System and method for identifying a manufacturing tool causing a fault

• US 7,197,414 B2
• Filed: 03/28/2005
• Issued: 03/27/2007
• Est. Priority Date: 03/29/2004
• Status: Expired due to Fees

• Current Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Original Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Inventors: Matsushita, Hiroshi, Kadota, Kenichi
• Primary Examiner(s): Hoff; Marc S.
• Assistant Examiner(s): Suglo; Janet L
• Application Number:
  US11/090,217
• Publication Number:
  US 20050251365A1
• Time in Patent Office: 729 Days
• Field of Search: 702/83, 702/84, 700/121, 438/14
• US Class Current: 702/83
• CPC Class Codes: G05B 19/4184 characterised by fault tolerance, reliability of production system
• CPC Class Codes: G05B 2219/31356 Automatic fault detection and isolation
• CPC Class Codes: G05B 2219/32222 Fault, defect detection of origin of fault, defect of product
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A system for identifying a manufacturing tool causing a failure, includes a data generating module generating factorial effect data, based on information on a failure lot group by using an orthogonal array, a chart generating module generating a factorial effect chart based on the factorial effect data, a selection module selecting failure lots caused by the same reason for a failure from among the failure lot group, based on the factorial effect chart, and an identification module identifying a manufacturing tool used as a common tool for the selected plurality of failure lots, based on history information of the manufacturing tool group.

Claims

1. A system connected to a plurality of manufacturing tool groups comprising a plurality of manufacturing tools and a test tool testing an industrial product manufactured by the plurality of manufacturing tool groups, for identifying a manufacturing tool causing a failure in the industrial product, comprising:

a data generating module configured to generate factorial effect data, based on information on a failure lot group, which is estimated based on failure lot identification information obtained by the test tool, by using an orthogonal array in which a factor column contains maintenance information and operation information as to the plurality of manufacturing tool groups, and in which a trial row specifies main effect information by every combination of levels in the factor column;

a chart generating module configured to generate a factorial effect chart based on the factorial effect data;

a selection module configured to select a plurality of failure lots caused by the same reason for the failure in the industrial product from among the failure lot group, based on the factorial effect chart;

an identification module configured to identify one of the plurality of manufacturing tools used as a common tool for the selected plurality of failure lots, based on history information of one of the plurality of manufacturing tool groups; and

a display configured to display the manufacturing tool causing a failure in the industrial product at a user terminal.

2. The system of claim 1, wherein the main effect information is information for discriminating between a pass lot and a failure lot.

3. The system of claim 1, wherein the failure lot group is a group of failure lots having failure tendencies within the surfaces of substrates, the failure tendencies being the same with one another.

4. The system of claim 1, wherein the factorial effect data indicate a test value for each process.

5. The system of claim 4, wherein the factorial effect chart shows the test value in a separated form of a failure test value and a normal test value for every lot number included in the failure lot group.

6. The system of claim 1, wherein the identification module identifies a manufacturing tool used as a common tool for the selected plurality of failure lots, by a tool-difference analysis.

7. The system of claim 1, further comprising an estimation module configured to estimate the failure lot group, by using an orthogonal array where a factor column contains the failure lot identification information, and where a trial row contains main effect information for estimating an optimum condition in association with the factor column.

8. The system of claim 1, further comprising a classification module configured to classify fault data for a lot, based on failure tendencies within surfaces of substrates.

9. The system of claim 1, further comprising an extraction module configured to extract a lot that satisfies a designated condition.

10. A system connected to a plurality of manufacturing tool groups comprising a plurality of manufacturing tools and a test tool testing an industrial product manufactured by the plurality of manufacturing tool groups, for identifying a manufacturing tool causing a failure in the industrial product, comprising:

a tool database configured to store maintenance information and operation information of the plurality of manufacturing tool groups;

a yield database configured to store yield information on the industrial product, which is calculated based on a test result of the test tool;

a failure lot group database configured to store information on a failure lot group estimated based on a test value of a tool-difference analysis calculated using an orthogonal array, in which a factor column contains failure lot identification information included in yield information stored in the yield database, and in which a trial row specifies main effect information by every combination of levels in the factor column

a chart generating module configured to generate a factorial effect chart by using the failure lot identification information and failure lot group information stored in the failure lot group database;

a selection module configured to select a plurality of failure lots caused by the same reason for the failure in the industrial product from among the failure lot group information, based on the factorial effect chart;

an identification module configured to identify one of the plurality of manufacturing tools used as a common tool for the selected plurality of failure lots, based on history information of one of the plurality of manufacturing tool groups stored in the tool history information database; and

a display configured to display the manufacturing tool causing a failure in the industrial product at a user terminal.

11. The system of claim 10, further comprising a lot selection module configured to select a failure lot.

12. The system of claim 10, further comprising an estimation module configured to estimate a failure lot group, based on a test value of the tool-difference analysis calculated using the orthogonal array.

13. The system of claim 10, further comprising an extraction module configured to extract a failure lot, which satisfies a designated condition, from the yield database.

14. A computer implemented method for identifying a manufacturing tool causing a failure in an industrial product manufactured by a plurality of manufacturing tool groups comprising a plurality of manufacturing tools, the method comprising:

testing the industrial product by a test tool;

generating factorial effect data, based on information on a failure lot group, which is estimated based on failure lot identification information obtained by the test tool, by using an orthogonal array in which a factor column contains maintenance information and operation information as to the plurality of manufacturing tool groups, and in which a trial row specifies main effect information by every combination of levels in the factor column;

generating a factorial effect chart based on the factorial effect data;

selecting a plurality of failure lots caused by the same reason for the failure in the industrial product from among the failure lot group, based on the factorial effect chart;

identifying one of the plurality of manufacturing tools used as a common tool for the selected plurality of failure lots, based on history information of one of the plurality of manufacturing tool groups; and

displaying the manufacturing tool causing a failure in the industrial product on a display at a user terminal.

15. The method of claim 14, wherein the main effect information is information for discriminating between a pass lot and a failure lot.

16. The method of claim 14, wherein the failure lot group is estimated using an orthogonal array where a factor column contains the failure lot identification information, and where a trial row contains main effect information for estimating an optimum condition in association with the factor column.

17. The method of claim 14, wherein the failure lot group is a group of failure lots having failure tendencies within the surfaces of substrates, the failure tendencies being the same with one another.

18. The method of claim 14, wherein the factorial effect data indicate a test value for each process.

19. The method of claim 18, wherein the factorial effect chart shows the test value in a separated form of a failure test value and a normal test value for every lot number included in the failure lot group.