Surface micromachined millimeter-scale RF system and method

• US 7,196,666 B2
• Filed: 06/06/2005
• Issued: 03/27/2007
• Est. Priority Date: 06/04/2004
• Status: Expired due to Fees

• Current Assignee: Georgia Tech Research Corporation (University System of Georgia)
• Original Assignee: Georgia Tech Research Corporation (University System of Georgia)
• Inventors: Park, Jin-Woo, Cros, Florent, Allen, Mark G., Papapolymerou, Ioannis, Yoon, Yong-Kyu, Joung, Yeun-Ho, Pan, Bo, Tentzeris, Emmanouil
• Primary Examiner(s): Nguyen; Hoang V.
• Application Number:
  US11/145,911
• Publication Number:
  US 20060017650A1
• Time in Patent Office: 659 Days
• Field of Search: 343/700.MS, 343/846, 343/833, 343/834, 343/702
• US Class Current: 343/700.0MS
• CPC Class Codes: H01Q 19/32 the primary active element being end-fed and elongated
• CPC Class Codes: H01Q 9/0407 Substantially flat resonant element parallel to ground plane, e.g. patch antenna dipole H01Q9/285; monopole H01Q9/40
• CPC Class Codes: H01Q 9/30 with feed to end of elongated active element, e.g. unipole H01Q9/44 takes precedence

Abstract

A surface micromachined electromagnetically radiating antenna includes a coplanar waveguide on a ground plane coated substrate having a conductor path. The conductor path is coupled to a monopole conductor, which has a generally-cylindrical backbone erected vertically from the substrate and a metal layer deposited on the backbone at a predetermined thickness. The antenna may be fabricated by depositing an epoxy on the ground plane coated substrate to a predetermined depth and according to a pattern. The epoxy is exposed to an ultraviolet source that develops one or more columns according to the pattern. A seed layer of metal may be formed on the developed column. A conductive metal is electrodeposited over the column surface to produce the monopole antenna. Other antenna may be created by adding monopoles and/or conductive metal patches and/or strips that are positioned atop the monopoles and elevated from the substrate.

Claims

1. A micromachined antenna, comprising:

a coplanar waveguide having a conductor path and coupled to a substrate material; and

a monopole conductor having a generally cylindrical backbone erected vertically from the substrate material and a metal layer deposited on the backbone at a predetermined thickness and in electrical communication with the conductor path and isolated from electrical communication from the substrate material.

2. The antenna of claim 1, wherein the substrate material includes a first material having a second material thereon that operates as a ground plane.

3. The antenna of claim 2, wherein the first material comprises one of a group that includes glass, silicon, and sapphire.

4. The antenna of claim 1, wherein the height of the monopole conductor is greater than 800 μ

m.

5. The antenna of claim 1, wherein the backbone is constructed of epoxy material that is sensitive to near ultraviolet radiation.

6. The antenna of claim 1, further comprising:

a reflector monopole erected a predetermined distance from the monopole conductor at a height that is greater than the monopole conductor, the reflector monopole having a backbone of a first material and a metal layer deposited on the backbone; and

a plurality of director monopoles erected in a line created by the reflector monopole and the monopole conductor, the plurality of director monopoles having a height that is less than the monopole conductor and positioned apart from each other according to the predetermined distance.

7. The antenna of claim 6, wherein the reflector monopole, metal layered backbone, and the plurality of director monopoles are oriented so as to direct electromagnetic energy in a predetermined direction that is not omnidirectional.

8. The antenna of claim 1, wherein at least one director monopole is positioned from the monopole conductor according to the predetermined distance.

9. The antenna of claim 1, further comprising:

a plurality of nonconductive monopoles erected proximate to the monopole conductor at a height that is equal to the height of the monopole conductor; and

a metal patch coupled on top of the monopole conductor and the plurality of nonconductive monopoles so that the metal patch is in electrical communication with the monopole conductor and secured by a conductive adhesive substance.

