Semiconductor substrate damage protection system

• US 7,204,669 B2
• Filed: 07/17/2002
• Issued: 04/17/2007
• Est. Priority Date: 07/17/2002
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Reimer, Peter, Cho, Sungmin, Seidl, Vincent
• Primary Examiner(s): Keenan; James W.
• Application Number:
  US10/198,688
• Publication Number:
  US 20040013499A1
• Time in Patent Office: 1,735 Days
• Field of Search: 414/217.1, 414/805, 414/811
• US Class Current: 414/800
• CPC Class Codes: H01L 21/67259 Position monitoring, e.g. misposition detection or presence detection
• CPC Class Codes: H01L 21/67265 of substrates stored in a container, a magazine, a carrier, a boat or the like
• CPC Class Codes: H01L 21/67379 characterised by coupling elements, kinematic members, handles or elements to be externally gripped
• CPC Class Codes: H01L 21/67772 involving removal of lid, door, cover
• CPC Class Codes: H01L 21/67775 Docking arrangements
• CPC Class Codes: H01L 21/682 Mask-wafer alignment in general G03F7/70, G03F9/70

Abstract

A method and apparatus for preventing substrate damage in a factory interface. In one embodiment, a method for preventing substrate damage in a factory interface includes the steps of receiving an indicia of potential substrate damage, and automatically preventing substrates from moving out of a substrate storage cassette in response to the received indicia. The indicia may be a seismic warning signal, among others. In another embodiment, a method for preventing substrate damage in a factory interface includes the steps of moving a pod door in a first direction to a position spaced-apart and adjacent a pod, and moving the pod door laterally in a second direction to close the pod. The lateral closing motion of the pod door urges substrates, which may be misaligned in the pod, into a predefined position within the pod.

Claims

1. A method for preventing substrate damage in a factory interface comprising:

receiving an indicia of potential substrate damage; and

automatically closing a pod door to a pod to prevent substrates from moving out of a substrate storage cassette positioned in the pod in response to the received indicia.

2. The method of claim 1, wherein the step of receiving the indicia further comprises:

sensing one or more substrates extending between a substrate storage pod and the factory interface.

3. The method of claim 2, wherein the step of sensing substrates further comprises:

interpreting an image received from a camera disposed in the factory interface.

4. The method of claim 1, wherein the step of receiving an indicia further comprises:

sensing a seismic event.

5. The method of claim 4, wherein the step of sensing a seismic event further comprises:

receiving a signal from a seismic warning network.

6. The step of claim 4, wherein the step of sensing the seismic event further comprises:

detecting motion at the factory interface.

7. The step of claim 6, wherein the step of detecting motion at the factory interface further comprises

receiving a signal from an accelerometer.

8. The method of claim 1, wherein the step of receiving an indicia further comprises:

receiving information regarding a current or forecasted event selected from the group events consisting of weather events, geological events, power loss, voltage reduction, fire, utility interruption, terrorism, warfare, social or civil unrest and flooding.

9. The method of claim 1, wherein the step of preventing one or more substrates from moving out of the cassette further comprises:

pushing substrates back into the cassette.

10. The method of claim 1, wherein the step of closing the pod door further comprises moving the pod door in a direction perpendicular to a centerline of pod.

11. A method for preventing substrate damage in a factory interface comprising:

moving a pod door in a first direction to a position spaced-apart and adjacent a pod; and

moving the pod door laterally in a second direction to close the pod in response to an indicia of potential substrate damage.

12. The method of claim 11, wherein the steps of moving the pod door are made in response to substrates being misaligned in the pod.

13. The method of claim 12, wherein the step of moving the pod door returns the misaligned substrates to a predefined position within the pod.

14. A method for preventing substrate damage in processing system comprising:

receiving information regarding seismic activity; and

automatically closing a door of a pod in response to the received information.

15. The method of claim 14, wherein the step of receiving information further comprises:

receiving a signal from a seismic alert network.

16. The method of claim 14, wherein the step of receiving information further comprises:

receiving a signal from an accelerometer coupled to the processing system.

17. A method for preventing substrate damage in a factory interface comprising:

receiving a signal from a seismic warning network; and

taking action to prevent substrate damage in response to the signal, wherein the step of taking action further comprises closing a pod door to a pod to prevent substrates from moving out of a substrate storage cassette.