High pressure capillary micro-fluidic valve device and a method of fabricating same

• US 7,204,264 B2
• Filed: 09/15/2004
• Issued: 04/17/2007
• Est. Priority Date: 04/21/2004
• Status: Active Grant

• Current Assignee: National Technology & Engineering Solutions Of Sandia LLC (Honeywell International Inc.)
• Original Assignee: Waters Investments Limited (Waters Corporation)
• Inventors: Crocker, Robert W., Gerhardt, Geoff C., Caton, Pamela F.
• Primary Examiner(s): Chambers; A. Michael
• Application Number:
  US10/941,216
• Publication Number:
  US 20050236055A1
• Time in Patent Office: 944 Days
• Field of Search: 137/15, 137/828, 137/251.1, 137/74
• US Class Current: 137/15.01
• CPC Class Codes: F15C 5/00 Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
• CPC Class Codes: F16K 2099/0074 using photolithography, e.g. etching
• CPC Class Codes: F16K 2099/0084 Chemistry or biology, e.g. "lab-on-a-chip" technology
• CPC Class Codes: F16K 99/0001 Microvalves microdevices B81B1/00; manufacture or treatment of devices or systems in or on a substrate B81C1/00; microfluidic structures B01L3/5027; micropumps F04B19/006
• CPC Class Codes: F16K 99/0003 Constructional types of microvalves; Details of the cutting-off member
• CPC Class Codes: F16K 99/0021 No-moving-parts valves
• CPC Class Codes: F16K 99/0044 using thermo-electric means
• CPC Class Codes: Y10T 137/0402 Cleaning, repairing, or assembling
• CPC Class Codes: Y10T 137/1812 In fluid flow path
• CPC Class Codes: Y10T 137/2196 Acoustical or thermal energy
• CPC Class Codes: Y10T 137/4643 Liquid valves

Abstract

A freeze-thaw valve and a method of micro-machining the freeze-thaw valve is provided and includes a valve housing, wherein the valve housing defines a housing cavity and includes a housing inlet, a housing vent, a capillary tubing inlet and a capillary tubing outlet. A valve body is provided, at least a portion of which is lithographically constructed, wherein the valve body includes a refrigerant inlet, a refrigerant outlet and an expansion chamber. The expansion chamber is disposed to communicate the refrigerant inlet with the refrigerant outlet and includes a restriction region having a flow restriction. Additionally, the valve body is disposed within the housing cavity to form an insulating channel between the valve housing and the valve body.

Claims

1. A method of micro-machining a micro-fluidic valve device comprising the steps of:

obtaining a planar substrate;

performing at least a first lithographic process on said planar substrate such that a predetermined pattern is etched into said planar substrate, wherein said predetermined pattern includes a refrigerant inlet, expansion chamber and refrigerant outlet in fluid communication;

disposing within said valve body at least one conduit proximate to said expansion chamber to facilitate communication of thermal properties of refrigerant to a fluid flowing through said at least one conduit to form a freeze-thaw region in said at least one conduit; and

providing a mating structure over said refrigerant inlet, expansion chamber and refrigerant outlet.

2. The method of claim 1 further including the steps of,

depositing a contact pad metal onto said planar substrate;

performing a second lithographic process on said planar substrate such that said contact pad metal is formed into at least one electrically conductive element on said planar substrate; and

forming a heating element on said planar substrate in electrical communication with said at least one electrically conductive element.

3. The method of claim 1, wherein at least a portion of said planar substrate is material selected from the group consisting of silicon, glass, ceramic, silver and copper.

4. The method of claim 1, wherein disposing within said valve body at least one conduit comprises including in said predetermined pattern said at least one conduit, wherein said at least one conduit has a conduit inlet and a conduit outlet.

5. The method of claim 1, wherein said predetermined pattern further includes at least one serpentine portion in fluid communication with said expansion chamber.

6. The method of claim 1, wherein said predetermined pattern further includes an expansion chamber containing a restriction region, wherein said restriction region includes a flow restriction.

7. The method of claim 1, wherein said predetermined pattern is formed using a hard mask material and said hard mask material is a silicon nitride material having an approximate thickness of 0.5 microns.