10. The antenna of claim 1, further comprising:

first and second monopole conductors coupled to a first coupler strip metal positioned on top of the first and second monopole conductors so that the first coupler strip is elevated from the substrate;

third and fourth monopole conductors coupled to a second coupler strip metal positioned on top of the third and fourth monopole conductors so that the second coupler strip is elevated from the substrate; and

wherein each of the first, second, third, and fourth monopole conductors is coupled to a separate coplanar waveguide, and wherein first and second coplanar waveguides are generally parallel to each other.

11. A magnetically-lifted micromachined monopole antenna, comprising:

a substrate having a coplanar waveguide;

a deformable metal monopole formed on a removable photoresist mold having a bend and electrically coupled to a signal path in the coplanar waveguide; and

a ferromagnetic metal deposited on the metal monopole, wherein the metal monopole is deflected to a vertical position when the ferromagnetic metal is subjected to a magnetic field.

12. The magnetically lifted monopole antenna of claim 11, wherein the height of the deflected deformable metal monopole above the substrate extends to greater than 2 millimeters.

13. The magnetically lifted monopole antenna of claim 11, wherein the metal of the deformable metal monopole is gold, and the ferromagnetic metal is NiFe.

14. A method for an electromagnetic energy radiating micromachined antenna having a monopole, comprising the steps of:

depositing an epoxy material on a ground plane coated substrate to a predetermined thickness, wherein the ground plane is patterned;

exposing the ground plane coated substrate and the epoxy material to an ultraviolet source so that a monopole column develops in accordance with the patterned ground plane;

forming a seed layer of a metal on the ground plane and the developed column; and

electrodepositing a conductive metal over the column surface to produce a monopole antenna.

15. The method of claim 14, further comprising the steps of:

coating a portion of the seed layer in a predetermined pattern to define a signal path for electrical communication between the signal path and the monopole antenna.

16. The method of claim 14, wherein the substrate is glass, the ground plane is created by chromium, the seed layer is a metal having titanium and copper, and the conductive metal is gold.

17. The method of claim 14, further comprising the steps of:

positioning a reflector monopole having a metal exterior and a nonmetal interior and having a height that is greater than the monopole antenna and position that is a predetermined distance from the monopole antenna; and

positioning one or more director monopoles each having a metal exterior and a nonmetal interior and having a height that is less than the monopole antenna, wherein a first director monopole is positioned at a position that is the predetermined distance from the monopole antenna and wherein each remaining director monopole of the one or more director monopoles is positioned the predetermined distance from another director monopole.

18. The method of claim 17, wherein a first portion of the epoxy material is removed after exposure of the epoxy material to an ultraviolet source for a predetermined time so that the reflector monopole has a height above the ground plane that is equal to the predetermined thickness, and further a second portion of the epoxy material is removed after exposure to the ultraviolet source for a predetermined time so that the monopole antenna has a height above the ground plane that is less than the height of the reflector monopole, and further a third portion of the epoxy material is removed after exposure to the ultraviolet source for a predetermined time so that each of the one or more director monopoles has a height that is less then the height of the monopole antenna, wherein each of the reflector monopole and the one or more director monopoles are coated in a metal.

19. The method of claim 14, further comprising the steps of:

positioning a plurality of nonconductive monopoles a predetermined distance from the monopole antenna;

adhering a metal patch onto a end of the monopole antenna and each of the plurality of nonconductive monopoles so that the metal path is elevated above the substrate; and

forming a coplanar waveguide in the ground plane so that a signal path is electrically coupled to the monopole antenna and the metal patch.

20. The method of claim 14, further comprising the steps of:

positioning three conductive monopoles a predetermined distance from the monopole antenna, wherein each of the conductive monopoles and the monopole antenna is electrically coupled to a separate coplanar waveguide;

adhering a first coupler metal to an end of the monopole antenna and to an end of a first conductive monopole so that the first coupler metal is elevated above the substrate; and

adhering a second coupler metal to an end of a second conductive monopole antenna and to an end of a third conductive monopole so that the second coupler metal is elevated above the substrate and is essentially parallel to the first coupler metal.

21. A magnetically-lifted monopole antenna, comprising the steps of:

forming a metal monopole having a bended section on an epoxy sensitive to near ultraviolet radiation;

placing a ferromagnetic material on the metal monopole;

erecting the metal monopole with a magnetic force; and

removing the epoxy with near ultraviolet radiation.