Opening/closing mechanism for vacuum processing apparatus and vacuum processing apparatus using the same

• US 7,198,251 B2
• Filed: 12/21/2005
• Issued: 04/03/2007
• Est. Priority Date: 12/21/2004
• Status: Expired due to Fees

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Kondoh, Keisuke
• Primary Examiner(s): Bastianelli; John
• Application Number:
  US11/312,607
• Publication Number:
  US 20060131278A1
• Time in Patent Office: 468 Days
• Field of Search: 251/193, 251/195, 251/158, 251/167, 251/301, 251/302, 251/203, 251/250, 251/289
• US Class Current: 251/193
• CPC Class Codes: F16K 31/54 with pinion and rack
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations

Abstract

An opening/closing mechanism for a vacuum processing apparatus comprises a link mechanism comprising a supporting member having first and second valve elements for closing first and second opening portions, and a base end side member rotatably attached at a rear edge portion side of the supporting member through a rotation axis, a guide mechanism rotatably supporting the supporting member to a horizontal moving direction of the first and second valve elements while restricting the vertical moving range of the supporting member, first and second guide members which move the rotation axis of the link mechanism to a vertical direction and at the top portion to the horizontal direction, and first and second vertical moving mechanisms which vertically move the first guide member, the second guide member and the base edge side member.

Claims

1. An opening/closing mechanism for a vacuum processing apparatus which enables to airtightly close first and second opening portions closely disposed to face each other in a vacuum processing apparatus for vacuum processing an object to be treated under a vacuum atmosphere, the opening/closing mechanism, comprising:

a first valve element for closing the first opening portion and a second valve element for closing the second opening portion;

a link mechanism comprising a valve element supporting member including the first and second valve elements which are disposed on a top portion of the supporting member to look towards an opposite direction with each other, and a base end side member rotatably attached at a rear edge portion side of the valve element supporting member through a rotation axis;

a guide mechanism rotatably supporting the valve element supporting member to a horizontal moving direction of the first and second valve elements while restricting the vertical moving range of the valve element supporting member;

a first guide member which moves the rotation axis of the link mechanism to a vertical direction within the vertical moving range which is restricted by the guide mechanism, and at the top portion to the horizontal direction;

a second guide member which moves the rotation axis of the link mechanism to a vertical direction within the vertical moving range which is restricted by the guide mechanism and at the top portion to the horizontal direction which is an opposite direction of the horizontal moving direction of the first guide member;

a first vertical moving mechanism which vertically moves the base edge side member while vertically moving the first guide member; and

a second vertical moving mechanism which vertically moves the base edge side member while vertically moving the second guide member.

2. The opening/closing mechanism for the vacuum processing apparatus according to claim 1,

wherein the first vertical moving mechanism vertically moves the base end side member with a moving speed of ½

of a moving speed of the first guide member, and

wherein the second vertical moving mechanism moves the base end side member with a moving speed of ½

of a moving speed of the second guide member.

3. The opening/closing mechanism for the vacuum processing apparatus according to claim 2,

wherein the first and second vertical moving mechanism comprises first and second racks disposed to face with each other, a pinion disposed between the first and second racks to be geared with the racks and rotatably attached to a rear end portion of the base end side member, a first driving mechanism vertically moving the first rack, and a second driving mechanism vertically moving the second rack.

4. A vacuum processing apparatus for vacuum processing a processing object under a vacuum atmosphere, comprising:

a first vacuum chamber having a first opening portion;

a second vacuum chamber having a second opening portion disposed to face the first opening portion;

a first valve element for closing the first opening portion;

a second valve element for closing the second opening portion;

a link mechanism comprising a valve element supporting member and a base end portion member, the valve element supporting member being provided to be between the first opening portion and the second opening portion and having first and second valve elements attached at a top portion thereof, wherein the first valve element is disposed to face the first opening portion side, the second valve element is disposed to face the second opening side which is opposite to the first opening portion side;

a base end side member rotatably attached at a rear edge portion side of the valve element supporting member through a rotation axis;

a guide mechanism rotatably supporting the valve element supporting member to a horizontal moving direction of the first and second valve elements while restricting the vertical moving range of the valve element supporting member;

a first guide member which moves the rotation axis of the link mechanism to a vertical direction within the vertical moving range which is restricted by the guide mechanism, and at the top portion to the horizontal direction;

a second guide member which moves the rotation axis of the link mechanism to a vertical direction within the vertical moving range which is restricted by the guide mechanism and at the top portion to the horizontal direction which is an opposite direction of the horizontal moving direction of the first guide member;

a first vertical moving mechanism which vertically moves the base edge side member while vertically moving the first guide member; and

a second vertical moving mechanism which vertically moves the base edge side member while vertically moving the second guide member.

5. The vacuum processing apparatus according to claim 4,

wherein the first vertical moving mechanism vertically moves the base end side member with a moving speed of ½

of a moving speed of the first guide member, and

wherein the second vertical moving mechanism vertically moves the base end side member with a moving speed of ½

of a moving speed of the second guide member.

6. The vacuum processing apparatus according to claim 5,

wherein the first and second vertical moving mechanisms comprise first and second racks disposed to face with each other, a pinion disposed between the first and second racks to be geared with the racks and rotatably attached to a rear end portion of the base end side member, a first driving mechanism vertically moving the first rack, and a second driving mechanism vertically moving the second rack.