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Electronic device having a stacked wiring layer including Al and Ti

  • US 7,202,165 B2
  • Filed: 09/05/2001
  • Issued: 04/10/2007
  • Est. Priority Date: 10/23/1998
  • Status: Expired due to Term
First Claim
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1. A method for fabricating a display device having a plurality of pixels, comprising:

  • forming a first metal layer including aluminum on a substrate;

    forming a second metal layer including titanium on the first metal layer; and

    wet-etching the first and second metal layers in a single etching step, wherein the wet-etched first and second metal layers are substantially free of a undercut, and wherein the wet-etching uses an etchant including a fluoric acid, a periodic acid and a sulfuric acid, in which the total weight ratio of the fluoric acid and the periodic acid is 0.05˜

    30 wt %, the weight ratio of the sulfuric acid is 0.05˜

    20 wt %, the weight ratio of the periodic acid to fluoric acid is 0.01˜

    2 wt %.

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