Strain detector and pressure sensor
First Claim
1. A strain detector, comprising:
- a strain-generating part formed as a thin plate inside a tubular rigid body;
a strain-detecting thin-film resistive part provided on the strain-generating part through an insulating film; and
an electrode thin-film forming an electrode pad to cover an electrode connection connected to the strain-detecting thin-film resistive part without any steps, wherein;
the electrode pad includes an external-connection bonding area and a testing probe area that are arranged at a side of the tubular rigid body and formed at different positions; and
the electrode connection extends to the electrode pad.
1 Assignment
0 Petitions
Accused Products
Abstract
A thin-film resistor (5) provided on a strain-generating part (2) via an insulating film (4) and an electrode thin-film (6) including an electrode pad (10) arranged in the thin-film resistor (5) are provided. The thin-film resistor (5) includes a strain-detecting thin-film resistive part (8) and an electrode connection (9) connected to the resistive part (8). The electrode connection (9) is formed to extend to the electrode pad (10). The electrode pad (10) includes an external-connection bonding area (12) and a testing probe area (13) formed at different positions. The electrode pad (10) is disposed on a tubular rigid body (1) provided at the outer peripheral edge of a strain-generating part (2).
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Citations
10 Claims
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1. A strain detector, comprising:
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a strain-generating part formed as a thin plate inside a tubular rigid body; a strain-detecting thin-film resistive part provided on the strain-generating part through an insulating film; and an electrode thin-film forming an electrode pad to cover an electrode connection connected to the strain-detecting thin-film resistive part without any steps, wherein; the electrode pad includes an external-connection bonding area and a testing probe area that are arranged at a side of the tubular rigid body and formed at different positions; and the electrode connection extends to the electrode pad. - View Dependent Claims (2, 3, 4, 5)
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6. A pressure sensor, comprising:
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a strain-generating part formed as a thin film inside a tubular rigid body; a strain-detecting thin-film resistive part provided on the strain-generating part through an insulating film; and an electrode thin-film forming an electrode pad to cover an electrode connection connected to the strain-detecting thin-film resistive part without any steps, wherein; the electrode pad includes an external-connection bonding area and a testing probe area that are arranged at a side of the tubular rigid body and formed at different positions; and the electrode connection extends to the electrode pad. - View Dependent Claims (7, 8, 9, 10)
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Specification