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Turbo sump for use with capacitive pressure sensor

  • US 7,204,150 B2
  • Filed: 01/14/2005
  • Issued: 04/17/2007
  • Est. Priority Date: 01/14/2005
  • Status: Active Grant
First Claim
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1. A pressure sensor, comprising:

  • a body defining an interior volume, the body including a wall defining an aperture;

    a flexible diaphragm dividing the interior volume into a first portion and a second portion, the aperture being disposed so that particles outside the interior volume must travel through the aperture to reach the diaphragm, at least a first part of the diaphragm moving in a first direction when a pressure in the first portion increases relative to a pressure in the second portion, the first part of the diaphragm moving in a second direction when the pressure in the first portion decreases relative to the pressure in the second portion, the first part of the diaphragm and at least a first part of the body being characterized by a capacitance, the capacitance changing in response to movement of the first part of the diaphragm relative to the first part of the body;

    a flow defining structure, the structure being formed from ceramic and having a first structural portion disposed within the aperture, the first structural portion being spaced away from the wall, the structure defining, at least in part, a fluid flow path from the first portion of the interior volume to a position external to the interior volume, at least part of the fluid flow path extending from a first location to a second location, the at least part of the fluid flow path being characterized by a total length and a straight line distance, the total length being the shortest distance through the path from the first location to the second location, the straight line distance being the shortest distance between the first location and the second location, the total length being at least five times greater than the straight line distance.

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