Lithographic apparatus and device manufacturing method utilizing FPD chuck Z position measurement

• US 7,197,828 B2
• Filed: 05/31/2005
• Issued: 04/03/2007
• Est. Priority Date: 05/31/2005
• Status: Expired due to Fees

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Lof, Joeri, Rutten, Jeroen Hendrik Gerardus Christiaan
• Primary Examiner(s): SMITH, RICHARD A
• Application Number:
  US11/140,581
• Publication Number:
  US 20060265889A1
• Time in Patent Office: 672 Days
• Field of Search: 33/1.M, 335/33, 335/51, 337/06, 337/07, 337/08, 337/01, 250/201.1, 250/548, 250/559.39, 250/491.1, 250/492.22, 356/399, 356/400, 356/401, 356/601, 356/614, 355/61, 355/62
• US Class Current: 33/1.00M
• CPC Class Codes: G03F 7/70775 Position control, e.g. interferometers or encoders for determining the stage position
• CPC Class Codes: G03F 7/70791 Large workpieces, e.g. glass substrates for flat panel displays or solar panels

Abstract

A lithographic apparatus comprising a first frame and a second frame, the first frame and the second frame being moveable in a first direction relative to one another. The first frame is provided with a ruler having distance indicators disposed in the first direction for monitoring by an associated ruler monitoring sensor. The second frame is provided with a second sensor arranged to measure the distance between the second sensor and the ruler in a second direction orthogonal to the first direction, using the ruler as a reference surface.

Claims

1. A lithographic apparatus, comprising:

a first frame, and

a second frame,

wherein the first frame and the second frame are moveable in a first direction relative to one another, the first frame being provided with a ruler having distance indicators disposed in the first direction for monitoring by an associated ruler monitoring sensor, and

wherein the second frame is provided with a second sensor arranged to measure a distance between the second sensor and the ruler in a second direction orthogonal to the first direction, using the ruler as a reference surface.

2. The lithographic apparatus according to claim 1, wherein:

the first frame comprises a holder;

the lithographic apparatus further comprises a substrate height sensor that measures a height of a substrate held by the holder; and

the second sensor is located adjacent to the substrate height sensor and measures a distance between the second sensor and the ruler at that location.

3. The lithographic apparatus according to claim 2, wherein the lithographic apparatus further comprises:

projection optics that project a desired pattern onto the substrate; and

a third sensor located adjacent to the projection optics and measuring a distance between the third sensor and the ruler at that location.

4. The lithographic apparatus according to claim 1, wherein:

the first frame comprises a holder;

the lithographic apparatus further comprises a substrate height sensor that measures a height of a substrate held by the holder; and

the second sensor is in a position which is not adjacent to the substrate height sensor and measures a distance between the second sensor and the ruler at that position.

5. The lithographic apparatus according to claim 4, wherein the lithographic apparatus further comprises:

projection optics that project a desired pattern onto the substrate; and

a third sensor positioned unadjacent to the projection optics and measuring a distance between the third sensor and the ruler at that position.

6. The lithographic apparatus according to claim 5, wherein the lithographic apparatus is provided with an adjustment mechanism that adjusts a focal plane of the projection optics based upon measurements provided by the second and third sensors.

7. The lithographic apparatus according to claim 5, wherein the apparatus further comprises two or more rows of projection optics, and a fourth sensor is located adjacent to each row of projection optics.

8. The lithographic apparatus according to claim 5, wherein the second and third sensors are provided on one side of the frame, and corresponding sensors are provided on an opposite side of the frame.

9. The lithographic apparatus according to claim 5, further comprising a memory that either stores measurements provided by the second and third sensors or values calculated using those measurements.

10. The lithographic apparatus according to claim 1, wherein the second sensor is an acoustic sensor, a capacitance sensor, an inductive sensor, an optical sensor, or a mechanical sensor.

11. The lithographic apparatus according to claim 1, wherein the first frame is a substrate holder.

12. The lithographic apparatus according to claim 1, wherein the first frame is a reticle holder.

13. The lithographic apparatus according to claim 1, further comprising a memory that stores a measurement of a surface shape of the ruler.

14. The lithographic apparatus according to claim 13, further comprising a processor that uses the measured distance between the ruler and the second sensor, and the stored measurement of the surface shape of the ruler, to measure movement in the second direction between the first frame and the second frame.

15. A measurement apparatus, comprising:

a ruler including distance indicators disposed in a first direction for monitoring by an associated ruler monitoring sensor; and

a second sensor that measures a distance between the second sensor and the ruler in a second direction orthogonal to the first direction, using the ruler as a reference surface.

16. The measurement apparatus according to claim 15, wherein the measurement apparatus forms part of a lithographic apparatus.

17. A method, comprising:

(a) providing a substrate holder with a ruler having distance indicators disposed in a first direction;

(b) providing a frame with a height sensor that measures a height of a substrate held by the substrate holder;

(c) providing projection optics that project a desired pattern onto the substrate,

(d) measuring a height of the ruler with a second sensor located adjacent to the height sensor;

(e) moving the substrate holder and substrate relative to the projection optics;

(f) measuring the height of the ruler using a third sensor located adjacent to the projection optics;

(g) determining a correction offset based upon the difference between the measured heights of the ruler; and

(h) using the correction offset together with the measured height of the substrate to adjust the projection optics, such that the projection optics project an in-focus pattern onto the substrate.

18. The method according to claim 17, wherein the correction offset is determined in real time during projection of the pattern onto the substrate.

19. The method according to claim 17, wherein the correction offset is stored in a memory and is retrieved during projection of the pattern onto the substrate.

20. The method according to claim 19, wherein the correction offset comprises a set of values.

21. A flat panel display manufactured according to the method of claim 17.

22. A method of lithographic exposure using a lithographic apparatus, comprising:

(a) providing a first frame with a ruler having distance indicators disposed in a first direction;

(b) providing a second frame with a plurality of sensors that measure a distance between the plurality of sensors and the ruler in a second direction orthogonal to the first direction, using the ruler as a reference surface,

(c) measuring a surface flatness of the ruler; and

(d) using the plurality of sensors to measure movement of the first frame relative to the second frame in the second direction, during scanning movement of the first frame relative to the second frame in the first direction.

23. The method according to claim 22, wherein the measurement of the surface flatness of the ruler is performed using a dedicated sensor.

24. The method according to claim 22, wherein the measurement of the surface flatness of the ruler is performed using the plurality of sensors.

25. A measurement method, comprising:

(a) using a ruler having distance indicators disposed in a first direction for monitoring by an associated ruler monitoring sensor; and

(b) measuring with a sensor a distance between the sensor and the ruler in a second direction orthogonal to the first direction, using the ruler as a reference surface.