Fault notification based on a severity level

• US 7,200,779 B1
• Filed: 04/26/2002
• Issued: 04/03/2007
• Est. Priority Date: 04/26/2002
• Status: Expired due to Fees

• Current Assignee: GlobalFoundries, Inc.
• Original Assignee: Advanced Micro Devices, Inc.
• Inventors: Coss, Elfido Jr., Conboy, Michael R., Hickey, Susan
• Primary Examiner(s): DUNCAN, MARC M
• Application Number:
  US10/133,097
• Time in Patent Office: 1,803 Days
• Field of Search: 714/48, 714/47, 714/57, 700/108, 700/109, 700/110
• US Class Current: 714/48
• CPC Class Codes: G06F 11/0709 in a distributed system consisting of a plurality of standalone computer nodes, e.g. clusters, client-server systems
• CPC Class Codes: G06F 11/076 by exceeding a count or rate limit, e.g. word- or bit count limit
• CPC Class Codes: G06F 11/0769 Readable error formats, e.g. cross-platform generic formats, human understandable formats
• CPC Class Codes: G06F 11/0781 Error filtering or prioritizing based on a policy defined by the user or on a policy defined by a hardware/software module, e.g. according to a severity level

Abstract

A method and apparatus is provided for fault notification based on a severity level. The method comprises detecting a fault associated with a processing tool that is adapted to process one or more workpieces, determining a fault severity level of the detected fault and selecting at least one user to notify of the fault based on the severity level of the fault.

Claims

1. A system, comprising:

a processing tool adapted to process a semiconductor device; and

a fault notification module adapted to;

detect a fault associated with the processing tool;

identify at least one user to identify the fault based on a fault severity level; and

transmit information related to the fault to the at least one selected user; and

an advanced process control framework coupled between the processing tool and the fault notification module.