Mount table, surface texture measuring machine and surface texture measuring method
First Claim
Patent Images
1. A mount table comprising:
- a table main body having a mount surface on which a workpiece to be measured or worked is mounted,a support unit disposed beneath the table main body that supports the table main body so as to permit the table main body to float above a surface plate and freely move in X and Y planes and rotate about a Z axis on the surface plate during positioning of the workpiece into a prescribed attitude and wherein, when the workpiece is at the prescribed attitude, the support unit causes the table main body to suck onto the surface plate and thereby prevent movement in the X and Y planes and prevent rotation about the Z axis so as to permit measurement or working of the workpiece at the prescribed attitude, anda plurality of artifacts for measuring a plurality of attitudes of the mount table, wherein the plurality of the artifacts are directly provided on the table main body and extend outwardly therefrom.
1 Assignment
0 Petitions
Accused Products
Abstract
A mount table having a mount surface on which a workpiece as an object to be measured or worked includes a support unit for supporting the mount table so as to be floated from a surface plate so that the mount table can freely move or rotate on the surface plate finished to be plane or fixing and supporting the mount table on the surface plate and a plurality of artifact for measuring a plurality of attitudes on the mount table to detect the positions and rotations of the mount table in respective attitudes.
-
Citations
16 Claims
-
1. A mount table comprising:
-
a table main body having a mount surface on which a workpiece to be measured or worked is mounted, a support unit disposed beneath the table main body that supports the table main body so as to permit the table main body to float above a surface plate and freely move in X and Y planes and rotate about a Z axis on the surface plate during positioning of the workpiece into a prescribed attitude and wherein, when the workpiece is at the prescribed attitude, the support unit causes the table main body to suck onto the surface plate and thereby prevent movement in the X and Y planes and prevent rotation about the Z axis so as to permit measurement or working of the workpiece at the prescribed attitude, and a plurality of artifacts for measuring a plurality of attitudes of the mount table, wherein the plurality of the artifacts are directly provided on the table main body and extend outwardly therefrom. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
-
-
12. A surface texture measuring machine comprising:
-
a base having a flat upper surface defining a surface plate; a detector having a measuring member for measuring a workpiece; a detector support mechanism for supporting the detector for movement relative to the base; a measuring device for measuring at least a position or an angle of the detector; and a mount table that is mounted on the base, said mount table comprising; a table main body having a mount surface on which the workpiece to be measured or worked is mounted, a support unit disposed between the table main body and the surface plate that supports the table main body so as to permit the table main body to float above the surface plate and freely move in X and Y planes and rotate about a Z axis on the surface plate during positioning of the workpiece into a prescribed attitude and wherein, when the workpiece is at the prescribed attitude, the support unit causes the table main body to suck onto the surface plate and thereby prevent movement in the X and Y planes and prevent rotation about the Z axis so as to permit measurement or working of the workpiece at the prescribed attitude, and a plurality of artifacts for measuring a plurality of attitudes of the mount table, wherein the plurality of the artifacts are directly provided on the mount table main body and extend outwardly therefrom. - View Dependent Claims (13, 14)
-
-
15. A surface texture measuring method using a surface texture measuring machine, said surface measuring machine comprising:
-
a base having a flat upper surface serving as a surface plate; a detector having a measuring member for measuring a workpiece; a detector support mechanism for supporting the detector for movement relative to the base; a measuring device for measuring at least a position or an angle of the detector; and a mount table that is mounted to the base, said mount table comprising; a table main body having a mount surface on which a workpiece to be measured or worked is mounted, a support unit disposed between the table main body and the surface plate that supports the table main body to permit the table main body to float above the surface plate and freely move in X and Y planes and rotate about a Z axis on the surface plate during positioning of the workpiece into a prescribed attitude and wherein, when the workpiece is at the prescribed attitude, the support unit causes the table main body to suck onto the surface plate and thereby prevent movement in the X and Y planes and prevent rotation about the Z axis so as to permit measurement or working of the workpiece at the prescribed attitude, and a plurality of artifacts for measuring a plurality of attitudes of the mount table, wherein the plurality of the artifacts are directly provided on the table main body and extend outwardly therefrom said surface texture measuring method comprising the steps of; a positioning step of moving and rotating the table main body on which the workpiece is mounted, about the base in X and Y planes and about a Z axis to position the table main body at the prescribed attitude; a fixing step of fixing the table main body to the base at the prescribed attitude by sucking the table main body onto the base; an artifact measuring step of measuring the plurality of artifacts that can be measured at the prescribed attitude to collect artifact measured data; a workpiece measuring step of collecting the workpiece measured data of the workpiece at the prescribed attitude, as required; a repeating step of repeating the positioning step, the fixing step, the artifact measuring step and the workpiece measuring step, as required; an attitude calculating step of calculating respectively the attitudes of the table main body relative to the base on the basis of the artifact measured data; and a workpiece measured data integrating step of connecting the workpiece measured data collected respectively in the attitudes on the basis of the calculated results of the attitudes of the mount table to form an integrated measured result. - View Dependent Claims (16)
-
Specification