Contoured CMP pad dresser and associated methods

• US 7,201,645 B2
• Filed: 09/29/2004
• Issued: 04/10/2007
• Est. Priority Date: 11/22/1999
• Status: Expired due to Term

• Current Assignee: Kinik Company
• Original Assignee: Kinik Company
• Inventors: Sung, Chien-Min
• Primary Examiner(s): Wilson; Lee D.
• Assistant Examiner(s): Ojini; Anthony
• Application Number:
  US10/954,956
• Publication Number:
  US 20050095959A1
• Time in Patent Office: 923 Days
• Field of Search: 451/41, 451/56, 451/443, 451/444, 451285-290, 451/526, 451/539, 451/540, 451/548
• US Class Current: 451/443
• CPC Class Codes: B24B 53/017 Devices or means for dressing, cleaning or otherwise conditioning lapping tools
• CPC Class Codes: B24B 53/12 Dressing tools; Holders therefor
• CPC Class Codes: B24D 18/00 Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
• CPC Class Codes: B24D 2203/00 Tool surfaces formed with a pattern
• CPC Class Codes: B24D 3/06 metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
• CPC Class Codes: B24D 7/02 Wheels in one piece

Abstract

CMP pad dressers with increased pad dressing work loads on the centrally located abrasive particles during dressing of a CMP pad, and methods associated therewith are disclosed and described. The increase in work load on centralized particles improves pad dressing performance and also extends the service life of the pad dresser.

Claims

1. A method of increasing work load on centrally located superabrasive particles in a CMP pad dresser during dressing of a CMP pad with the dresser comprising:

configuring the superabrasive particles in a pattern that reduces penetration of peripherally located particles into the CMP pad and increases penetration of centrally located particles into the CMP pad.

2. The method of claim 1, wherein the pattern of superabrasive particles provides an upward slope from working ends of the peripherally located particles to working ends of the centrally located particles.

3. The method of claim 2, wherein the slope is provided by increasing particle height from the peripherally located particles to the centrally located particles above a working surface of the dresser.

4. The method of claim 2, wherein the slope is determined as a measure of pad velocity and flexibility.

5. The method of claim 2, wherein the slope is from about 0.1% to about 0.5%.

6. The method of claim 5, wherein the slope is about 0.2%.

7. The method of claim 1, wherein the pattern of superabrasive particles provides a density of peripherally located particles that is higher than a density of centrally located particles.

8. The method of claim 7, wherein the density of the peripherally located particles is at least about 5 times greater than the density of the centrally located particles.

9. The method of claim 7, wherein the density of the peripherally located particles is at least about 2 times greater than the density of the centrally located particles.

10. The method of claim 7, wherein the density of the peripherally located particles is at least about 1.25 times greater than the density of the centrally located particles.

11. The method of claim 7, wherein superabrasive particles between the centrally and peripherally located particles are placed at a density that is between the density of the centrally located particles and the peripherally located particles.

12. The method of claim 7, wherein the pattern of superabrasive particles provides a substantially continuous density gradient of high at the peripherally located particles to low at the centrally located particles.

13. The method of claim 1, wherein the pattern of superabrasive particles provides centrally located particles with an attitude that causes greater particle penetration into the CMP pad than penetration provided by an attitude of the peripherally located particles.

14. The method of claim 13, wherein the attitude of the centrally located particles is an apex at the working end thereof, and the attitude of the peripherally located particles is either an edge or a face at the working end thereof.

15. The method of claim 13, wherein the attitude of the centrally located particles is an edge at the working end thereof, and the attitude of the peripherally located particles is a face at the working end thereof.

16. The method of claim 13, wherein the attitude of the centrally located particles is an apex at the working end thereof, and the attitude of the peripherally located particles is a face at the working end thereof, and any particles therebetween have an attitude of an edge at the working end thereof.

17. The method of any of claims 1, 2, 7, or 13, wherein the work load of the centrally located particles is increased to within at least about 30% of the work load of the peripherally located particles.

18. The method of claim 17, wherein the work load of the centrally located particles is increased to within at least about 10% of the work load of the peripherally located particles.

19. The method of claim 17, wherein the work load of the centrally located particles is increased to be substantially equal with the work load of the peripherally located particles.

20. The method of claim 17, wherein the work load of all particles is substantially equal.

21. The method of either of claims 2 or 13, wherein the superabrasive particles are each individually located at specific positions on a substrate in accordance with a predetermined pattern.

22. The method of claim 21, wherein the pattern is a substantially uniform grid.

23. The method of any of claims 1, 2, 7, or 13, wherein said superabrasive particles are selected from the group consisting of:

diamond, polycrystalline diamond (PCD), cubic boron nitride (cBN), and polycrystalline cubic boron nitride (PCBN).

24. The method of claim 23, wherein said superabrasive particles are diamond.

25. The method of any of claims 1, 2, 7, or 13, further comprises the step of providing a substrate to which the superabrasive particles are coupled.

26. The method of any of claims 25, wherein said superabrasive particles are coupled to a substrate by brazing, sintering, or electroplating.

