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MEMS device with movement amplifying actuator

  • US 7,201,471 B2
  • Filed: 06/22/2006
  • Issued: 04/10/2007
  • Est. Priority Date: 07/15/1997
  • Status: Expired due to Fees
First Claim
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1. A micro-electromechanical (MEMS) device for ejecting a drop of liquid, the MEMS device comprising:

  • a supporting substrate;

    a chamber formed on the substrate for holding a quantity of the liquid;

    an actuator attached to the substrate for movement relative to the substrate;

    a liquid ejecting mechanism attached to the actuator for movement within the chamber;

    drive circuitry on the substrate for generating drive signals to drive the actuator; and

    ,an ejection port in fluid communication with the chamber such that movement of the liquid ejecting mechanism in response to the actuator receiving a drive signal causes a drop of the liquid ejecting through the ejection port;

    wherein,actuation of the actuator causes greater movement of the liquid ejecting mechanism relative to the substrate than the actuators movement relative to the substrate.

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