Alignment stage apparatus

• US 7,199,493 B2
• Filed: 05/31/2006
• Issued: 04/03/2007
• Est. Priority Date: 01/26/2004
• Status: Expired due to Fees

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Ohishi, Shinji
• Primary Examiner(s): MULLINS, BURTON S
• Application Number:
  US11/443,377
• Publication Number:
  US 20060214518A1
• Time in Patent Office: 307 Days
• Field of Search: 318/135
• US Class Current: 310/12.31
• CPC Class Codes: G03F 7/70716 Stages
• CPC Class Codes: G03F 7/70725 control
• CPC Class Codes: G03F 7/70758 Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
• CPC Class Codes: G03F 7/70991 Connection with other apparatus, e.g. multiple exposure stations, particular arrangement of exposure apparatus and pre-exposure and/or post-exposure apparatus; Shared apparatus, e.g. having shared radiation source, shared mask or workpiece stage, shared base-plate; Utilities, e.g. cable, pipe or wireless arrangements for data, power, fluids or vacuum
• CPC Class Codes: G03F 9/7096 Arrangement, mounting, housing, environment, cleaning or maintenance of apparatus
• CPC Class Codes: H01L 21/682 Mask-wafer alignment in general G03F7/70, G03F9/70

Abstract

An alignment stage apparatus includes a base structure and a movable stage which can move along a surface of the base structure so as not to be in contact with the base structure. The apparatus includes a plurality of power transmission coils buried under the surface of the base structure, a power reception coil attached to the movable stage to oppose the surface, a switching device for sequentially switching, of the plurality of power transmission coils, those that are to be energized to feed power in accordance with a position of the movable stage, and a power feeding device for supplying AC power to the power transmission coils to be energized through the switching device.

Claims

1. A stage apparatus comprising:

a base structure having a guiding surface;

a movable stage which can move along the guiding surface;

a plurality of coils provided along the guiding surface of the base structure;

a power reception coil provided to said movable stage;

a plurality of switches each provided for a corresponding coil of said plurality of coils and configured to switch the corresponding coil so that the corresponding coil is selectively used for transmitting power to said power reception coil or driving said movable stage; and

a controller configured to control said plurality of switches based on a position of said movable stage.

2. The apparatus according to claim 1, further comprising a magnet, wherein, among said plurality of coils, a coil facing said magnet is used for driving said movable stage.

3. The apparatus according to claim 1, further comprising a power feeding unit configured to supply AC power to the coils to be energized through the switch.

4. The apparatus according to claim 1, wherein a plurality of said power reception coils are arrayed in a driving direction of said movable stage, and said plurality of power reception coils are arranged to be phase shifted from the coils provided along the guiding surface of said base structure.

5. The apparatus according to claim 1, further comprising a rechargeable battery mounted on said movable stage.

6. An exposure apparatus comprising:

a stage apparatus as defined in claim 1, said stage apparatus being adapted to align one of a substrate and a master.

7. A device manufacturing method comprising:

a step of forming a latent image pattern on a substrate by using an exposure apparatus as defined in claim 6; and

a step of developing the latent image pattern.