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Manufacturing method of acoustic sensor

  • US 7,204,009 B2
  • Filed: 07/21/2005
  • Issued: 04/17/2007
  • Est. Priority Date: 09/03/1997
  • Status: Expired due to Fees
First Claim
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1. A manufacturing method of acoustic sensor comprising in the following order a step of forming a necessary electronic circuit on a wafer, a step of forming an electrode layer on the wafer surface, a step of laminating an electret layer on said electrode layer, a step of laminating a spacer on said electret layer, a step of adhering a diaphragm on the spacer, and then a step of dividing said wafer into individual acoustic sensors.

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