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Machine tool control methods and designs for fabricating mesoscopic surface structures on substrates

  • US 7,203,569 B2
  • Filed: 08/31/2004
  • Issued: 04/10/2007
  • Est. Priority Date: 08/31/2004
  • Status: Expired due to Fees
First Claim
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1. A machining tool for machining a workpiece on a workpiece support in response to control signals, comprising:

  • a cutting tool configured to cut a surface of the workpiece;

    a first displacement mechanism arranged to displace the cutting tool relative to the workpiece in a first set of coordinates in response to the control signals;

    a second displacement mechanism supported by the first displacement mechanism and arranged to displace the cutting tool relative to the workpiece in a second set of coordinates, the second displacement mechanism capable of a higher frequency response than the first displacement mechanism; and

    a controller configured to receive the control signals and synchronize the displacement of the cutting tool due to the first displacement mechanism with the displacement of the cutting tool due to the second displacement mechanism;

    wherein the controller comprises;

    a displacement determination unit that determines a target displacement of the cutting tool in the second set of coordinates and provides target displacement digital signals based on the determined target displacement;

    a digital to analog unit comprising a plurality of digital to analog converters configured to receive respective of the target displacement digital signals from the displacement determination unit and convert the target displacement digital signals to target displacement analog signals; and

    at least one switch to alternate which digital to analog converters release respective of the target displacement analog signals.

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