Method and apparatus for non-contact electrical probe

• US 7,196,536 B2
• Filed: 08/02/2004
• Issued: 03/27/2007
• Est. Priority Date: 08/02/2004
• Status: Expired due to Fees

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Nystrom, Michael J., Hofler, Gloria E.
• Primary Examiner(s): Nguyen; Vinh
• Assistant Examiner(s): Chan; Emily Y
• Application Number:
  US10/910,060
• Publication Number:
  US 20060022696A1
• Time in Patent Office: 967 Days
• Field of Search: 324/765, 324/752, 324/753, 324/751, 324/754, 324/769, 324/158.1, 438/17, 438/14, 438/197
• US Class Current: 324/754.21
• CPC Class Codes: G01R 1/072 containing ionised gas
• CPC Class Codes: G01R 31/302 Contactless testing G01R31/66 takes precedence

Abstract

Methods and apparatus for non-contact electrical probes are described. In accordance with the invention, non-contact electrical probes use negative or positive corona discharge. Non-contact electrical probes are suited for testing of OLED flat panel displays.

Claims

1. An apparatus for non-contact testing of a device under test comprising:

an electrode comprising a radius of curvature;

a flat electrode comprising a first face, a second face and an aperture, said first face of said flat electrode separated from said electrode by a first gap and positioned such that said aperture is aligned with said electrode and wherein a steering structure is disposed in said first gap; and

a device under test interface is separated from said second face of said flat electrode by a second gap.

2. The apparatus of claim 1 wherein said radius of curvature is less than about one fifth of said first gap.

3. The apparatus of claim 1 wherein said electrode is comprised of nickel.

4. The apparatus of claim 1 wherein said flat electrode is comprised of stainless steel.

5. The apparatus of claim 1 wherein said electrode is a Spindt tip.

6. The apparatus of claim 1 wherein said aperture has a diameter in the range from about 10 μ

m to 300 μ

m.

7. The apparatus of claim 1 wherein said steering structure is electromagnetic.

8. The apparatus of claim 1 configured to generate a positive corona.

9. The apparatus of claim 1 wherein said electrode is a thin wire electrode.

10. The apparatus of claim 9 wherein said aperture is a slit-like aperture.

11. The apparatus of claim 1 further comprising a device under test electrically coupled to said device under test interface.

12. A method for making a non-contact testing of a device under test comprising:

providing an electrode comprising a radius of curvature;

positioning a flat electrode comprising a first face, a second face and an aperture such that said first face of said flat electrode is separated from said electrode by a first gap and such that said aperture is aligned with said electrode, disposing a steering structure in said first gap; and

positioning a device under test interface such that it is separated from said second face of said flat electrode by a second gap.

13. The method of claim 12 wherein said radius of curvature is less than about one fifth of said first gap.

14. The method of claim 12 wherein said electrode is a Spindt tip.

15. The method of claim 12 wherein said steering structure is electrostatic.

16. The method of claim 12 wherein said electrode is a thin wire electrode.

17. The method of claim 12 further comprising electrically coupling a device under test to said device under test interface.

18. The method of claim 12 wherein said aperture is a slit-like aperture.