Micro fluidic valves, agitators, and pumps and methods thereof
First Claim
1. A device comprising:
- a structure with at least one opening;
a non-conducting member comprising two or more insulators deposited on each other with an interface between each pair of the insulators, the member having a first position exposing the opening and a second position sealing the opening;
a trapped, fixed static charge is imbedded at at least one of the interfaces between the two or more insulators after one of the two or more insulators is deposited on the other of the two or more insulators; and
at least two control electrodes which are adjacent to and spaced from different sides of the non-conducting member, the at least two control electrodes control the movement of the non-conducting member between the first position and the second position in response to an applied bias.
1 Assignment
0 Petitions
Accused Products
Abstract
A valve which has a structure with at least one opening and a member which has a fixed static charge and also has a first position exposing the opening and a second position sealing the opening. A method for making the valve includes providing a structure with at least one opening and providing a member having a fixed static charge where the member has a first position exposing the opening and a second position sealing the opening. An agitator includes a base with at least one trench, a structure with at least one opening, and a membrane with a fixed static charge. The structure is connected to the base over the trench with the opening in the structure extending through to the trench in the base. The membrane is connected to the base across at least a portion of the trench. A pump includes a base with at least one trench, a structure with at least two openings, a membrane with a fixed static charge, a first cantilever arm having a fixed static charge, and a second cantilever arm having a fixed static charge. The structure is connected to the base over the trench with the openings in the structure extending through to the trench in the base. The membrane is connected to the base across at least a portion of the trench. The first cantilever arm has a first position exposing one of the openings and a second position sealing the one of the openings. The second cantilever arm has a first position exposing another one of the openings and a second position sealing the another one of the openings.
259 Citations
21 Claims
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1. A device comprising:
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a structure with at least one opening; a non-conducting member comprising two or more insulators deposited on each other with an interface between each pair of the insulators, the member having a first position exposing the opening and a second position sealing the opening; a trapped, fixed static charge is imbedded at at least one of the interfaces between the two or more insulators after one of the two or more insulators is deposited on the other of the two or more insulators; and at least two control electrodes which are adjacent to and spaced from different sides of the non-conducting member, the at least two control electrodes control the movement of the non-conducting member between the first position and the second position in response to an applied bias. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A device comprising:
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a structure with at least one opening; two or more dissimilar insulators deposited on each other with an interface between each pair of the insulators, the member having a first position exposing the opening and a second position sealing the opening; a charge is imbedded and trapped at at least one of the interfaces between the two or more insulators after one of the two or more dissimilar insulators is deposited on the another one of the two or more dissimilar insulators; and at least two control electrodes which are adjacent to and spaced from different sides of the member, the at least two control electrodes control the movement of the non-conducting member between the first position and the second position in response to an applied bias. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21)
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Specification