Area array modulation and lead reduction in interferometric modulators
First Claim
Patent Images
1. A display device comprising:
- a MEMS display portion; and
a plurality of collapsible cavity MEMS switches comprising first and second terminals, wherein at least some of said MEMS switches are coupled to the display, and wherein said first and second terminals are located with respect to said collapsible cavity such that said terminals are selectively placed in electrical contact depending on a state of said collapsible cavity.
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Abstract
A light modulator is arranged as array of rows and columns of interferometric display elements. Each element is divided into sub-rows of sub-elements. Array connection lines transmit operating signals to the display elements, with one connection line corresponding to one row of display elements in the array. Sub-array connection lines electrically connect to each array connection line. Switches transmit the operating signals from each array connection line to the sub-rows to effect gray scale modulation.
338 Citations
18 Claims
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1. A display device comprising:
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a MEMS display portion; and a plurality of collapsible cavity MEMS switches comprising first and second terminals, wherein at least some of said MEMS switches are coupled to the display, and wherein said first and second terminals are located with respect to said collapsible cavity such that said terminals are selectively placed in electrical contact depending on a state of said collapsible cavity. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A display device comprising:
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a MEMS display portion; and a plurality of collapsible cavity MEMS switches for controlling the display, wherein said collapsible cavity MEMS switches comprise first and second terminals, and wherein said first and second terminals are located with respect to said collapsible cavity such that said terminals are selectively placed in electrical contact depending on a state of said collapsible cavity; and wherein the plurality of collapsible cavity MEMS switches forms in part row or column select circuitry. - View Dependent Claims (9, 10, 11)
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12. A method of making a MEMS display device, the method comprising:
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forming a display portion on a substrate; and forming a plurality of collapsible cavity MEMS switches at least some of which are coupled to the display, wherein the plurality of collapsible cavity MEMS switches are formed integrally with the display portion on the substrate; wherein said collapsible cavity MEMS switches comprise first and second terminals, and wherein said first and second terminals are located with respect to said collapsible cavity such that said terminals are selectively placed in electrical contact depending on a state of said collapsible cavity. - View Dependent Claims (13, 14, 15)
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16. A display device comprising:
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a MEMS display portion; and a plurality of collapsible cavity means for electrically connecting at least one pair of conductors, wherein at least some of said collapsible cavity means are coupled to the display. - View Dependent Claims (17, 18)
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Specification