27. The method of any of claims 1, 2, 7, or 13, wherein said superabrasive particles have a substantially uniform shape.

28. The method of claim 27, wherein said uniform shape is euhedral.

29. The method of claim 27, wherein said uniform shape is octahedral.

30. The method of any of claims 25, wherein the substrate is made of flexible, metallic, or ceramic material.

31. The method of claim 30, wherein said metallic material is stainless steel.

32. A CMP pad dresser comprising:

a substrate; and

a plurality of superabrasive particles attached to the substrate, wherein said superabrasive particles are configured in a predetermined pattern that provides an upward slope from working ends of the peripherally located particles to working ends of the centrally located particles.

35. The CMP pad dresser of claim 32, wherein the slope is provided by increasing particle height from the peripherally located particles to the centrally located particles above a working surface of the dresser.

36. The CMP pad dresser of claim 32, wherein the slope is determined as a measure of pad velocity and flexibility.

37. The CMP pad dresser of claim 32, wherein the slope is from about 0.1% to about 0.5%.

38. The CMP pad dresser of claim 32, wherein the slope is about 0.2%.

47. The CMP pad dresser of any of claims 32, 33, or 34, wherein the work load of the centrally located particles is increased to within at least about 30% of the work load of the peripherally located particles.

48. The CMP pad dresser of claim 47, wherein the work load of the centrally located particles is increased to within at least about 10% of the work load of the peripherally located particles.

49. The CMP pad dresser of claim 47, wherein the work load of the centrally located particles is increased to substantially equal with the work load of the peripherally located particles.

50. The CMP pad dresser of claim 47, wherein the work load of all particles is substantially equal.

51. The CMP pad dresser of either of claims 32 or 34, wherein the superabrasive particles are each individually located at specific positions in accordance with a predetermined pattern.

52. The CMP pad dresser of claim 51, wherein the pattern is a substantially uniform grid.

53. The CMP pad dresser of any of claims 32, 33, or 34, wherein said superabrasive particles are selected from the group consisting of:

diamond, polycrystalline diamond (PCD), cubic boron nitride (cBN), and polycrystalline cubic boron nitride (PCBN).

54. The CMP pad dresser of claim 53, wherein said superabrasive particles are diamond.

55. The CMP pad dresser of any of claims 32, 33, or 34, wherein said superabrasive particles are attached to the substrate by brazing, sintering, or electroplating.

56. The CMP pad dresser of claims 32, 33, or 34, wherein said superabrasive particles have a substantially uniform shape.

57. The CMP pad dresser of claim 56, wherein said uniform shape is euhedral.

58. The CMP pad dresser of claim 56, wherein said uniform shape is octahedral.

59. The CMP pad dresser of claim 56, wherein said uniform shape is cubo-octahedral.

60. The CMP pad dresser of any of claims 32, 33, or 34, wherein said substrate is made of a flexible, metallic, or ceramic material.

61. The CMP pad dresser of claim 60, wherein said metallic material is stainless steel.

62. A method of making a CMP pad dresser as recited in any one of claims 32–

34, comprising the steps of;

providing a substrate; and

attaching a plurality of superabrasive particles to the substrate in a pattern that reduces penetration of peripherally located particles into the CMP pad and increases penetration of centrally located particles into the CMP pad.

33. A CMP pad dresser comprising:

a substrate; and

a plurality of superabrasive particles attached to the substrate, wherein said superabrasive particles are configured in a predetermined pattern that provides a density of peripherally located particles that is higher than a density of centrally located particles.

39. The CMP pad dresser of claim 33, wherein the density of the peripherally located particles is at least about 5 times greater than the density of the centrally located particles.

40. The CMP pad dresser of claim 33, wherein the density of the peripherally located particles is at least about 2 times greater than the density of the centrally located particles.

41. The CMP pad dresser d of claim 33, wherein the density of the peripherally located particles is at least about 1.25 times greater than the density of the centrally located particles.

42. The CMP pad dresser of claim 33, wherein superabrasive particles between the centrally and peripherally located particles are placed at a density that is between the density of the centrally located particles and the peripherally located particles.

43. The CMP pad dresser of claim 33, wherein the pattern of superabrasive particles provides a substantially continuous density gradient of high at the peripherally located particles to low at the centrally located particles.

34. A CMP pad dresser comprising:

a substrate; and

a plurality of superabrasive particles attached to the substrate, wherein said superabrasive particles are configured in a predetermined pattern that provides centrally located particles with an attitude that causes higher particle penetration into the CMP pad than penetration provided by an attitude of the peripherally located particles.

44. The CMP pad dresser of claim 34, wherein the attitude of the centrally located particles is an apex at the working end thereof, and the attitude of the peripherally located particles is either an edge or a face at the working end thereof.

45. The CMP pad dresser of claim 34, wherein the attitude of the centrally located particles is an edge at the working end thereof, and the attitude of the peripherally located particles is a face at the working end thereof.

46. The CMP pad dresser of claim 34, wherein the attitude of the centrally located particles is an apex at the working end thereof, and the attitude of the peripherally located particles is a face at the working end thereof, and any particles therebetween have an attitude of an edge at the working end thereof.