Turbo sump for use with capacitive pressure sensor

• US 7,204,150 B2
• Filed: 01/14/2005
• Issued: 04/17/2007
• Est. Priority Date: 01/14/2005
• Status: Active Grant

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Grudzien, Chris P.
• Primary Examiner(s): NOORI, MASOUD H
• Application Number:
  US11/036,775
• Publication Number:
  US 20060156824A1
• Time in Patent Office: 823 Days
• Field of Search: 3612831-2834, 737/187.24, 73715-718
• US Class Current: 73/718
• CPC Class Codes: G01L 19/0609 Pressure pulsation damping arrangements
• CPC Class Codes: G01L 9/0075 using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Abstract

The disclosed pressure sensor includes a body, a diaphragm, and a flow defining structure. The body defines an interior volume. The diaphragm divides the interior volume into a first portion and a second portion. At least a first part of the diaphragm moves in a first direction when a pressure in the first portion increases relative to a pressure in the second portion. The first part of the diaphragm moves in a second direction when the pressure in the first portion decreases relative to the pressure in the second portion. The first part of the diaphragm and at least a first part of the body are characterized by a capacitance. The capacitance changes in response to movement of the first part of diaphragm relative to the first part of the body. The flow defining structure provides a fluid flow path from the first portion of the interior volume to a position outside of the internal volume. At least part of the fluid flow path extends from a first location to a second location. The at least part of the fluid flow path is characterized by a total length and a straight line distance. The total length is the shortest distance through the path from the first location to the second location. The straight line distance is the shortest distance between the first location and the second location. The total length is at least two times greater than the straight line distance.

Claims

1. A pressure sensor, comprising:

a body defining an interior volume, the body including a wall defining an aperture;

a flexible diaphragm dividing the interior volume into a first portion and a second portion, the aperture being disposed so that particles outside the interior volume must travel through the aperture to reach the diaphragm, at least a first part of the diaphragm moving in a first direction when a pressure in the first portion increases relative to a pressure in the second portion, the first part of the diaphragm moving in a second direction when the pressure in the first portion decreases relative to the pressure in the second portion, the first part of the diaphragm and at least a first part of the body being characterized by a capacitance, the capacitance changing in response to movement of the first part of the diaphragm relative to the first part of the body;

a flow defining structure, the structure being formed from ceramic and having a first structural portion disposed within the aperture, the first structural portion being spaced away from the wall, the structure defining, at least in part, a fluid flow path from the first portion of the interior volume to a position external to the interior volume, at least part of the fluid flow path extending from a first location to a second location, the at least part of the fluid flow path being characterized by a total length and a straight line distance, the total length being the shortest distance through the path from the first location to the second location, the straight line distance being the shortest distance between the first location and the second location, the total length being at least five times greater than the straight line distance.

2. A sensor according to claim 1, the flow defining structure including a central post and at least one substantially helical thread disposed around the central post.

3. A sensor according to claim 2, the flow defining structure further including a base, the base defining a plurality of apertures.

4. A sensor according to claim 1, the at least part of the fluid flow path being substantially helical.

5. A sensor according to claim 1, further including an inlet tube, the inlet tube defining an interior channel, the interior channel being in fluid communication with the fluid flow path.

6. A sensor according to claim 1, the body comprising a ceramic material, the diaphragm including a ceramic diaphragm portion and a metallic diaphragm portion.

7. A sensor according to claim 1, the first part of the body comprising a metallic film.

8. A sensor according to claim 1, the body comprising a ceramic material.

9. A sensor according to claim 1, the at least part of the fluid flow path including a fluid flow path portion characterized by a smooth curve.

21. A sensor according to claim 2, the flow defining structure further including a plurality of obstacles extending from the helical thread into at least a portion of the fluid flow path.

25. A sensor according to claim 3, the body further including a second wall defining a second aperture adjacent to the first aperture, the second aperture being larger than the first aperture, and the base being disposed in the second aperture.

10. A pressure sensor, comprising:

a body, the body including a first ceramic portion and a second ceramic portion, a first metallic film being disposed on part of the first ceramic portion of the body, the second ceramic portion of the body including a wall defining an aperture;

a diaphragm, the diaphragm including a ceramic diaphragm portion and a metallic film disposed on the ceramic diaphragm portion, the diaphragm being disposed between the first ceramic portion of the body and the second ceramic portion of the body, the diaphragm and the first ceramic portion of the body defining a first chamber, the diaphragm and the second ceramic portion of the body defining a second chamber, at least a first part of the diaphragm moving in a first direction when a pressure in the first chamber increases relative to a pressure in the second chamber, the first part of the diaphragm moving in a second direction when the pressure in the first chamber decreases relative to the pressure in the second chamber, the first part of the diaphragm and the first metallic film being characterized by a capacitance, the capacitance changing in response to movement of the first part of the diaphragm relative to the first metallic film;

