Y-axis including the origin point of the basic cell.

10. The wiring method of claim 8, wherein:

one ends and the other ends of the plurality of wires are placed at symmetrical positions on one and the other of opposite sides; and

the wiring pattern of any of the arranged basic cells is inverted with respect to the Y-axis including the origin point of the basic cell.

11. The wiring method of claim 8, wherein:

if there are two or more rows of arranged basic cells, a turn-around connection is formed at a wiring route edge portion by using an edge cell;

the edge cell functions as a pattern for turn-around connection at a wiring route edge portion, the edge cell including terminals arranged on only one side of the edge cell at positions corresponding to terminal positions of the basic cells which are arranged side by side and connected to the edge cell;

the arranged terminals are brought into correspondence with one another from both ends toward the center on a one-to-one basis; and

a wire is provided in the form of a route of 90°

between the corresponding terminals.

12. A wiring structure of a shielding line, comprising:

a first shielding line superposed entirely over a wiring to be protected; and

a second shielding line formed in a layer overlying the first shielding line.

13. A wiring structure of a shielding line, comprising:

a shielding line layer in which a circuit line is partially mixed, the shielding line layer being formed in the uppermost layer of a semiconductor device; and

at least one intermediate layer in which a dummy line is inserted in a free space, the at least one intermediate layer being provided between a semiconductor substrate and the shielding line layer,

wherein the dummy line is connected to a line in an underlying layer to form wiring bridges in some portions.

14. A wiring method, comprising the steps of:

preparing a plurality of basic cells each of said basic cells comprising a plurality of wires which constitute a wiring route of 45°

or 90°

, one ends of the plurality of wires being on one of opposite sides, and the other ends of the plurality of wires being on the other one of the opposite sides, wherein;

each of the plurality of the wires is formed by a straight route between one end and the other end; and

the plurality of wires are parallel to each another; and

arranging the prepared plurality of basic cells such that one ends or the other ends of a plurality of wires included in one of the prepared plurality of basic cells abut one ends or the other ends of a plurality of wires included in another one of the prepared plurality of basic cells, thereby forming a wiring.

15. The wiring method of claim 14, wherein:

if there are two or more rows of arranged basic cells, a turn-around connection is formed at a wiring route edge portion by using one or a plurality of edge cells;

the edge cell functions as a pattern for turn-around connection at a wiring route edge portion, the edge cell including terminals arranged on only one side of the edge cell at positions corresponding to terminal positions of the basic cells which are arranged side by side; and

each of the terminals is connected to any one of the other arranged terminals except for an adjacent terminal.

16. The wiring method of claim 15, wherein the turn-around connection is formed at the wiring route edge portion using a plurality of edge cells having different relationships of connection between terminals.

17. An edge cell functioning as a pattern for turn-around connection at a wiring route edge portion, comprising terminals arranged on only one side of the edge cell at positions corresponding to terminal positions of a plurality basic cells which are arranged side by side, wherein each of the terminals is connected to any one of the other arranged terminals except for an adjacent terminal,

wherein each of said basic cells comprises a plurality of wires which constitute a wiring route of 45°

or 90°

, one ends of the plurality of wires being on one of opposite sides, and the other ends of the plurality of wires being on the other one of the opposite sides,

each of the plurality of the wires is formed by a straight route between one end and the other end; and

the plurality of wires are parallel to each another.