8. The method of claim 1, wherein said predetermined pattern is formed using a hard mask material and said hard mask material is an aluminum material having an approximate thickness of 0.25 microns.

9. The method of claim 1, wherein said at least one lithographic process includes at least one of a wet etch process and a Bosch etch process.

10. A freeze-thaw valve comprising:

a valve housing defining a housing cavity and including at least one housing inlet, at least one housing vent, at least one housing fluid conduit inlet and at least one housing fluid conduit outlet;

a substrate;

a valve body, at least a portion of which is lithographically etched into said substrate, said valve body including a refrigerant inlet, a refrigerant outlet and an expansion chamber, said expansion chamber being disposed to provide fluid communication between said refrigerant inlet and said refrigerant outlet; and

at least one conduit disposed within said valve body and having a conduit inlet and a conduit outlet, said at least one conduit disposed proximate to said expansion chamber to facilitate communication of thermal properties of said refrigerant to a fluid flowing through said at least one conduit to form a freeze-thaw region in said at least one conduit.

11. The freeze-thaw valve according to claim 10, wherein said valve housing includes at least one mounting structure disposed within said housing cavity for non-movably containing said valve body within said valve housing.

12. The freeze-thaw valve according to claim 10, wherein said valve body includes at least one electrically conductive surface and said valve body is electrically connected to external controls to induce heating of said valve body and thaw said fluid in said at least one conduit.

13. The freeze-thaw valve according to claim 12, wherein said valve body is electrically connected to external controls by a plurality of electrical spring contacts disposed in said housing and engaging said at least one electrically conductive surface on said valve body.

14. The freeze-thaw valve according to claim 13, wherein said plurality of electrical spring contacts disposed in said housing are connected to a wiring harness to provide electrical continuity between the valve body and said external controls via said wiring harness.

15. The freeze-thaw valve according to claim 10, wherein said valve body is disposed within said housing cavity to form a thermally insulating void between said valve housing and said valve body.

16. The freeze-thaw valve according to claim 10, further including a porous element disposed proximate to said refrigerant outlet.

17. The freeze-thaw valve according to claim 10, wherein said at least one conduit includes at least one capillary tube disposed within said at least one conduit and said at least one capillary tube traverses said at least one conduit such that said at least one capillary tube extends from said conduit inlet and said conduit outlet.

18. The freeze-thaw valve according to claim 10, further including a supply capillary tube and wherein said supply capillary tube is bonded in said refrigerant inlet of said valve body to form a refrigerant tubing conduit.

19. The freeze-thaw valve according to claim 18, wherein said refrigerant tubing conduit is of a smaller inner diameter than said expansion chamber.

20. The freeze-thaw valve according to claim 10, wherein said valve body further includes a flow restriction region between said expansion chamber and said refrigerant outlet.

21. The freeze-thaw valve according to claim 20, wherein said flow restriction region includes said refrigerant tubing conduit.

22. The freeze-thaw valve according to claim 20, wherein said flow restriction region includes an orifice fabricated upstream and proximate to said expansion chamber, and said orifice creates a restriction that causes a localized pressure drop in said refrigerant as it passes into said expansion chamber.

23. The freeze-thaw valve according to claim 10, wherein said valve body further includes at least one serpentine portion in fluid communication with said refrigerant inlet and said refrigerant outlet.

24. The freeze-thaw valve according to claim 10, wherein said valve body further includes a plurality of substantially parallel channels in fluid communication with said expansion chamber and said refrigerant outlet.

25. The freeze-thaw valve according to claim 10, further including a refrigerant vent channel, said refrigerant vent channel communicating said expansion chamber with said refrigerant outlet.

26. The freeze-thaw valve according to claim 11, wherein said valve body is non-movably disposed within said housing cavity using an adhesive.

27. The freeze-thaw valve according to claim 10, wherein said valve body is formed of material selected from the group consisting of silicon, glass, ceramic, silver and copper.

28. The freeze-thaw valve according to claim 12, wherein said at least one electrically conductive surface on said valve body is used to sense electrical resistance change of said valve body sense temperature of said valve body.

29. The freeze-thaw valve according to claim 28, wherein said electrical resistance change of said valve body is used for feedback control of application of heater or refrigerant to said valve body.