Immersible thermal mass flow meter

• US 7,197,953 B2
• Filed: 11/09/2005
• Issued: 04/03/2007
• Est. Priority Date: 04/02/2004
• Status: Expired due to Fees

• Current Assignee: Sierra Instruments, Inc.
• Original Assignee: Sierra Instruments, Inc.
• Inventors: Olin, John George
• Primary Examiner(s): PATEL, HARSHAD R
• Application Number:
  US11/270,154
• Publication Number:
  US 20060053911A1
• Time in Patent Office: 510 Days
• Field of Search: 738/665, 732/042.2, 732/042.4
• US Class Current: 73/866.5
• CPC Class Codes: G01F 1/684 Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
• CPC Class Codes: G01F 1/6842 with means for influencing the fluid flow

Abstract

A thermal anemometer or mass flow meter having temperature and flow velocity sensor elements is provided in which a thin film temperature sensor is provided in the heated sensor of the fluid velocity sensor element of the system. The thin-film sensor is captured at least partially within a spacer or interface member, the spacer being received within a housing. The thermal anemometer is constructed to offer sufficient precision and accuracy in its design to be suitable for sensitive scientific and industrial applications. This goal is achieved while using cost effective parts—as in the thin film temperature sensor(s)—in connection with a construction approach minimizing or eliminating gaps or other system configuration variability.

Claims

1. An apparatus for use as a mass flow meter in a fluid, comprising:

a spacer having cross section defining a circular diameter and a rectangular hole, said spacer adapted to closely hold a thin-film RTD temperature sensor in said hole by comprising a body selected from a powdered metal fabricated piece and a machined metal solid.

2. The apparatus of claim 1, wherein said machined solid is broached or electrical discharge machined.

3. The apparatus of claim 2, wherein said metal is selected from copper, aluminum, silver gold and alloys thereof.

4. The apparatus of claim 3, wherein said metal comprising copper is bronze.

7. The apparatus of claim 2, wherein said metal comprising copper is bronze.

5. An apparatus for use as a mass flow meter in a fluid, comprising:

a velocity sensor element without potting compound comprising an elongate body for extending into the fluid, said elongate body comprising a housing shell, a distal end of said housing shell closely holding a spacer, said spacer closely holding a thin-film RTD temperature sensor, wherein said housing shell comprises steel and said spacer comprises a metal selected from copper aluminum, silver gold and alloys thereof.

6. The apparatus of claim 5, wherein said steel is stainless steel.

8. The apparatus of claim 5, wherein said sensor comprises an active area and electrical leads to carry current to said active area from a proximal end of said shell, said active area in substantially gap-free contact with an internal abutting spacer area.

9. A method of making an apparatus for use as a mass flow meter in a fluid, the method comprising:

providing components as described in claim 5,

inserting said temperature sensor in said spacer,

compressing said spacer,

inserting said spacer into said housing shell.

10. The method of claim 9, wherein said inserting of said spacer into said housing shell is by press-fitting.

11. The method of claim 9, wherein said compressing of said spacer follows said inserting of said temperature sensor in said spacer.

12. A method of measuring the mass flow of a fluid, the method comprising:

providing a flowmeter comprising at least one sensor element within an elongate body for extending into the fluid;

flowing the fluid substantially perpendicular to said body through open-ended legs of said elongate body extending along said sensor element to define a volume between said legs in which said sensor element is located; and

diverting axial flow from along said elongate body.

13. The method of claim 12, wherein said axial flow is diverted by a feature on said elongate body.

14. The method of claim 12, wherein said legs extend beyond said sensor element.