an inlet tube, a first end of the inlet tube being connected to the second ceramic portion of the body, a second end of the inlet tube being configured for coupling to a source of fluid, the inlet tube defining an interior channel extending from the second end to the first end, the interior channel being in fluid communication with the aperture defined by the second ceramic portion of the body;

a ceramic flow defining structure disposed in the aperture defined by the second ceramic portion of the body, the flow defining structure including a base, a post, and a thread, the thread being disposed around the post and the thread being spaced away from the wall, the flow defining structure and the second ceramic portion of the body defining a substantially helical channel, the helical channel being configured such that at least some of the fluid traveling from the interior channel to the diaphragm passes through the substantially helical channel before reaching the diaphragm, the base separating the substantially helical channel from the interior channel, the base defining a plurality of apertures, the apertures providing fluid communication between the substantially helical channel and the interior channel.

22. A sensor according to claim 10, the flow defining structure further including a plurality of obstacles extending from the thread into at least a portion of the helical channel.

11. A pressure sensor, comprising:

a body defining an interior volume, the body including a wall defining an aperture;

a flexible diaphragm dividing the interior volume into a first portion and a second portion, the aperture being disposed so that particles outside the interior volume must travel through the aperture to reach the diaphragm, at least a first part of the diaphragm moving in a first direction when a pressure in the first portion increases relative to a pressure in the second portion, the first part of the diaphragm moving in a second direction when the pressure in the first portion decreases relative to the pressure in the second portion, the first part of the diaphragm and at least a first part of the body being characterized by a capacitance, the capacitance changing in response to movement of the first part of the diaphragm relative to the first part of the body;

a flow defining structure, the structure being formed from ceramic and having a first structural portion disposed within the aperture, the first structural portion being spaced away from the wall, the structure defining, at least in part, at least a first fluid flow path and a second fluid flow path, the first and second fluid flow paths extending from the first portion of the interior volume to a position outside of the interior volume, at least part of the first and second fluid flow paths extending from a first location to a second location, the at least part of the first fluid flow path being characterized by a total length and a straight line distance, the total length being the shortest distance through the first fluid flow path from the first location to the second location, the straight line distance being the shortest distance between the first location and the second location, the total length being at least five times greater than the straight line distance, the first fluid flow path having a higher conductance than the second fluid flow path.

12. A sensor according to claim 11, the flow defining structure including a central post and at least one substantially helical thread disposed around the central post.

13. A sensor according to claim 12, the flow defining structure further including a base, the base defining a plurality of apertures.

14. A sensor according to claim 11, the at least part of the first fluid flow path being substantially helical.

15. A sensor according to claim 11, further including an inlet tube, defining an interior channel, the interior channel being in fluid communication with the first and second fluid flow paths.

16. A sensor according to claim 11, the body comprising a ceramic material, the diaphragm including a ceramic diaphragm portion and a metallic diaphragm portion.

17. A sensor according to claim 11, the first part of the body comprising a metallic film.

18. A sensor according to claim 11, the body comprising a ceramic material.

19. A sensor according to claim 11, the at least part of the fluid flow path including a fluid flow path portion characterized by a smooth curve.

23. A sensor according to claim 11, the flow defining structure further including a plurality of obstacles extending from the helical thread into at least a portion of the fluid flow path.

20. A pressure sensor, comprising

a body defining an interior volume, the body including a wall defining an aperture;

a flexible diaphragm dividing the interior volume into a first portion and a second portion, the aperture being disposed so that particles outside the interior volume must travel through the aperture to reach the diaphragm, at least a first part of the diaphragm moving in a first direction when a pressure in the first portion increases relative to a pressure in the second portion, the first part of the diaphragm moving in a second direction when the pressure in the first portion decreases relative to the pressure in the second portion, the first part of the diaphragm and at least a first part of the body being characterized by a capacitance, the capacitance changing in response to movement of the first part of the diaphragm relative to the first part of the body;

a flow defining structure, the structure being formed from ceramic and having a first structural portion disposed within the aperture, the first structural portion being spaced away from the wall, the structure defining, at least in part, a fluid flow path from the first portion of the interior volume to a position external to the interior volume, at least part of the fluid flow path extending from a first location to a second location, the at least part of the fluid flow path being curved and being characterized by a total length and a straight line distance, the total length being the shortest distance through the path from the first location to the second location, the straight line distance being the shortest distance between the first location and the second location, the total length being at least two times greater than the straight line distance.

24. A sensor according to claim 20, the flow defining structure further including a plurality of obstacles extending into at least a portion of the fluid flow path.